Browse > Article

A Study on a Microreplication Process for Real 3D Structures Using a Soft Lithography  

Chung Sungil (LG생산기술원 자동화기술그룹)
Park Sunjoon (부산대학교 정밀기계공학과)
Lee Inhwan (포항공과대학교 기계공학과)
Jeong Haedo (부산대학교 정밀정형 및 금형가공연구소)
Cho Dongwoo (부산대학교 정밀기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.12, 2004 , pp. 29-36 More about this Journal
Abstract
In this paper, a new replication technique for a real 3D microstructure was introduced, in which a master Pattern WES made of photo-curable epoxy using a microstereolithography technology, and then it was transferred onto an epoxy-copper particle composite. A helical gear was selected as one of the real 3D microstructure for this study, and it was replicated from a pure epoxy to an epoxy composite. In addition, the transferability of the microreplication process was evaluated, and the properties of :he epoxy composite were compared to that of the pure epoxy, including hardness, wear-resistance and thermal conductivity.
Keywords
Microreplication process; A helical gear; hardness; Wear-resistance; Thermal conductivity;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Chung, S. I., Im, Y. G., Kim, H. J., Jeong, H. D., Dornfeld, D. A., 'Evaluation of micro replication technology using silicone rubber molds and its applications,' International Journal of Machine tools and Manufacture Vol. 43, No. 13, pp.1337-1345, 2003   DOI   ScienceOn
2 Gindl, M., Sinn, G., Gindl, W., Reiterer, A., Tscheggl, S., 'A comparison of different methods to calculate the surface free energy of wood using contact angle measurements,' Colloids and Surfaces A: Physicochem. Eng. Aspects Vol. 181 pp.279-287, 2001   DOI   ScienceOn
3 Bustillo, J. M., Howe, R. T. and Muller, R. S., 'Surface micromaching for MEMS,' Proceedings of the IEEE Vol. 86, No. 8, pp. 1552-1574, 1998   DOI   ScienceOn
4 Zhang, J., Tan, K. L. and Gong, H. Q., 'Characterization of the polymerization of SU-8 photoresist and its applications in MEMS,' Polymer test Vol. 20, pp. 693-701, 2001   DOI   ScienceOn
5 Friedrich, C.R., Coane, P.J. and Vasile, M.J., 'Micromilling development and applications for microfabrication,' Microelectronic Engineering Vol. 35, No. 1-4, pp.367-372, 1997   DOI   ScienceOn
6 Gustafsson, S. E., 'Transient plane source techniques for thermal conductivity and thermal diffusivity measurements of solid materials,' Rev Sci Instrum Vol. 62, No. 3, pp. 797-804, 1991   DOI
7 Chung, S. I., Im, Y. G., Jeong, H. D., Nakagawa, T., 'A study on characteristics improvement of epoxy rsin mold using metal fillers and its application,' J. KSPE, Vol. 20, No. 4, pp.165-173, 2003   과학기술학회마을
8 Suwanprateeb, J., 'Calcuim carbonate filled polyethylene: correlation of hardness and yield stress,' Composites: Part A Vol. 31, pp. 353-359, 2003   DOI   ScienceOn
9 Low, I. M., Shi, C., Paglia, G., 'Comparison of indentation responses in pure and zirconium phosphate-filled epoxies,' Materials Letters Vol. 38, pp. 77-81, 1999   DOI   ScienceOn
10 William, D., Callister, Jr., 'Materials science and engineering - third edition,' John Wiley & Sons, Inc., Toronto pp. 767-771, 1994
11 Ikuta, K., Hirowatari K., 'Real three-dimensional micro fabrication using stereolitho-graphy and metal forming,' Proc. of IEEE international workshop on MEMS' 93 pp.42-47, 1993
12 Lee, D. G., Lee, H. G., Kim, P. J. and Bang, K. G., 'Micro-drilling of alumina green bodies with diamond grit abrasive micro-drills,' International Journal of Machine Tools and Manufacture Vol. 43, No. 6, pp.551-558, 2003   DOI   ScienceOn
13 Kim, Y. T., Park, S. J., Lee, S.J, 'Machining of micro-scale shape using micro-EDM process,' J. of KSPE Vol. 20, No. 9, pp.109-117, 2003   과학기술학회마을
14 Farsari, M., Birch, P., 'A novel high-accuracy microstereolithography method employing an adaptive electro-optic mask,' Journal of Material Processing Technology, pp. 167-172. 2000   DOI   ScienceOn