히스테리시스 보상을 이용한 압전구동기의 초정밀 위치제어

Ultra-Precision Position Control of Piezoelectric Actuator System Using Hysteresis Compensation

In this paper, the ultra precision positioning system for piezoelectric actuator using hysteresis compensation has been developed. Piezoelectric actuators exhibit limited accuracy in tracking control due to their hysteresis nonlinearity. The main purpose of the proposed controller is to compensate the hysteresis nonlinearity of the piezoelectric actuator. The controller is composed of a PD, hysteresis compensation and neural network part in parallel manner, at first, the excellent tracking performance of the neural network controller was verified by experiments and was compared with the classical PD controller.