• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.109-115
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• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• Journal of Powder Materials
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• v.26 no.6
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• pp.502-507
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• 2019

Macro-porous carbon foams are fabricated using cured spherical phenolic resin particles as a matrix and furfuryl alcohol as a binder through a simple casting molding. Different sizes of the phenolic resin particles from 100-450 ㎛ are used to control the pore size and structure. Ethylene glycol is additionally added as a pore-forming agent and oxalic acid is used as an initiator for polymerization of furfuryl alcohol. The polymerization is performed in two steps; at 80℃ and 200℃ in an ambient atmosphere. The carbonization of the cured body is performed under Nitrogen gas flow (0.8 L/min) at 800℃ for 1 h. Shrinkage rate and residual carbon content are measured by size and weight change after carbonization. The pore structures are observed by both electron and optical microscope and compared with the porosity results achieved by the Archimedes method. The porosity is similar regardless of the size of the phenolic resin particles. On the other hand, the pore size increases in proportion to the phenol resin size, which indicates that the pore structure can be controlled by changing the raw material particle size.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.217-217
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• 2006

The surface energy control capability of electrohydrodynamic force provides electrospraying with various potential advantages such as simple particle size control, mono-dispersity, high recovery, and mild processing conditions. Herein, the one step nano-encapsulation of protein drugs using electrospraying was developed. The major processing parameters such as the conductivity of spraying liquids, flow rate, the distance between electric potentials, etc were examined to obtain the maximum efficiency. The recovery of particles was found relatively high as could be conjectured based on the principle of electrospraying. When organic solvents were employed, the processing windows of electrospraying were relatively narrow than water systems. Efficient nano-encapsulation of BSA with polymers was conveniently achieved using electrospraying at above 12 kV.

• Journal of Industrial Technology
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• v.24 no.B
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• pp.133-138
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• 2004

The photodegradation of phenol and toluene with the $TiO_2$-coated polyethylene (PE) particles were investigated in the slurry type photocatalytic reactor, changing the $TiO_2$ particle sizes, initial phenol and toluene concentrations, and the oxygen flow rate. The nano-sized $TiO_2$ photocatalyst particles were prepared by the diffusion flame reactor and they were coated onto PE particles by using the hybridization system for the efficient recollection of $TiO_2$-coated particles after photodegradation experiments. The degradation efficiencies of phenol and toluene with the $TiO_2$-coated PE particles were more than 90% after photodegradation of 80 minutes for most cases. The efficiencies of photodegradation with the $TiO_2$-coated PE particles were found to be lower than those by the pure $TiO_2$ particles by 50%, because of the decrease in specific surface area of $TiO_2$ particles in PE particles.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.1 no.1
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• pp.87-94
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• 2001

Silicon nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) are useful for a variety of applications, including anti-reflecting coatings in solar cells, passivation layers, dielectric layers in metal/insulator structures, and diffusion masks. PECVD systems are controlled by many operating variables, including RF power, pressure, gas flow rate, reactant composition, and substrate temperature. The wide variety of processing conditions, as well as the complex nature of particle dynamics within a plasma, makes tailoring SiN film properties very challenging, since it is difficult to determine the exact relationship between desired film properties and controllable deposition conditions. In this study, SiN PECVD modeling using optimized neural networks has been investigated. The deposition of SiN was characterized via a central composite experimental design, and data from this experiment was used to train and optimize feed-forward neural networks using the back-propagation algorithm. From these neural process models, the effect of deposition conditions on film properties has been studied. A recipe synthesis (optimization) procedure was then performed using the optimized neural network models to generate the necessary deposition conditions to obtain several novel film qualities including high charge density and long lifetime. This optimization procedure utilized genetic algorithms, hybrid combinations of genetic algorithm and Powells algorithm, and hybrid combinations of genetic algorithm and simplex algorithm. Recipes predicted by these techniques were verified by experiment, and the performance of each optimization method are compared. It was found that the hybrid combinations of genetic algorithm and simplex algorithm generated recipes produced films of superior quality.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.532-537
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• 2000

The purpose of this study is to determine the performance of a commercial air cleaner in removing tobacco smoke indoors. Following injection of tobacco smoke in a room, decay rates for particle concentrations were obtained far mass concentration at each point. The size distribution of the tobacco smoke particles was approximately $1.266{\mu}m$ in mass median diameter with a geometric standard deviation of 1.313. The air cleaner consisted of an electrostatic filtration unit and a fan operated at a flow rate of 5.98 CMM. The collection efficiency for $>1\;{\mu}m$ was more than 99%. Without air cleaner operation, tobacco smoke concentration ratio in room decreased to 30% of initial values within 30 minutes and with air cleaner operation, decreased to 90% of initial values in the test chamber, volume $51.27\;m^3$. Without air cleaner operation, tobacco smoke concentration ratio in room decreased to 10% of initial values within 30 minutes and with air cleaner operation, decreased to 30-70% of initial values in the test chamber, volume $149.2\;m^3$.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1238-1243
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• 2009

As Social Overhead Capital(SOC) has been expanded, the highway road construction has been accelerated and city road system has been more complicated. So, long road tunnels have been increased and traffic flow rate also has been raised. Accordingly, the exhausting gas of vehicle cars seriously deteriorates the tunnel inside air quality and driving view. In order to improve tunnel inside air quality, it is needed to introduce a compulsory ventilation system as well as natural ventilation mechanism. The former, that is, a special compulsory ventilation facility is very useful and helpful to prevent a tunnel of being contaminated by traffic in most case. In the case of obtaining clearer and longer driving view, the ventilation systems have to be considered in order to remove floating contaminants or exhaust gas from engines. In this paper, discharge electrode design technology will be discussed.

• Journal of the Korean Ceramic Society
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• v.23 no.1
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• pp.33-43
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• 1986

The synthesis of high-purity AlN by a vapor-phase reaction was investigated using the $NH_3-AlCl_3-H_2$ reacting system. The theoretical yields of AlN were determined from th thermodynamic equilibrium composi-tions. It was shown that the yields above 90% could by obtained even in the range of relatively low temper-ature of 600-1200K. The reaction temperature and the initial amounts/ratios of the reacting gases showed significant effects on the yields but the total pressure did not. The experimental results showed that a high-purity AlN having a needle shape was the only product as a solid phase and its amount produced increased with the reaction temperature. While the degree of agglmera-tion of the synthesized AlN increased with the reaction temperature the size of each particle consisting of the agglomerates was independent of the temperature but grew from 0.09 to 0.115${\mu}{\textrm}{m}$ with the flow rate of NH3. These experimental results were compared with the theoretical aspects for the synthesis of a high-purity AlN.

• Journal of the Korean Society of Visualization
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• v.18 no.2
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• pp.10-17
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• 2020

The curvature of wound boundaries has been identified as a key modulator that determines a type of force responsible for cell migration. While several studies report how certain curvatures of the boundary correlate with the rate at which the wound closes, it remains unclear how these curvatures are spatiotemporally formed to regulate the healing process. We investigated the dynamic changes in the boundary curvatures by visualizing cell migration patterns. Locally, cells at the convex boundary continuously move forward with transmitting kinetic responses behind to the cells away from the boundary, and cells at the concave boundary exhibit dramatic contracting motion, like a purse-string, when they accumulate enough negative curvatures to gain the thrust toward the void. Globally, the dynamics of boundary geometries are controlled by the diffusive flow of cells driven by the density gradient between the wound area and the cell layer.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.509-516
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• 2006

The solid-liquid mass transfer coefficients $k_L$ in a gas-liquid-solid three phases agitated vessel were measured with conventional impellers (e.g. Rushton turbine, paddle, and propeller). For the conventional impellers the rotational speed for the complete suspension $N_{js}$ changes with the impeller height and gas flow rate. Mass transfer coefficient of the Rushton turbin impeller, for which the particle suspension was independent of the aeration, is correlated only with Pgv. Mass transfer coefficients $k_L$ for the Rushton turbine, paddle and propeller impellers were affected by the impeller position.