Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.05a
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- Pages.34-34
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- 1996
Effects of Oxygen Flow Rate on Electrical and Optical Properties of ITO Films Deposited by Reactive Supttering
반응성 스퍼터링시 산소 유량에 따른 ITO 박막의 전기적, 광학적 특성
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