Role of Features in Plasma Information Based Virtual Metrology (PI-VM) for SiO2 Etching Depth |
Jang, Yun Chang
(Department of Energy Systems Engineering, Seoul National University)
Park, Seol Hye (Department of Energy Systems Engineering, Seoul National University) Jeong, Sang Min (Department of Energy Systems Engineering, Seoul National University) Ryu, Sang Won (Department of Energy Systems Engineering, Seoul National University) Kim, Gon Ho (Department of Energy Systems Engineering, Seoul National University) |
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