• Journal of the Korean Society of Industry Convergence
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• v.9 no.2
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• pp.141-145
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• 2006

In case of sense case manufactured by method of outage capacity, sensitivity is declined by outside effect and method of the photo electricity has a problem in transmission. therefore, packing case of composite sense should be developed to improve such a problem about influence of outside environment and its property evaluation has been performed. Mechanical property and result of analysis & test evaluation of Mat'l on aluminum die-casting(ADC 12type) Mat'l developed are as following. Tensile test piece, No. 4 of KS B 0801, has been applied to mechanical property test of Mat'l and It has been tested by method of metal mat'l tensile test(KS B 0802 : 2003). It can be found that physical property to KS(Korea Standard) is excellent. and homogeneous mechanical property appears. Test of Mat'l analysis has been performed by using OE Spectrometer, according to ASTM E 1251 : 1994 regulation. Consequently, good and homogeneous component contents classified by element to standard, except for Fe, have been obtained with coordination of Fe content as below 1.3% from composition standard of Aluminum Die-casting.

• Proceedings of the Korea Information Processing Society Conference
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• 2015.10a
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• pp.578-579
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• 2015

Transmission and reflectance are two non-invasive techniques to perform pulse oximetry. This paper presents a design of reflectance-based pulse oximetry for watch-type wearable device, in which sensor and detector are located on the same surface of the body part. The basic principle of a pulse oximeter is based on the measurement of the red and infrared (IR) light absorption. Oxygenated blood has significant differences of light absorption characteristics than deoxygenated blood under red (660 nm) and infrared (940 nm) wavelength. Infrared is absorbed more by oxygenated hemoglobin than red. So the hardware implementation is included placing of the two LEDs (red and IR) with single photo-detector in the middle on the patient's wrist to get the corresponding pulsatile signals which are used to estimate the $SpO_2$.

• The Journal of the Korea institute of electronic communication sciences
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• v.17 no.1
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• pp.181-186
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• 2022

There is a demand for an intermodal automatic transport bogie as a means for efficient logistics transport. Intermodal is characterized by high demand for single-track operation in a specific section in connection with heterogeneous transportation means. In this study, a driving information system that is simple and optimized for the intermodal automatic transportation bogie is implemented to be suitable for the characteristics of the inter-modal automatic transportation bogie, unlike the existing railroad operation system, and applied to a real large-scale demonstration model to ensure in-place stopping and a smooth interface between each system. and operational examples with a simplified system.

• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.74-84
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• 2022

As the semiconductor industry develops, the difficulty of newly required process technology becomes difficult, and the importance of production yield and product reliability increases. As an effort to minimize yield loss in the manufacturing process, interests in the process defect process for facility diagnosis and defect identification are continuously increasing. This research observed the plasma condition changes in the multi oxide/nitride layer deposition (MOLD) process, which is one of the 3D-NAND manufacturing processes through optical emission spectroscopy (OES) and monitored the result of whether the change in plasma characteristics generated in repeated deposition of oxide film and nitride film could directly affect the film. Based on these results, it was confirmed that if a change over a certain period occurs, a change in the plasma characteristics was detected. The change may affect the quality of oxide film, such as the film thickness as well as the interfacial surface roughness when the oxide and nitride thin film deposited by plasma enhenced chemical vapor deposition (PECVD) method.

• Journal of the Korea Society of Computer and Information
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• v.18 no.9
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• pp.33-41
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• 2013

In this paper, a photovoltaic switch is suggested that is operated by solar module, a substitute for CdS(Cadmium Sulfide) of most existing automatic switches and thus is powered by its renewably charged battery, and its usability is investigated through various experiments. At first the characteristics of CdS and the operation principle of the existing automatic switch are investigated, and then the characteristics of solar module are examined. These preparatory research shows the possibility of substitution of solar module instead of CdS in light activated switch. Secondly the suggested photovoltaic switch's circuit is designed, implemented and then its experimental comparison data shows the possibility for the replacement of the existing switch to the suggested switch, and furthermore its superiorities.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.189-189
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• 2015

Plasmonics, sensor, field effect transistors, solar cells 등 다양한 적용분야를 가지는 실리콘 구조체는 제작공정에 의해 전기적 및 광학적 특성이 달라지기 때문에 적합한 나노구조 제작방법이 요구되고 있다. 나노구조체 제작방법으로는 Photo lithography, Extreme ultraviolet lithography (EUV), Nano imprinting lithography (NIL), Block copolymer (BCP) 방식의 방법들이 연구되고 있으며, 특히 BCP는 direct self-assembly 특성을 가지고 있으며 가격적인 면에서도 큰 장점을 가진다. 하지만 BCP를 mask로 사용하여 식각공정을 진행할 경우 BCP가 버티지 못하고 변형되어 mask로서의 역할을 하지 못한다. 이러한 문제를 해결하기 위하여 본 논문에서는 BCP와 질화막을 이용한 double mask 방법을 사용하였다. 기판 위에 BCP를 self-assembly 시키고 mask로 사용하여 hole 부분으로 노출된 기판을 Ion gun을 통해 질화 시킨 후에 BCP를 제거한다. 기판 위에 hole 모양의 질화막 표면은 BCP와 다르게 etching 공정 중 변형되지 않는다. 이러한 질화막 표면을 mask로 사용하여 pillar pattern의 실리콘 나노구조체를 제작하였다. 질화막 mask로 사용되는 template은 PS와 PMMA로 구성된 BCP를 사용하였다. 140kg/mol의 polystyrene과 65kg/mol의 PMMA를 톨루엔으로 용해시키고 실리콘 표면 위에 spin coating으로 도포하였다. Spin coat 후 230도에서 40시간 동안 열처리를 진행하여 40nm의 직경을 가진 PS-b-PMMA self-assembled hole morphology를 형성하였다. 질화막 형성 및 etching을 위한 장비로 low-energy Ion beam system을 사용하였다. Reactive Ion beam은 ICP와 3-grid system으로 구성된 Ion gun으로부터 형성된다. Ion gun에 13.56 MHz의 frequency를 갖는 200W 전력을 인가하였다. Plasma로부터 나오는 Ion은 $2{\Phi}$의 직경의 hole을 가지는 3-grid hole로 추출된다. 10~70 voltage 범위의 전위를 plasma source 바로 아래의 1st gird에 인가하고, 플럭스 조절을 위해 -150V의 전위를 2nd grid에 인가한다. 그리고 3rd grid는 접지를 시켰다. chamber내의 질화 및 식각가스 공급은 2mTorr로 유지시켰다. 그리고 기판의 온도는 냉각칠러를 이용하여 -20도로 냉각을 진행하였다. 이와 같은 공정 결과로 100 nm 이상의 높이를 갖는 40 nm직경의 균일한 Silicon pillar pattern을 형성 할 수 있었다.

• Journal of Sensor Science and Technology
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• v.18 no.1
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• pp.77-85
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• 2009

We propose a new image pixel architecture which has OFD(Over Flow Device) node by improving conventional 3TR pixel structure. Newly designed pixel consists of photo diode which is verified with HSPICE simulation, PMOS reset transistor, several NMOS and several PMOS transistors. Photodiode signals from each PMOS and NMOS are detected by Reset PMOS. These output signals give enough chances to detect wide operation coverage because OFD node has overflow photocurrent. According to various light intensity, we analyzed characteristic of the output voltage with a SPICE tool. Proposed pixel output has specific value which can detect possible from $0.1{\mu}W/cm^2$ to $10W/cm^2$ light intensity. It has wide-dynamic range of 160 dB.

• Journal of Sensor Science and Technology
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• v.13 no.2
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• pp.101-109
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• 2004

This paper presents a novel z-axis accelerometer with perfectly aligned vertical combs fabricated using the extended sacrificial bulk micromachining (extended SBM) process. The z-axis accelerometer is fabricated using only one (111) SOI wafer and two photo masks without wafer bonding or CMP processes as used by other research efforts that involve vertical combs. In our process, there is no misalignment in lateral gap between the upper and lower comb electrodes, because all critical dimensions including lateral gaps are defined using only one mask. The fabricated accelerometer has the structure thickness of $30{\mu}m$, the vertical offset of $12{\mu}m$, and lateral gap between electrodes of $4{\mu}m$. Torsional springs and asymmetric proof mass produce a vertical displacement when an external z-axis acceleration is applied, and capacitance change due to the vertical displacement of the comb is detected by charge-to-voltage converter. The signal-to-noise ratio of the modulated and demodulated output signal is 80 dB and 76.5 dB, respectively. The noise equivalent input acceleration resolution of the modulated and demodulated output signal is calculated to be $500{\mu}g$ and $748{\mu}g$. The scale factor and linearity of the accelerometer are measured to be 1.1 mV/g and 1.18% FSO, respectively.

• Journal of Sensor Science and Technology
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• v.27 no.4
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• pp.237-241
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• 2018

The real-time enrichment and detection of pathogens are serious issues and rapidly evolving field of research because of the ability of these pathogens to cause infectious diseases. In general, bacterial detection is accomplished by conventional colony counting or by polymerase chain reaction (PCR) after DNA extraction. As colony counting requires considerable time to cultivate, PCR is an attractive method for rapid detection. A small number of pathogens can cause diseases. Hence, a pretreatment process, such as enrichment is essential for detecting bacteria in an actual environment. Thus, in this study, we developed a microfluidic chip capable of performing rapid enrichment of bacteria and the extraction of their genes. A lectin, i.e., Concanavalin A (ConA), which shows binding affinity to the surface of most bacteria, was coated on the surface of magnetic particles to nonspecifically capture bacteria. It was subsequently concentrated through magnetic forces in a microfluidic channel. To lyse the captured bacteria, magnetic particles were irradiated by a wavelength of 532nm. The photo-thermal effect on the particles was sufficient for extracting DNA, which was consequently utilized for the identification of bacteria. Our device will help monitor the existence of bacteria in various environmental situations such as water, air, and soil.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.3
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• pp.1-11
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• 2008

This paper proposes a real-time method using a 3-axis accelerometer to enhance blurred images taken from a camera loaded in mobile devices. Blurring phenomenon is a smoothing effect occurring in photo images. Algorithms to cope with blurring phenomenon is essential since small-size mobile devices tremble severely by even a tiny hand-shaking of a user. In this paper, accurate sensing characteristics of the 3-axis accelerometer is acquired by applying the sensor in pendulum motion and the blurring phenomenon is modeled as a uniform distribution and Gaussian distribution. Also, non-Gaussian distributed model is observed in the experiment of real blurring phenomenon and a particular deblurring function is designed by reversing the model. It has been demonstrated that the application of trembling information to the deblurring function adequately removes the blurring phenomenon.