• 제목/요약/키워드: over lapping

검색결과 22건 처리시간 0.028초

화학기상증착 다이아몬드 막의 레이저 평탄화 (Lapping of Chemical Vapor Deposited Diamond Films Using copper Vapor laser)

  • 박영준;백영준
    • 한국세라믹학회지
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    • 제36권4호
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    • pp.417-424
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    • 1999
  • Laser lapping of diamond films is performed with focused beam of copper vapor laser. Both spherical and rod-shape laser beam are used. Diamond surface is scanned at various scan speeds(0,125, 0.5, 0.75 mm/sec) and baem shifts (5, 10, 20, 40, 100$\mu\textrm{m}$) At 0.125 mm/sec 10$\mu\textrm{m}$ scan condition the level difference of di-amond surface of about 700$\mu\textrm{m}$ over 20 mm is reduced to 200$\mu\textrm{m}$ In addition surface roughness is also im-proved from 3.53$\mu\textrm{m}$ to 2.47$\mu\textrm{m}$ at 5$\mu\textrm{m}$ beam shift. But at higher beam shift than 10$\mu\textrm{m}$ laser scan makes the surface rougher which is considered to be due to the non uniform spatial distribution of laser en-ergy. It is concluded that homogenized laser beam with high average power is needed for large area laser lapping of diamond films at appreciable rates.

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Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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고정 입자 정반을 이용한 사파이어 기판의 연마 특성 연구 (Study on the Lapping Characteristics of Sapphire Wafer by using a Fixed Abrasive Plate)

  • 이태경;이상직;조원석;정해도;김형재
    • Tribology and Lubricants
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    • 제32권2호
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    • pp.44-49
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    • 2016
  • Diamond mechanical polishing (DMP) is a crucial process in a sapphire wafering process to improve flatness and achieve the target thickness by using free abrasives. In a DMP process, material removal rate (MRR) is a key factor to reduce process time and cost. Controlling mechanical parameters, such as velocity and pressure, can increase the MRR in a DMP process. However, there are limitations of using high velocities and pressures for achieving a high MRR owing to their side effects. In this paper, we present the lapping characteristics and improvement of MRR by using a fixed abrasive plate through an experimental study. The change in MRR as a function of velocity and pressure follows Preston's equation. The surface roughness of a wafer decreases as the plate velocity and pressure increases. We observe a sharp decrease in MRR over the lapping time at a high velocity and pressure in the velocity and pressure test. An analysis of surface roughness (Rq and Rpk) indicates that wear of abrasives decreases the MRR sharply. In order to investigate the effect of abrasive wear on the MRR, we utilize a cutting fluid and a rough wafer. The cutting fluid delays the wear of abrasives resulting in improvement of MRR drop. The rough wafer maintains the MRR at a stable rate by self-dressing.

CdS단결정의 열랄격전류에 관한 연구 (A Study on the Thermally Stimulated Current in CdS Single Crystal)

  • 유용택
    • 한국통신학회논문지
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    • 제7권2호
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    • pp.59-65
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    • 1982
  • 本實驗에 파이퍼-폴리시(piper-polish)法으로 만든 單結晶에 Sb와 In을 이온衝激시킨 스포트에 대하여 熱剌激電流를 測定하였다. Sb와 In을 각각 衝激시켜 熱剌激電流를 測定한 결과 중첩된 피이크가 觀察되었는데 이를 서멀 클리닝(thermal cleaning)法으로 分離하여 147K에서 0.25eV와 0.31eV의 活性에너지를 얻었다. 스포트를 冷却시키면서 光勵起시키면 0.25eV의 트랩(trap)이 사라지고 0.85eV의 트랩이 새로 나타났다. 光電導가 양호한 結晶에서 T.S.C.가 잘 測定되었다.

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선형 Peregrine 모델을 이용한 이동형 소방용수 저장탱크의 수직 벽면에서의 동수력 연구 (A Numerical Investigation of Hydrodynamic Force Acting on the Vertical Wall of a Portable Water Storage Tank using a Linearized Peregrine's Model)

  • 박진수;소수현;장택수
    • 한국화재소방학회논문지
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    • 제32권1호
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    • pp.76-80
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    • 2018
  • 본 연구는 바닥의 형태가 오목한 이동형 소방용수 저장탱크의 수직 벽면에 작용하는 동수력을 분석하고자 수행하였다. 이를 위해 용수 공급 노즐의 위치 및 높이에 따라 다양하게 낙하한 용수로 인해 발생한 자유 수면의 출렁임을 수치 모의실험 하였다. 이때, 자유 수면의 출렁임과 수직 벽면에서의 파의 오름을 수치 모의실험하기 위해 선형 Peregrine 모델을 이용하였다. 그 결과, 벽면에서 자유 수면의 출렁임이 증폭되는 현상을 관찰할 수 있었다. 따라서 이동형 소방용수 저장탱크의 안정적인 구조를 확보하기 위해 바닥이 오목한 지형에서 사용할 경우는 소방용수 공급방법에 주의해야 함을 확인할 수 있었다.

개폐균열이 존재하는 비대칭 회전부 및 비등방 고정부를 갖는 회전체의 모드해석 (Modal Analysis of Rotor System with Anisotropic Stator and Asymmetric Rotor in the Presence of Breathing Crack)

  • 한동주
    • 대한기계학회논문집A
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    • 제30권4호
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    • pp.442-450
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    • 2006
  • This paper describes the new modal analysis method to detect the presence of the breathing crack in a general rotor system with disk asymmetry and stator anisotropy. It is proposed that the modal analysis using directional frequency response functions (dFRFs), which, accounting for the directivity in modes, clears the heavily over-lapping of other harmonics occurring from non-isotropic properties in addition to those due to crack, can provide an effective method to detect the modes by a crack. The simulations from the simple general rotor model show that the r-dFRFs (reverse dFRFs) for asymmetry confirms a good indicator of the presence of the breathing crack and the instability is primarily influenced by the shaft asymmetry than the breathing crack.

DNA Coding Method를 이용한 퍼지 규칙의 획득 (Acquisition of Fuzzy Rules Using DNA Coding Method)

  • 윤성용;박종규;오성권;안태천
    • 한국지능시스템학회:학술대회논문집
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    • 한국퍼지및지능시스템학회 1998년도 춘계학술대회 학술발표 논문집
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    • pp.16-19
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    • 1998
  • 본 논문에서는 생물학적인 DNA와 인위적인 DNA의 개발 메커니즘에 근거를 둔 새로운 DNA coding mithod를 소개한다. 이 방법은 DNA 유전자의 Redundancy 성질과 Over-lapping 성질을 분석하여 구성한 알고리즘으로, DNA 자체의 특성 때문에 염색체의 길이를 자유자재로 변화시킬 수 있는 장점을 가지고 있다. 즉 삽입과 삭제의 과정을 쉽게 처리할 수 있다. 따라서 본 연구에서는 이 DNA coding method를 사용하여 시스템 제어에 필요한 지식을 표현하는 적당한 퍼지규칙을, 전건부와 후건부의 구조 및 매개변수 동조를 통하여, 획득하고, 이 규칙을 새로운 유전자 알고리즘을 이용하여 최적화 시킬 수 있는 새로운 퍼지규칙 획득 알고리즘을 개발한다. 이 방법의 유용성을 입증하기 위하여 물탱크 시스템에 적용한 결과 효과적으로 퍼지규칙을 획득한다.

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양생온도 변화 및 버블시트 두께변화에 따른 콘크리트의 온도이력특성 (Temperature History of Concrete Corresponding to Various Bubble Sheets Layer and Curing Temperature)

  • 홍석민;백대현;한민철;한천구
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2008년도 추계 학술논문 발표대회
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    • pp.21-25
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    • 2008
  • In this paper, the temperature history and the strength development of concrete corresponded to various bubble sheets layer and curing temperature. Based on the results, In case of the test temperature of -5℃, concrete subject in the exposure condition, result in a frost damage at initial stage by a fall of below zero temperature. In case of the combination of PE film and non woven fabric was after 36 hour, and combination of bubble sheet over double, a tremendous insulating effect of bubble sheet over double is confirmed due to the temperature of concrete fall of below zero temperature after 60 hours. Meanwhile, regarding the -15℃ of temperature, special measure for insulation curing is necessary to secure stability against early frost damage because frost damage was not affected by the lapping thickness of bubble sheet subjected to severe cold weather condition.

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현대 패션에 표현된 Trompe l′Oeil 기법 연구 -1990년대를 중심으로- (A Study on Trompe l′Oeil Expressed in Modern Fashion -Focused on 1990s-)

  • 조진숙
    • 복식문화연구
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    • 제12권5호
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    • pp.880-896
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    • 2004
  • Trompe l'Oeil technique strategically conceived with a view to effectively realize creative ideas among the expression techniques of fine arts style has provided the driving force in development of fine arts and has continuously influenced development of the modem fashion pursuing unique individuality. The study is focused first on finding out how Trompe l'Oeil technique originated in connection with researching the fashion of Trompe l'Oeil and on analysing the technique of expression. The author referred to fashion magazines for designing ideas of Trompe l'Oeil represented in modem fashion in practical applications used by designers in Paris, Italy, London and New York during the 10 year period(1990-1999). The collections of data were analyzed as following: Effectiveness depending on the method of Trompe l'Oeil I. Effectiveness of Layering: when two clothing are over lapped or coordinated with one another in color or style. 2. Effectiveness of Detailing: when pictures, stitch, tape, cutting, quilting and etc are used to create collar, pocket, yoke, zipper, string, shadow and etc. 3. Effectiveness of Accessories: when the image of necklace, belt, tie, tassel, badges and stars are represented by illustration or embroidery on clothing to substitute the actual existence. 4. Effectiveness of Nudity: when human body is realistically drawn and printed on clothing.

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자갈치 수산관광단지 조성방안에 관한 연구 - 먹거리를 중심으로 - (Developing the Jagalchi Marine Tour Complexes - Focusing on Foods -)

  • 윤태환;박봉규;조용범
    • 한국조리학회지
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    • 제14권2호
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    • pp.293-302
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    • 2008
  • The objective of this study is to suggest development methods of marine tour complexes by specializing and modernizing the renowned Jagalchi Fish Market. This study tries to suggest the ways of overcoming limitations of the traditional market place and making a unique tourism destination with affluent attractive culture elements. To preserve its position as the most famous fish market in Korea, Jagalchi market needs to more differentiate its position over competitors. To do that, it needs to avoid over-lapping of product categories among different sectors and specializing each zone according to the assigned theme. Improving tourism environments by expanding entertaining aspects, building landmark facilities and a seaside park, and tourism infrastructures. In addition, the development scheme needs to be planned unified with other city development plans to create a unified image, and a connection program with other tourism resources surrounding the target area needs to be created in order to pursue synergy effects. In the aspect of food, a large seafood center which offers various seafood from all around the world, a traditional night market street, various theme restaurants can be suggested. Successful development of the Jagalchi marine tour complexes not only has ripple effects on the region's culture, society, and other related industries but directly influences related regional tourism and commercial industry.

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