• Title/Summary/Keyword: photo-pattern

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Investigation of Characterization and Fabrication High-Temperature Superconducting Multiplexer by Pulse laser Deposition (레이저 공정을 이용한 고온초전도 멀티플렉서의 제작과 특성 분석)

  • Kim, Cheol-Su;Song, Seok-Chun;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1858-1860
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    • 1999
  • To fabricate superconducting multiplexers with narrow pass band characteristics and reduce the physical size of device, we have designed multiplexer using hair-pin type filters with the center frequency of 13.6 GHz. Multiplexers have been fabricated superconductor(HTS), because It has low surface resistance. The $YBa_2Cu_3O_{7-{\delta}}$(YBCO) films were deposited on MgO substrates$(20{\times}20{\times}0.5mm^3)$ by using pulsed laser deposition and conventional photo-lithographic methods were used to pattern the multiplexer. Epitaxial YBCO films were grown on(100) MgO substrates and showed strongly c_axis orientations observed by X-ray diffraction technique. Superconducting transition temperatures were measured to be about 89K. Simulated results of superconducting multiplexer consisting of hair-pin type filters show the insertion loss of about 1.2dB. The measured frequency response will be compared with the simulated results.

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A Study on the Deposit Uniformity and Profile of Cu Electroplated in Miniaturized, Laboratory-Scale Through Mask Plating Cell for Printed Circuit Board (PCBs) Fabrication

  • Cho, Sung Ki;Kim, Jae Jeong
    • Korean Chemical Engineering Research
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    • v.54 no.1
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    • pp.108-113
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    • 2016
  • A miniaturized lab-scale Cu plating cell for the metallization of electronic devices was fabricated and its deposit uniformity and profile were investigated. The plating cell was composed of a polypropylene bath, an electrolyte ejection nozzle which is connected to a circulation pump. In deposit uniformity evaluation, thicker deposit was found on the bottom and sides of substrate, indicating the spatial variation of deposit thickness was governed by the tertiary current distribution which is related to $Cu^{2+}$ transport. The surface morphology of Cu deposit inside photo-resist pattern was controlled by organic additives in the electrolyte as it led to the flatter top surface compared to convex surface which was observed in the deposit grown without organic additives.

A Study on a Microreplication Process for Real 3D Structures Using a Soft Lithography (동분말이 함유된 에폭시 수지를 이용한 마이크로 기어의 제작에 관한 연구)

  • Chung Sungil;Park Sunjoon;Lee Inhwan;Jeong Haedo;Cho Dongwoo
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.12
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    • pp.29-36
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    • 2004
  • In this paper, a new replication technique for a real 3D microstructure was introduced, in which a master Pattern WES made of photo-curable epoxy using a microstereolithography technology, and then it was transferred onto an epoxy-copper particle composite. A helical gear was selected as one of the real 3D microstructure for this study, and it was replicated from a pure epoxy to an epoxy composite. In addition, the transferability of the microreplication process was evaluated, and the properties of :he epoxy composite were compared to that of the pure epoxy, including hardness, wear-resistance and thermal conductivity.

Fabrication of Biochip Using Gray-scale Photolithography (Gray-scale photolithography를 이용한 바이오칩 제작)

  • Bae, Young-Min
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.1
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    • pp.137-141
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    • 2008
  • Biochip, which implements bioanalytical process on a tiny surface, is one of candidates for medical diagnosis, drug screening, and molecular sensing. In general, a type of biochip based on microfluidics is composed of microcomponents including microchannel, pump, and valve, which require complicated processes. In this study, gray-scale photolithography(GSPL) was applied to fabricate a biochip with multiple layers. A mould for casting PDMS(polydimethylsiloxane) channel, was fabricated using GSPL. A gray-photomask was prepared by printing gray patterns on a high-quality glossy paper followed by photoreducing by 10:1 onto the photo-film. The formation of multiple layers was studied according to the change of gray level of pattern and the developing time. A biochip composed of a weir(multiple layer structure) and a reaction chamber in a single microchannel was fabricated in a glass plate. Finally, we investigated the application of biochip to antigen-antibody reaction by packing the microbead coated with antibody.

Optimal unidirectional grid tied hybrid power system for peak demand management

  • Vineetha, C.P.;Babu, C.A.
    • Advances in Energy Research
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    • v.4 no.1
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    • pp.47-68
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    • 2016
  • A well designed hybrid power system (HPS) can deliver electrical energy in a cost effective way. In this paper, model for HPS consisting of photo voltaic (PV) module and wind mill as renewable energy sources (RES) and solar lead acid battery as storage device connected to unidirectional grid is developed for peak demand reduction. Life time energy cost of the system is evaluated. One year hourly site condition and load pattern are taken into account for analysing the HPS. The optimal HPS is determined for least life time energy cost subject to the constraints like state of charge of the battery bank, dump load, renewable energy (RE) generation etc. Optimal solutions are also found out individually for PV module and wind mill. These three systems are compared to find out the most feasible combination. The results show that the HPS can deliver energy in an acceptable cost with reduced peak consumption from the grid. The proposed optimization algorithm is suitable for determining optimal HPS for desired location and load with least energy cost.

Thin-Beam Directional X'tallization Technology for Fabrication of Low Temperature Poly-Si Transistors

  • Park, Ji-Yong;Knowles, David S.;Burfeindt, Bernd
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1108-1111
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    • 2005
  • We propose an improved laser crystallization method based on a directional lateral growth technique. To assess the feasibility of this technique, we have developed an experimental prototype using a 351 nm XeF excimer laser and special optics to produce a long and extremely sharp, narrow beam without need for a photo type mask pattern. Using this system, we have demonstrated very uniform directional laterally grown poly-Si films without any grain boundary protrusions. We believe this method can meet the high performance and uniformity requirements needed for future TFTs in System On Panel (SOP) and OLED applications, as well as providing high process throughput for mass production.

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Characteristics of Thin Film Inductors and Its Annealing After Effects (내부코일형 박막 인덕터의 특성과 열처리 효과)

  • Min, B.K.;Kim, H.S.;Song, J.S.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1498-1499
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    • 1998
  • Thin film inductors of 10 mm ${\times}$ 10 mm with spiral pattern of 14 turns were fabricated by sputtering, photo-masking, and etching processes. Their impedence characteristics and annealing after effects were investigated. After magnetic annealing, the impedence characteristics of the inductors were improved at comparatively low frequencies, but the tendencies of it for thr frequency changes were almost same. These improvement was caused by the annihilation of the internal stresses of films, Uniaxial field annealed thin film inductor had an inductance of 1000 nH, resistance of 6 $\Omega$, and quality factor of 1 at 2 MHz.

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A Study on Laser Micro-Patterning using UV Curable Polymer (광경화성 폴리머를 이용한 레이저 미세패터닝의 기초연구)

  • 김정민;신보성;김재구;장원석;양성빈
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.612-615
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    • 2003
  • Maskless laser patterning process is developed using 3rd harmonic Diode Pumped Solid State Laser with near visible wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and polymer optical property to gain the optimal conditions. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8${\mu}{\textrm}{m}$ width and 5.4${\mu}{\textrm}{m}$ height. This process could be applied to fabricate a single mode waveguide without expensive mask projection method.

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Design and Manufacturing Factors of Micro-via Buildup Substrate Technology

  • Tsukada, Yutaka
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2001.09a
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    • pp.183-192
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    • 2001
  • 1- Buildup PCB technology is utilized to a bare chip attach substrate technology for packaging of semiconductor chip 2- Requirement for the substrate design rule is described in SIA International Technology Roadmap for Semiconductor. 3- There are seven fabrication methods of build-up technology. 4- Coating and lamination for resin and photo, and laser for micro via hope processes are available. Below $50\mu\textrm{m}$ in diameter is possible. 5- Fine pitch lines down to $30\mu\textrm{m}$ can be achieved by pattern plating with better electrical property. 6- Dielectric loss reduction is a key material improvement item for next generation build-up technology. 7- High band width up to 512 GB/s is possible with current wiring groundrule.

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A Study on the Direct Casting of Photo-polymer (포토 폴리머의 직접 주조에 관한 연구)

  • Kim, Woo-Soon;Kim, Dong-Hyun
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.6
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    • pp.127-133
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    • 2006
  • Rapid prototyping technologies have been widely used to reduce the development cost of new products. Manufacturing industries are nowadays characterized by the flexibility and complexity of products. This to due to the rapid development of manufacturing technology and diverse needs of customers. In this paper, the best homing out and casting condition for getting casting product of resin pattern(photopolymer) have been examined experimentally. In generally, the burning out and casting conditions have effect on the casting products. Using the direct casting. we directly Producted the Jewelry. And in this paper, we used only gypsum. Many study of casting for resin have been used to dental investment. A dental investment is good for resin casting. but dental investment is too hard and not useful on the jewelry casting. Therefore we need to find the way of resin casting by gypsum.