• 제목/요약/키워드: photolithography

검색결과 507건 처리시간 0.039초

모사 광전자 소자 상에 적용한 마이크로렌즈 어레이의 UV 성형 (UV molding of Microlens Array on the Simulated Optoelectronic Device)

  • 구승완;김석민;강신일;손현주
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.377-380
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    • 2003
  • Recently, demand of digital products with optoelectronic device is increasing rapidly. A microlens array is applied to improve optical efficiency on optoelectronic device, and it is usually fabricated by photolithography and reflow process after planarization layer coating process. UV molding process is more suitable for mass production of high quality microlens array than photolithography and reflow process. In the present study, microlens array was fabricated on the simulated optoelectronic device with planarization layer by aligned UV molding process. The shape of replicated microlens was measured, and the section image of molded part was examined.

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금속표면의 Surface texturing 효과에 대한 실험적 설계변수 (Experiment Design Parameter for the Effect of Surface Texturing on Metal Surface)

  • 채영훈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1145-1150
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    • 2005
  • The aim of this paper is to investigate the effect of surface texturing on metal surface and to understand the potential of friction reduction through micro-scale dimple to fabricate by photolithography on pin-on-disk test using flat-on-flat contact geometry. It was verify that the friction property with respect to the same pitch has been influence on the size of dimple under lubricated sliding contact. Also, we can recognize from Stribeck curve that the friction property has a connection with the size of dimple. It can explain a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. The friction property has been an effect on the size of surface texture on reduction friction, not only because the density of dimple, but also because the ratio of diameter/pitch. This ratio of approximately 0.5 is recommend under the tested friction condition. It suggested that the ratio of d/p is an important parameter for surface texture design.

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마이크로 크기를 가지는 빗살무늬 그루우브 패턴의 빗살각도변화에 대한 실험적 마찰특성 (Sliding Friction Property of Angle Effect for Crosshatch Micro-grooved Pattern under Lubricated)

  • 김석삼;채영훈
    • 한국기계가공학회지
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    • 제10권3호
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    • pp.94-99
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    • 2011
  • Micro-scale surface pattern has an benefit of tribological application under lubricated sliding contact. Therefore, a special pattern, that has to reduce the coulomb friction under contact, is considered to be necessary for improved efficiency of machines. The current study investigated the friction property of angle effect for micro-scale grooved crosshatch pattern on bearing steel surface using pin-on-disk type. The samples fabricated by photolithography process and then these are carry out the electrochemical etching process. We discuss the friction property due to the influence of hatched-angle on contact surface. We could be explained the lubrication mechanism for a Stribeck curve. It was found that the friction coefficient depend on an angle of the crosshatch on contact surface. It was thus verified that micro-scale crosshatch grooved pattern could affect the friction reduction.

Micro-scale surface texturing을 기반으로 한 저마찰효과에 대한 기초연구 (Fundamental study on the effect of friction reduction based micro-scale surface texturing)

  • 채영훈;김석삼
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2004년도 학술대회지
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    • pp.17-24
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    • 2004
  • Surrface texturing of tribological application is another attractive technology of friction reducing. Also, reduction of friction is therefore considered to be a necessary requirement for improved efficiency of machine. In this paper attempts to investigate the effect of density for micro-scale dimple pattern using photolithography on bearing steel flat mated with pin-on-disk. We demonstrated the lubrication mechanism for a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. It is found that friction coefficient is depended on the density of surface pattern. It was thus verified that micro-scale dimple could affect the friction reduction considerably under mixed and hydrodynamic lubrication conditions from based on friction map. Lubrication condition regime has an influence on the friction coefficient induced the density of micro dimple.

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Inkjet Printable Transparent Conducting Oxide Electrodes

  • 김한기
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.59.2-59.2
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    • 2011
  • We have demonstrated ink-jet printed indium tin oxide (ITO) and indium tin zinc oxide (IZTO) electrodes for cost-efficient organic solar cells (OSCs). By ink-jetting of crystalline ITO nano-particles and performing a rapid thermal anneal at $450^{\circ}C$, we were able to obtain directly patterned-ITO electrodes with an average transmittance of 84.14% and a sheet resistance of 202.7 Ohm/square without using a conventional photolithography process. The OSCs fabricated on the directly patterned ITO electrodes by ink-jet printing showed an open circuit voltage of 0.57 V, short circuit current of 8.47 mA/cm2, fill factor of 44%, and power conversion efficiency of 2.13%. This indicates that the ITO directly-patterned by ink-jet printing is a viable alternative to sputter-grown ITO electrodes for cost-efficient printing of OSCs due to the absence of a photolithography process for patterning and more efficient ITO material usage.

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Formation of Black Matrix and Ag Electrode Patterns by Photolithographic Process for High Resolution PDP

  • So, Jae-Yong;Kwon, Hyeok-Yong;Kim, Suk-Kyung;Park, Lee-Soon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.369-372
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    • 2008
  • Black matrix and Ag electrode with uniform line pitches were successfully fabricated through the photolithographic process by using the photosensitive black pastes and Ag pastes with optimized photosensitive properties for high resolution PDPs. The photosensitivity of the black and Ag pastes in the photolithographic process was investigated with the variation of photosensitive BM and Ag pastes and the photolithography process conditions. The important components and formulation of the photosensitive BM and Ag paste we discussed.

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Narrow Channel Formation Using Asymmetric Halftone Exposure with Conventional Photolithography

  • Cheon, Ki-Cheol;Woo, Ju-Hyun;Jung, Deuk-Soo;Park, Mun-Gi;Kim, Hwan;Lim, Byoung-Ho;Yu, Sang-Jean
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.258-260
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    • 2008
  • Developed halftone exposure technique was successfully applied to the fabrication of narrow transistor channels below $4\;{\mu}m$ with conventional photolithography method. Asymmetric slits concept of photo mask was applied to make channel lengths (L) shorter for thin film transistor's (TFT) high performance. These short channel TFTs verified better quality transistor characteristics.

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가스 블로잉을 이용한 PDMS 스텐실 제작 및 3T3 세포의 마이크로 패터닝 (Fabrication of PDMS Stencil using Gas Blowing for Micropatterned 3T3 Cell Culture)

  • 최진호;김규만
    • 한국정밀공학회지
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    • 제30권2호
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    • pp.236-240
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    • 2013
  • In this presentation, we propose a fabrication method of PDMS stencil to apply into a localized culture of NIH/3T3 cells. PDMS stencil was fabricated by nitrogen gas blowing and soft lithography from preparing SU-8 master mold by photolithography. PDMS stencil pattern was production of the circle size 20 to $500{\mu}m$. In the culture test of PDMS stencil, a stencil was placed on a glass disk. The NIH/3T3 cells were successfully cultured into micropatterns by using the PDMS stencil. The results showed that cells could be cultured into micropatterns with precisely controlled manner at any shapes and specific size for bioscience study and bioengineering applications.

역학적 유체 리소그래피 기술 (Dynamic Flow Lithography Technologies)

  • 정수은;박욱;권성훈
    • 대한의용생체공학회:의공학회지
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    • 제30권6호
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    • pp.453-460
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    • 2009
  • In this review paper, concepts in optofluidics are applied to an advanced manufacturing technology based on self-assembled microparts. The "optical" aspect of optofluidics will be described in the context of photolithography, and the "fluidic" aspect will be discussed in the context of self-assembly. First, optofluidic maskless lithography will be introduced as a dynamic fabrication method to generate microparticles in microfluidic channels. Next, the history and application of optofluidic lithography will be presented.

마이크로 Crosshatch 그루우브 표면패턴의 각도에 따른 미끄럼마찰특성 (Effect of Friction Property for Angles of Micro-scale Crosshatch Grooved Surface Pattern under Sliding Lubricated Contact)

  • 채영훈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.165-166
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    • 2006
  • Surface pattern of tribological applications is an attractive technology of engineered surface. Therefore, friction reduction is considered to be necessary for improved efficiency of machines. This study investigated the effect of friction property fur angles of micro-scale crosshatch grooved surface pattern on bearing steel flat mated with pin-on-disk. We obtain sample which can be fabricated by photolithography process. We discuss friction property depend on an angle of cross-hatch grooved pattern. We can verify the lubrication mechanism as a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter under the lubrication condition. It was found that the friction coefficient was related to angle of crosshatch on surface, even when surface pattern was the same density.

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