Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma
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Kim, Do-Yeob
(School of Nano System Engineering, Inje University)
Kim, Min-Su (School of Nano System Engineering, Inje University) Kim, Tae-Hoon (School of Nano System Engineering, Inje University) Kim, Ghun-Sik (School of Nano System Engineering, Inje University) Choi, Hyun-Young (School of Nano System Engineering, Inje University) Cho, Min-Young (School of Nano System Engineering, Inje University) Jeon, Su-Min (School of Nano System Engineering, Inje University) Park, Sung-Dong (ALPHAPLUS Co., Ltd.) Kim, Jin-Ha (ALPHAPLUS Co., Ltd.) Kim, Eun-Do (ALPHAPLUS Co., Ltd.) Hwang, Do-Weon (ALPHAPLUS Co., Ltd.) Lee, Jae-Young (School of Nano System Engineering, Inje University) |
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