• Environmental Engineering Research
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• v.19 no.1
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• pp.1-8
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• 2014

Natural organic matter (NOM) is a primary component of fouling in low-pressure membrane filtration, either solely, or in concert with colloidal particles. Various preventive measures to interfere with NOM fouling have been developed and extensively tested, such as coagulation, oxidation, ion exchange, carbon adsorption, and mineral oxide adsorption. Therefore, this article aims to conduct a literature review covering the topics of low-pressure membrane processes, NOM characteristics and fouling behaviors, and diverse fouling control strategies. In-depth explanations and discussion are made regarding why some treatment options are able to remove NOM from source water, but do not reduce fouling. This review provides insight for hybridized membrane processes with respect to NOM removal and fouling mitigation in water treatment.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.378-381
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• 2003

The chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing However, cost of ownership (COO) and cost of consumables (COC) were relatively increased because of expensive slurry. In this paper, the effects of different slurry composition on the oxide CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity. We prepared the various kinds of slurry. In order to save the costs of slurry, the original slurry was diluted by de-ionized water (DIW). And then, alunima abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2003.04a
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• pp.447-450
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• 2003

The feasibility of PENTANOX 4X for the simultaneous removal of nitrate and phosphate was investigated using micellar-enhanced ultrafiltration. Because PENTANOX 4X has cationic property at low pH, anionic contaminants can be bound to PENTANOX 4X micelle by electrostatic interaction. At pH 3, 90% of nitrate and 72% of phosphate were removed by 27 mM of PENTANOX 4X, which were equivalent to 20 mM of CPC. PENTANOX 4X of > 80 % was rejected by ultrafiltration membrane and did not make any counter-ion such as chloride for CPC which might cause second-pollution.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2005.04a
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• pp.13-16
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• 2005

Laboratory and field experiments were conducted to study the effectiveness of five adsorbents for the removal of arsenic. The adsorbents included activated alumina (AA), iron coated AA (ICAA), and granular ferric hydroxide (GFH), granular ferric oxide (GFO), and granular titanium dioxide (GTD). Laboratory experiments were conducted to investigate arsenic removal using challenge water prepared in accordance with NSF International Standards 53 (ANSl/NSF 53-2001). Field experiments were conducted using arsenic-contaminated groundwater In laboratory experiment, the treatment capacity decreased in the following order GTD > GFO > GFH. In contrast, the treatment capacity decreased in the following order GFO > GTD > GFH > ICAA > Ah in field experiments.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.11-15
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• 2004

Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the $HNO_3$:$H_2SO_4$:$H_2O$=4:2:4 solution for 5.5 hrs at $67^{\circ}C$, after the oxide removal in the HF solution, and the heat-treatment at $700^{\circ}C$ for 1 min., was the most effective process for the scale removal.

• Transactions on Electrical and Electronic Materials
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• v.7 no.3
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• pp.108-111
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• 2006

The oxidizer-induced corrosion state and microstructure of surface passive metal-oxide layer greatly influenced on the removal rate of tungsten film according to the slurry chemical composition of different mixed oxidizers. In this paper, the actual polishing mechanism and pH-potential equilibrium diagram obtained from potentiodynamic polarization curve were electrochemically compared. An electrochemical corrosion effect implies that slurries with the highest removal rate (RR) have the high dissolution rate.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2001.05a
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• pp.187-191
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• 2001

In the paper, an approach to the development of the selective catalytic reduction process of NOx is presented. The reduction process can be efficiently controlled using a conventional combination of feed-forward and feed-back control structures. The aim of this paper is to test and verify an approach to the SCR process which is based on an industrial pilot plant of combustion and nitric oxide formation. The systems are based on measurements of a NOx removal ratio and the fuel flow rate, and NH$_3$slip which are usually available as a part of de-NOx control system.

• Proceedings of the KSEEG Conference
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• 2003.04a
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• pp.61-65
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• 2003

Zinc occurs in the nature as sulfide, carbonate, silicate, and oxide. In natural water, zinc is generally in the form of the divalent cation $Zn^{2+}$ as well as in the form of fairly weakly bound complexes. Human activities introduce zinc ion to the hydrosphere in many ways. The zinc complexes in the aqueous environment are accumulated not only in aquatic organisms but also in human body ultimately through physico-chemical and/or biological processes. (omitted)

• Clean Technology
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• v.22 no.2
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• pp.96-105
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• 2016

VOCs emissions from industries cause the air pollution and odor. In the industrial facilities, the existing odor treatment techniques have limits and problems. In this study, the optimum essential oil and metal oxide selected by screening test. lavender oil, cypress oil and TiO₂ were determined by deodorant materials and those were blended by 5%, 45%, 10%, respectively. In addition, the result of batch type experiments depending on the dilution rate, injection, rate, temperature showed that the optimum condition of deodorant is 6 mL of injection rate, and 200 times of dilution rate and the removal efficiency increased in proportion with temperature. In addition, the activation energy was calculated from the rate equation, which appeared in the 3-4 times lower than conventional deodorants.

• Journal of Korean Society for Atmospheric Environment
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• v.9 no.4
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• pp.288-294
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• 1993

Flue gas control systems for small-scale combustors must be designed to provide highly effective removal of three criteria pollutants (S $O_{2}$, N $O_{x}$ and particulate matter), and must be safe, reliable and small. These requirements make dry, regenerative clean-up process particularly attractive and this paper describes a new concept for integrated pollutant control : a filter comprised of layered, gas permeable membranes that act as an S $O_{2}$ sorbant, a N $O_{x}$ reduction catalyst and a particulate filter. A mixed metal oxide sorbent, Cu-Ce was used as a sorbent/catalyst and the activity was compared with Cu-7Al. The S $O_{2}$ removal eficiency of Cu-Ce was increased with temperature increase up to 500$^{\circ}$C and the catalytic activity for NO was higher than that of Cu-7Al. By the sulfation of Cu-Ce, the reduction activity was increased at the temperature higher than 350$^{\circ}$C. The regeneration of Cu-Ce was very fast and some amount of elemental sulfar was found.