Abstract
Laser lapping of diamond films is performed with focused beam of copper vapor laser. Both spherical and rod-shape laser beam are used. Diamond surface is scanned at various scan speeds(0,125, 0.5, 0.75 mm/sec) and baem shifts (5, 10, 20, 40, 100$\mu\textrm{m}$) At 0.125 mm/sec 10$\mu\textrm{m}$ scan condition the level difference of di-amond surface of about 700$\mu\textrm{m}$ over 20 mm is reduced to 200$\mu\textrm{m}$ In addition surface roughness is also im-proved from 3.53$\mu\textrm{m}$ to 2.47$\mu\textrm{m}$ at 5$\mu\textrm{m}$ beam shift. But at higher beam shift than 10$\mu\textrm{m}$ laser scan makes the surface rougher which is considered to be due to the non uniform spatial distribution of laser en-ergy. It is concluded that homogenized laser beam with high average power is needed for large area laser lapping of diamond films at appreciable rates.
