Effects of Oxygen Flow Rate on Electrical and Optical Properties of ITO Films Deposited by Reactive Supttering (반응성 스퍼터링시 산소 유량에 따른 ITO 박막의 전기적, 광학적 특성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1996.05a
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- pp.34-34
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- 1996