• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.182-187
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• 2000

빛은 공간상에서 전파되는 특성상 전자기파(electromagnetic wave)로 규정될 수 있다. 빛의 파동성은 여러 형태의 간섭을 유발한다. 이중 정밀 길이측정에는 광위상간섭(phase measuring interferometry)의 원리가 대표적으로 이용된다. 그림1은 광위상간섭의 기본원리를 Michelson 광학계를 이용하여 설명하고 있다. 하나의 동일한 광원으로부터 출발된 광속(optical beam)은 광분할기(beam splitter)에 의해 두 개로 별도 광속으로 분활 된다. (중략)

• Journal of the Optical Society of Korea
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• v.19 no.6
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• pp.705-710
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• 2015

The fabrication process of thin boron-doped nanocrystalline diamond (B-NCD) microelectrodes on fused silica single mode optical fiber cladding has been investigated. The B-NCD films were deposited on the fibers using Microwave Plasma Assisted Chemical Vapor Deposition (MW PA CVD) at glass substrate temperature of 475 ℃. We have obtained homogenous, continuous and polycrystalline surface morphology with high sp³ content in B-NCD films and mean grain size in the range of 100-250 nm. The films deposited on the glass reference samples exhibit high refractive index (n=2.05 at λ=550 nm) and low extinction coefficient. Furthermore, cyclic voltammograms (CV) were recorded to determine the electrochemical window and reaction reversibility at the B-NCD fiber-based electrode. CV measurements in aqueous media consisting of 5 mM K₃[Fe(CN)₆] in 0.5 M Na₂SO₄ demonstrated a width of the electrochemical window up to 1.03 V and relatively fast kinetics expressed by a redox peak splitting below 500 mV. Moreover, thanks to high-n B-NCD overlay, the coated fibers can be also used for enhancing the sensitivity of long-period gratings (LPGs) induced in the fiber. The LPG is capable of measuring variations in refractive index of the surrounding liquid by tracing the shift in resonance appearing in the transmitted spectrum. Possible combined CV and LPG-based measurements are discussed in this work.

• Journal of the Optical Society of Korea
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• v.19 no.6
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• pp.649-657
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• 2015

We present a surface color measurement including quantities of surface color, methods, and uncertainty evaluation. Based on a relation between spectral reflectance and surface color, we study how an uncertainty of spectral reflectance propagates to surface color. In analyzing the uncertainty propagation, we divide the uncertainty into uncorrelated components, fully correlated components, and correlated components with spectrally varying correlations. As an experimental example, we perform spectro-reflectometric measurements for ceramic color plates. With measured spectral reflectance and its uncertainty evaluation, we determine surface color and analyze uncertainties of the ceramic color plates.

• Journal of the Optical Society of Korea
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• v.8 no.1
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• pp.34-52
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• 2004

Over the past decade the experimental technique of THz time domain spectroscopy (㎔- TDS) has proved to be a versatile method for investigating a wide range of phenomena in the ㎔ or far infrared spectral region from 100 ㎓ to 5 ㎔. This paper reviews some recent results of the Ultrafast ㎔ Research Group at Oklahoma State University using ㎔-TDS as a characterization tool. The experimental technique is described along with recent results on ㎔ beam propagation and how ㎔ beam profiles arise from propagation of pulse fronts along caustics. To illustrate how spatio-temporal electric field measurements can determine material properties over a wide spectral range, propagation of ㎔ pulses through systems exhibiting frustrated total internal reflection (FTIR) are reviewed. Finally two potential metrology applications of ㎔-TDS are discussed, thin film characterization and non-destructive evaluation of ceramics. Although ㎔-TDS has been confined to the research laboratory, the focus on application may stimulate the adoption of ㎔- TDS for industrial or metrology applications.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.3
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• pp.253-258
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• 2013

In this paper, a free-space material measurement technique is discussed in W-band(75~110 GHz). For the accurate measurement of S-parameters of an MUT(Material Under Test) in free space, a W-band quasi-optical free-space material measurement system, less affected by the measurement environments, is discussed, and GRL(Gated Reflect Line) method for calibrating the measurement system is described. Proposed technique is verified for 'Air' and measurement results for arystal plates of thickness 1.1 mm, 2 mm, 2.75 mm and 5 mm are also shown.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.30-34
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• 2019

We analyzed how the features in plasma information based virtual metrology (PI-VM) for SiO₂ etching depth with variation of 5% contribute to the prediction accuracy, which is previously developed by Jang. As a single feature, the explanatory power to the process results is in the order of plasma information about electron energy distribution function (PI_EEDF), equipment, and optical emission spectroscopy (OES) features. In the procedure of stepwise variable selection (SVS), OES features are selected after PI_EEDF. Informative vector for developed PI-VM also shows relatively high correlation between OES features and etching depth. This is because the reaction rate of each chemical species that governs the etching depth can be sensitively monitored when OES features are used with PI_EEDF. Securing PI_EEDF is important for the development of virtual metrology (VM) for prediction of process results. The role of PI_EEDF as an independent feature and the ability to monitor variation of plasma thermal state can make other features in the procedure of SVS more sensitive to the process results. It is expected that fault detection and classification (FDC) can be effectively developed by using the PI-VM.

• Laser Solutions
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• v.17 no.4
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• pp.1-6
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• 2014

Femtosecond laser induced shock generation in water and vitreous humor of enucleated porcine eyeball was investigated. When focusing the femtosecond laser into the liquid mediums, the acoustic waves with a frequency of about 15.6kHz could be observed by using wide-band microphone. The amplitude of the acoustic signals from water has attained a maximum under a laser power of about 5mW. Further increment of the power results in a decrement of the acoustic signals due to nonlinear optical process including filamentation of laser beam. We have further investigated the effect of femtosecond laser induced acoustic waves by applying the laser pulse into enucleated porcine eyeball. The comparative studies on both healthy and diseased eyeballs led us propose that the femtosecond laser pulses could be utilized as a novel tools for treatment of partially detached retina layers from their choroid structures.

• Journal of Magnetics
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• v.16 no.3
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• pp.225-228
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• 2011

Magnetic properties and Rockwell hardness of 1Cr-0.5Mo steel have been investigated as a function of isothermal aging time. Our results showed that coercivity, hysteresis loss and Rockwell hardness in the aged samples decreased as aging time increased. This phenomenon was analyzed using optical microscopy and scanning electron microscopy. A significant diffusion of Cr and Mo atoms formed $M_2C$ and $M_7C$ carbides, lowering the matrix strength. $M_2C$ and $M_7C$ carbides partially segregated inside grains, diffused into grain boundaries, and finally resulted in a soft ferrite matrix and a hard grain boundary. The magnetic and mechanical softening of the matrix is likely to govern the properties of the sample more than the hardening of the grain boundary by carbide precipitations.

• Korean Journal of Optics and Photonics
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• v.34 no.5
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• pp.202-209
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• 2023

A KRISS-type small integrating sphere with a high spatial radiance uniformity was made using pressed polytetrafluoroethylene (PTFE) and a reflective rod to calibrate the spectral radiance responsivity of absolute radiant thermometers. The spatial radiance uniformity of the KRISS-type small integrating sphere was ±0.009%, five times higher than the best value reported by foreign national metrology institutions thus far. In addition, we improved the spatial radiance uniformity of a commercial sintered PTFE integrating sphere by a factor of 10.