• Transactions on Electrical and Electronic Materials
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• v.17 no.2
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• pp.113-117
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• 2016

Temperature dependent reverse-bias current-voltage (I-V) characteristics in Cu Schottky contacts to oxygen plasma treated n-InP were investigated. For untreated sample, current transport mechanisms at low and high temperatures were explained by thermionic emission (TE) and TE combined with barrier lowering, respectively. For plasma treated sample, experimental I-V data were explained by TE or TE combined with barrier lowering models at low and high temperatures. However, the current transport was explained by a thermionic field emission (TFE) model at intermediate temperatures. From X-ray photoemission spectroscopy (XPS) measurements, phosphorus vacancies (VP) were suggested to be generated after oxygen plasma treatment. V_P possibly involves defects contributing to the current transport at intermediate temperatures. Therefore, minimizing the generation of these defects after oxygen plasma treatment is required to reduce the reverse-bias leakage current.

• Journal of Surface Science and Engineering
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• v.32 no.3
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• pp.344-350
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• 1999

The surface chemical structure of three kinds of polyethylene (PE): high density (HD) PE, low density (LD) PE and linear (L)-LDPE exposed to Ar and $O_2$ plasmas has been investigated using XPS. Oxygen was incorporated in a more increased amount for HDPE than for L-LDPE and LDPE. Ar plasma tended to incorporate more oxygen than $O_2$ plasma. The XPS valence band spectra for Ar plasma exhibited a clear peak assigned to $O_2$s character. By chemical derivatization method it was found that the amount of -COOH group at the surface was much greater than that of -OH group. The hydrophilic nature of plasma-treated PE increased in the order: LDPE

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.2
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• pp.95-100
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• 1998

A helical inductively coupled plasma asher, which produces low energy and high density plasma, has been built and investigated for photoresist stripping process. Oxygen ion density in the order of $10^{11}/cm^3$ is measured by Langmuir probe, and higher oxygen radical density is observed by Optical Emission Spectrometer. As RF source power is increased, the plasma density and thus photoresist stripping rate are increased. Independent RF bias power to the wafer stage provides a dc bias to the wafer and an ability to add the ion assisted reaction. At 1 KW of the source power, the coupling mechanism of the RF power to the plasma is changed from the inductive mode to the capacitive one at about 1 Torr. This change causes the plasma density and ashing rate decreases abruptly. The critical pressure of the mode change becomes larger with larger RF power.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.207-207
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• 2016

plasma group velocities of neon with oxygen admixture (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities outside interelectrode region are in the order of 104 m/s.The plasma ambipolar diffusion velocities are calculated to be in the order of 102 m/s. Plasma jet is generated by all fixed sinusoidal power supply, total gas flow and repetition frequency at 3 kV, 800 sccm and 40 kHz, respectively. The amount of oxygen admixture is varied from 0 to 2.75 %. By employing one dimensional convective wave packet model, the electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be in a range from 1.65 to 1.95 eV.

• Transactions on Electrical and Electronic Materials
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• v.9 no.2
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• pp.52-56
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• 2008

Carbon nanotube films were fabricated by the catalytic CVD method. Plasma processed time effects on the field emission property were studied. The atomic structure was observed by using X-ray photoelectron spectroscopy (XPS). The surface composition changes were observed on the plasma processed CNT films. The O1s/C1s signal ratio and the Fls/Cls signal ratio changed from 1.1 % to 24.65 % and from 0 % to 3.1 % with plasma process time, respectively. We could guess it from these results that the Ar plasma process could change the surface composition effectively. In the case of the original-CNT film, no carbon shift was observed. In the case of the Ar plasma processed CNT films, however the oxygen related carbon shifts were observed. This oxygen related carbon shift at higher binding energy implies the increment of amount of the oxygen. It's possible that the increment of these bonds between carbon and oxygen results in the improvement of field emission performance.

• Textile Coloration and Finishing
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• v.34 no.2
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• pp.102-108
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• 2022

The physicochemical properties of stainless steel fibers which were modified by oxygen plasma treatment were analyzed through microscopy and XPS analysis. The wettability of the surface of the stainless steel fiber was observed by measuring water contact angle to find out the effect of the plasma treatment time on the surface characteristics of the stainless steel fiber. In addition, in order to understand the effect of oxygen plasma treatment on the deterioration of the stainless steel fiber properties, the physical properties due to plasma treatment was investigated by measuring the weight reduction, tensile strength, elongation, tensile modulus of the stainless steel fibers according to the treatment time. As a result, the stainless steel fiber surface was etched by the oxygen plasma and the surface became more wettable by the introduction of hydrophilic functional groups. However the physical properties of the stainless steel fiber were not significantly deteriorated even if the surface of the stainless steel fiber made hydrophilic.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.102-107
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• 2009

We investigated optical emission of oxygen plasma discharged by 13.56 MHz radio frequency (rf) by using optical emission spectroscopy (OES). Experimental measurement is done at a range of oxygen flow rate of 1$\sim$20 seem, rf power of 25$\sim$250 W, and orifice 3 and 5 mm in diameter. When oxygen plasma was generated, typical emission spectra for oxygen plasma were observed regardless of diameter of orifice. Strong atomic emission lines are observe at 776.8 an 843.9 nm, corresponding to the $3p^{5}P-3s^{5}S^{0}$ and $3p^{3}P-3s^{3}S^{0}$ transitions, respectively. The emission intensity of line at 776.8 and 843.9 nm increased with increasing the oxygen flow rate and rf power. The increasing rate of emission intensity of 776.8 nm line was larger than that of 843.9 nm line. When the diameter of orifice was 3 mm, the oxygen plasma was more stably generated than orifice 5 mm in diameter.

• Carbon letters
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• v.6 no.2
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• pp.106-110
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• 2005

In this work, the effects of atmospheric oxygen plasma treatment of carbon fibers on mechanical interfacial properties of carbon fibers-reinforced epoxy matrix composites was studied. The surface properties of the carbon fibers were determined by acid/base values, Fourier-transform infrared spectrometer (FT-IR), and X-ray photoelectron spectroscopy (XPS) analyses. Also, the crack resistance properties of the composites were investigated in critical stress intensity factor ($K_{IC}$), and critical strain energy release rate mode II ($G_{IIC}$) measurements. As experimental results, FT-IR of the carbon fibers showed that the carboxyl/ester groups (C=O) at 1632 $cm^{-1}$ and hydroxyl group (O-H) at 3450 $cm^{-1}$ were observed for the plasma treated carbon fibers, and the treated carbon fibers had the higher O-H peak intensity than that of the untreated ones. The XPS results also indicated that the $O_{1S}/C_{1S}$ ratio of the carbon fiber surfaces treated by the oxygen plasma led to development of oxygen-containing functional groups. The mechanical interfacial properties of the composites, including $K_{IC}$ (critical stress intensity factor) and $G_{IIC}$ (critical strain energy release rate mode II), were also improved for the oxygen plasma-treated carbon fibersreinforced composites. These results could be explained that the oxygen plasma treatment played an important role to increase interfacial adhesions between carbon fibers and epoxy matrix resins in our composite system.

• Journal of Microbiology
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• v.44 no.3
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• pp.269-275
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• 2006

Atmospheric-pressure cold plasma (APCP) using helium/oxygen was developed and tested as a suitable sterilization method in a clinical environment. The sterilizing effect of this method is not due to UV light, which is known to be the major sterilization factor of APCP, but instead results from the action of reactive oxygen radicals. Escherichia coli, Staphylococcus aureus, and Saccharomyces cerevisiae deposited on a nitrocellulose filter membrane or Bacillus subtilis spores deposited on polypropylene plates were exposed to helium/oxygen plasma generated with AC input power at 10 kHz, 6 kV. After Plasma treatment, nitrocellulose filter membranes were overlaid on fresh solid media and CFUs were counted after incubation overnight. D-values were 18 sec for E. coli, 19 sec for S. aureus, 1 min 55 sec for S. cerevisiae, and 14 min for B. subtilis spores. D-values of bacteria and yeast were dependent on the initial inoculation concentration, while the D-value of B. subtilis spores showed no correlation. When treated cells were observed with a scanning electron microscope, E. coli was more heavily damaged than S. aureus, S. cevevisiae exhibited peeling, and B. subtilis spores exhibited shrunken morphology. Results showed that APCP using helium/oxygen has many advantages as a sterilization method, especially in a clinical environment with conditions such as stable temperature, unlimited sample size, and no harmful gas production.

• Korean Journal of Exercise Nutrition
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• v.13 no.1
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• pp.29-35
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• 2009

The purpose of this study was to investigate the effects of oral supplementation of coenzyme Q10 (CoQ10) for 4 weeks on the plasma free oxygen radical and total antioxidant capacity at resting and after one bout exercise in healthy old men. Thirty volunteers with an average (+/-SD) age of 62.59+/-5.3 years participated in this study and were divided with three groups; CoQ10 (200 mg daily) group, vitamin C & E (800mg, 400 IU daily) group, and placebo group. A cycle exercise (60% HRR) test was performed at the end of study. Blood samples were taken for the analyses at rest and pre-, post-, 30min after cycle exercise, before and after the 4 weeks of supplementation. After supplementation, there were no significant differences in the plasma free oxygen radical levels and total antioxidant capacity at resting. Plasma free oxygen radical level and total antioxidant capacity in three groups were significantly elevated after exercise, however, it did not vary significantly between groups. CoQ10 supplementation showed significant difference in total antioxidant capacity during recovery phase compared with placebo group. Our results demonstrated that supplementation of CoQ10 in healthy old men improve blood total antioxidant capacity after one bout exercise, despite no alteration of plasma free oxygen radical levels.