• Korean Journal of Metals and Materials
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• v.50 no.4
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• pp.300-309
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• 2012

Low-carbon steels and a stainless steel were oxidized isothermally and cyclically between $1050^{\circ}C$ and $1200^{\circ}C$ for up to 100 min in air to find the effect of alloying elements of Si, Mn, Ni, and Cr on their oxidation. The most active alloying element of Si was scattered inside the oxide scale, at the scale-alloy interface and as internal oxide precipitates beneath the oxide scale. Manganese, which could not effectively improve the oxidation resistance, was rather uniformly distributed in the oxide scale. Nickel and chromium tended to present at the lower part of the oxide scale. Excessively thick porous scales formed on the low-carbon steels, whereas thin but non-adherent scales containing $Cr_2O_3$ formed on the stainless steel.

• Korean Journal of Materials Research
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• v.14 no.6
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• pp.394-398
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• 2004

A Ti47Al1.7W-3.7Zr alloy was oxidized between $900^{\circ}C$ and $1050^{\circ}C$, and the oxide scales formed were studied. The oxide scales consisted primarily of an outer$TiO_2$ layer, an intermediate $Al_2$$O_3$-rich layer, and an inner mixed ($TiO _2$ + $Al_2$$O_3$) layer. Besides $TiO_2$ and $Al_2$$O_3$, oxidation led to the formation of some $Ti_2$AlN and TiN. Both W and Zr were preferentially segregated below the intermediate $Al_2$$O_3$-rich layer. Tungsten in the oxide scale was present as $WO_3$ and ${Ti}_{x}$$W_{1-x}$, whereas zirconium as monoclic-$ZrO_2$ and tetragonal-$ZrO_2$.

• Corrosion Science and Technology
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• v.21 no.1
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• pp.53-61
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• 2022

Alloys of Fe-(5.3-29.8)%Mn-(1.1-1.9)%Al-(0.4-0.5)%C were oxidized at 550 ℃ to 650 ℃ for 20 h to understand effects of alloying elements on oxidation. Their oxidation resistance increased with increasing Mn level to a small extent. Their oxidation kinetics changed from parabolic to linear when Mn content was decreased and temperature was increasing. Oxide scales primarily consisted of Fe₂O₃, Mn₂O₃, and MnFe₂O₄ without any protective Al-bearing oxides. During oxidation, Fe, Mn, and a lesser amount of Al diffused outward, while oxygen diffused inward to form internal oxides. Both oxide scales and internal oxides consisted of Fe, Mn, and a small amount of Al. The oxidation of Mn and carbon transformed γ-matrix to α-matrix in the subscale. The oxidation led to the formation of relatively thick oxide scales due to inherently inferior oxidation resistance of alloys and the formation of voids and cracks due to evaporation of manganese, decarburization, and outward diffusion of cations across oxides.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.176-176
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• 2003

The effects of oxide thickness and gate length of MgO/GaN metal oxide semiconductor field effect transistors (MOSFETs) on I-V, threshold voltage and breakdown voltage characteristics were examined using a drift-diffusion model. The saturation drain current scales in an inverse logarithmic fashion with MgO thickness and is < 10$^{-3}$ A.${\mu}{\textrm}{m}$$^{-1}$ for 0.5 ${\mu}{\textrm}{m}$ gate length devices with oxide thickness > 600 $\AA$ or for all 1 ${\mu}{\textrm}{m}$ gate length MOSFETs with oxide thickness in the range of >200 $\AA$. Gate breakdown voltage is > 100 V for gate length >0.5 ${\mu}{\textrm}{m}$ and MgO thickness > 600 $\AA$. The threshold voltage scales linearly with oxide thickness and is < 2 V for oxide thickness < 800 $\AA$ and gate lengths < 0.6 ${\mu}{\textrm}{m}$. The GaN MOSFET shows excellent potential for elevated temperature, high speed applications.

• Korean Journal of Materials Research
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• v.14 no.2
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• pp.110-114
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• 2004

High velocity oxy-fuel sprayed NiCoCrAlY coatings were oxidized between 1000 and $1200^{\circ}C$ in air, and the oxide scales were examined by XRD, SEM/EDS, and EPMA. The unoxidized coatings consisted mainly of ${\gamma}$'$-Ni_3$Al, with some ${\gamma}$-Ni. The major oxide formed on the coatings was $\alpha$ $-Al_2$$O_3$. Additionally, (CoCr$_2$$O_4$, $CoAl_2$$O_4$) spinels and $Al_{5}$ $Y_3$$O_{12}$ coexisted. NiO was not found, despite of high amount of Ni in the coating. Below the oxide layer, internally formed $Al_2$$O_3$ existed.

• Journal of the Korean institute of surface engineering
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• v.34 no.5
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• pp.445-447
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• 2001

• Proceedings of the Materials Research Society of Korea Conference
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• 1993.05a
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• pp.11-11
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• 1993

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.11-15
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• 2004

Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the $HNO_3$:$H_2SO_4$:$H_2O$=4:2:4 solution for 5.5 hrs at $67^{\circ}C$, after the oxide removal in the HF solution, and the heat-treatment at $700^{\circ}C$ for 1 min., was the most effective process for the scale removal.

• Journal of the Korean institute of surface engineering
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• v.33 no.4
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• pp.281-288
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• 2000

To understand the effect of Fe on the oxidation behavior of TiAl alloys, TiAl-(2, 4, 6at% )Fe were oxidized at 800 and 90$0^{\circ}C$ in air. The oxidation resistance of TiAl-Fe alloys increased with increasing an iron content. The scales formed consisted of an outer $TiO_2$ layer, an intermediate $A1_2$$O_3$ layer, and an inner mixed ($TiO_2$+$A1_2$$O_3$) layer, being similar to other common TiAl alloys. But, the scales formed on TiAl-Fe alloys were generally thin compared to those formed on pure TiAl, and contained dissolved iron. Below the oxide scale, an oxygen affected zone was formed. This beneficial effects of Fe on increasing the oxidation resistance and scale adherence of TiAl alloys were attributed to the refinement of oxide grains, increased scale adherence and the enhanced alumina-forming tendency.

• Journal of the Korean institute of surface engineering
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• v.33 no.5
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• pp.365-372
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• 2000

Pure $Fe_3$Al alloys with three different compositions of Fe-21.8%Al, Fe-24.1%Al and Fe-27.2%Al were prepared by vacuum induction melting followed by homogenization and hot forging. The long-time oxidation behavior of the prepared alloys was studied at 1073, 1273 and 1473k in air. The oxidation resistance greatly increased with an increase in Al contents. Thin and uniform oxide scales were always formed on Fe-27.2%Al, while thick and fragile oxide scales were formed on Fe-(21.8, 24.1%)Al. Internal oxidation was observed in Fe-(21.8, 24.1%)Al, when oxidized above 1273K. The major oxidation product of all the oxidized alloys was always $\alpha$-$Al_2$$O_3$.