• Analytical Science and Technology
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• v.7 no.3
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• pp.285-291
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• 1994

A microbial BOD sensor for the continuous estimation of BOD was been developed by immobilizing Trichosporon cutaneum, which was immobilized between a dialysis and a gas-permeable membrane, on an oxygen electrode. The optimum pH and temperature for BOD measurement using this sensor were pH 7.0 and $32{\sim}33^{\circ}C$, respectively. The best result was obtained at 2~3ml/min flow rate in 0.1M phosphate buffer solution. A linear relationship was observed between ${\Delta}DO$ and the concentration of standard GGA solution below 60mg/l(90ppm $BOD_5$). The reproducibility was found to be within 3% for the standard solution containing glucose 30mg/l and glutamic acid 30mg/l. The output DO value of this sensor was almost constant for 30 dalys. The response time and the recovery time were about 5 and 10 min, respectively. This sensor was employed for the BOD measurement of waste pollutants and was compared with $BOD_5$ method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.2
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• pp.125-128
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• 2012

We fabricated the electrolyte-insulator-semiconductor (EIS) devices with various high-k sensing membranes to realize a high quality pH sensor. The sensing properties of each high-k dielectric material were compared with those of conventional $SiO_2$ (O) and $SiO_2/Si_3N_4$ (ON) membranes. As a result, the high-k sensing membranes demonstrated better sensitivity and stability than the O and ON membranes. Especially, the $SiO_2/HfO_2$ (OH) stacked layer showed a high sensitivity and the $SiO_2/Al_2O_3$ (OA) stacked layer exhibited an excellent chemical stability. In conclusion, the high-k sensing membranes are expected to have excellent operating characteristics in terms of sensitivity and chemical stability for the biosensor application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.1
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• pp.33-36
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• 2012

In this study, the thickness effects of $Al_2O_3$ layer on the sensing properties of $SiO_2/Al_2O_3$ (OA) stacked membrane were investigated using electrolyte-insulator-semiconductor (EIS) structure for high quality pH sensor. The $Al_2O_3$ layers with a respective thickness of 5 nm, 15 nm, 23 nm, 50 nm, and 100 nm were deposited on the 5-nm-thick $SiO_2$ layers. The electrical characteristics and sensing properties of each OA membranes were investigated using metal-insulator-semiconductor (MIS) and EIS devices, respectively. As a result, the OA stacked membrane with 23-nm-thick $Al_2O_3$ layer shows the excellent characteristics as a sensing membrane of EIS sensor, which can enhance the signal to noise ratio.

• Analytical Science and Technology
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• v.11 no.4
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• pp.305-310
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• 1998

A reactive dye synthesized with an amine containing Eriochrome Black T derivative and cynauric chloride was immobilized on a cellulose membrane to construct an optical sensor for the detection of divalent transition metal ions in aqueous solution. The response of this reactive dye-based optical sensor was as sensitive as that of Eriochrome Black T in solution phase. Its typical detection limits for $Zn^{2+}$ and $Co^{2+}$ were $6.3{\times}10^{-5}mol/l$ and $2.5{\times}10^{-4}mol/l$, respectively. No loss in the sensitivity of reactive dye-based sensor was observed even the pH of flowing solutions continually varied for an extended period of time.

• Journal of Sensor Science and Technology
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• v.8 no.4
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• pp.320-326
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• 1999

A small cartridge, with a nozzle system for washing off the dirt from the surfaces of sensing gates, was fabricated. The proposed nozzle structure was designed for cartridge by using the simulation tool of fluid (CFD-ACE). Whole size of the fabricated cartridge by using micromachining techniques is about $2.6\;cm{\times}1.5\;cm$, the size of the washing nozzle is $0.2\;mm{\times}0.6\;mm$ and its dead volume is only about $20\;{\mu}l$. A micro-reference electrode was achieved by employing a differential system with ISFETs/QRE (quasi-reference electrode)/REFET (reference field-effect transistor). Metal electrodes was deposited at both ends of blowing channel were used to check the presence of bubble in the microchannel. The pH-ISFET was inserted into the fabricated cartridge and the washing effect of the nozzle system in cartridge was invested.

• Applied Chemistry for Engineering
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• v.26 no.1
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• pp.116-119
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• 2015

Field-effect transistor (FET)-based ion or biosensors have been intensively studied so far. Among many measurement methods, the variation of the drain current can be induced when ions or biomolecules are interacted with sensing membranes located on the gate insulator of FET. One of typical FET-type sensors is an ion-sensitive field-effect transistor (ISFET) utilized in this study. In ISFET, the voltage is usually applied to the reference electrode instead of the gate voltage. Firstly, the voltage applied to the reference electrode versus the drain current was observed, and the steepest slope in this graph was found. Using this point, the optimized condition was established for the larger variation of the drain current in the saturated region in response to the variation of the input in the dynamic range.

• Journal of Sensor Science and Technology
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• v.7 no.1
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• pp.73-82
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• 1998

In silicon surface micro-machining, the newly developed GPE(gas-phase etching) process was verified as a very effective method for the release of highly compliant micro-structures. The developed GPE system with anhydrous HF gas and $CH_{3}OH$ vapor was characterized and the selective etching properties of sacrificial layers to release silicon micro-structures were discussed. P-doped polysilicon and SOI(silicon on insulator) substrate were used as a structural layer and TEOS(tetraethyorthdsilicate) oxide, thermal oxide and LTO(low temperature oxide) as a sacrificial layer. Compared with conventional wet-release, we successfully fabricated micro-structures with virtually no process-induced striction and residual product.

• YAKHAK HOEJI
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• v.40 no.6
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• pp.625-631
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• 1996

The $H^+$-selective membrane consists of tridodecylamine, 2-nitrophenyl octyl ether and a little amount of additive in carboxylated PVC matrix, where penicillinase(Pcase ) and glutaraldehyde may be covalently attached to the matrix. When the $H^+$-selective electrode was used as a detector of biosensor, calibration curve calculated from Nernst equation was not linear. So we investigated the characteristic responses of the $H^+$-selective electrode to the product H+ from hydrolysis of penicillin-G(Pc-G) and plotted calibration curve correlating potential to concentration of Pc-G linearly. The optimal concentration of buffer solution was theoretically calculated and was also experimented. We tried to explain the linear curve of potential to concentration of Pc-G by using Henderson-Hasselbach equation. This method is more effective in calibration curve plotting than any other previous methods. The results obtained may help in further developing pH electrodes with improved analytical preformance.

• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.40-45
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• 1994

$112^{\circ}$ rot. x-cut $LiTaO_{3}$ wafer was used as the substrate of SAW gas sensor. Dual delay line SAW device with IDTs which consist of the reference delay line and the sensing delay line was fabricated using photolithigraphy. Each IDTs had 10 finger pairs and finger spacing is 10 microns. One delay line channel is the reference, while the second is the sensing channel with Pb-phthalocyanine film in the propagation path. Pb-phthalocyanine film which is p-type organic semiconductor was evaporated in $10^{-5}$ torr vacuum using shadow mask selectively. Dual delay line oscillator was constructed by using the rf amplifier and AGC. Frequency of the IDTs had the range of $87{\sim}$89 MHz oscillation frequency. Oscillation frequency shifts were investigated as a function of the temperature and the concentration of $NO_{2}$ gas.

• Journal of the Korean Chemical Society
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• v.37 no.8
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• pp.773-778
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• 1993

Poly(vinyl chloride)(PVC) membrane electrodes based on the lipophilic neutral carrier, dibenzo-18-crown-6(DB18C6) and benzo-15-crown-5 (B15C5) as the active sensors for Tl$^+$ ion have been prepared and tested in different content of the potassium tetrakis(4-chlorophenyl)borate (KTClPB) as lipophilic salt. Dioctyl adipate (DOA), 2-nitrophenyl phenyl ether (NPPE) and o-nitrophenyl actyl ether (NPOE) were used as plasticizing solvent mediators. Electrodes exhibited good linear responses of 40∼55 mV decade$^{-1}$ for Tl$^+$ ion within the concentration ranges 10$^{-1}$∼10$^{-5}$M TlNO$_3$. Selectivity coefficients of interfering ions (alkali metal, alkaline earth metal and some transition metal ions) for Tl$^+$-ISE were determined by separate solution method and were sufficiently small for most of them. These crown ether type ion-selective electrodes are suitable for use with aqueous solution at pH > 3.