Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 3 Issue 2
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- Pages.11-15
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- 2004
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- 1738-2270(pISSN)
A Study on Cleaning Processes for Ti/TiN Scales on Semiconductor Equipment Parts
반도체 장비 부품의 Ti/TiN 흡착물 세정 공정 연구
Abstract
Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the