• 반도체디스플레이기술학회지
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• 제9권1호
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Structural Engineering and Mechanics
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• 제62권1호
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• pp.43-54
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• 2017

In this study, the failure behavior of composite material in the biaxial and off-axis loading is studied based on a computational micromechanical model. The model is developed so that the combination of mechanical and thermal loading conditions can be considered in the analysis. The modified generalized plane strain assumption of the theory of elasticity is used for formulation of the micromechanical modeling of the problem. A truly meshless method is employed to solve the governing equation and predict the distribution of micro-stresses in the selected RVE of composite. The fiber matrix interface is assumed to be perfect until the interface failure occurs. The biaxial and off-axis loading of the SiC/Ti and Kevlar/Epoxy composite is studied. The failure envelopes of SiC/Ti and Kevlar/Epoxy composite in off-axis loading, biaxial transverse-transverse and axial-transverse loading are predicted based on the micromechanical approach. Various failure criteria are considered for fiber, matrix and fiber-matrix interface. Comparison of results with the available results in the litreture shows excellent agreement with experimental studies.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2002년도 추계학술발표대회 논문집
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• pp.96-99
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• 2002

In order to determine the in-plane shear properties of unidirectional carbon fiber reinforced aluminum laminate composites, a new Iosipescu shear test fixture was developed, by using a fixture undergoing tensile force for the specimen edge to be subjected to compressive loads assumption, under plane stress. Also, to compare the results, Iosipescu shear test method by the modified Wyoming fixture and the off-axis tensile test were performed to determine the shear properties. Off-axis tension test was performed by using new oblique-shaped tabs proposed by Sun and Chung. [5] The oblique tabs reduced remarkably end-constraint effects of off-axis specimens with a aspect ratio of about eight. It is observed through the experimental results show that there is no significant difference between off-axis test results and those of Iosipescu shear test.

• Current Optics and Photonics
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• 제3권5호
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• pp.374-381
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• 2019

This study examined a method for designing the optical cavity of a non-dispersive infrared gas detector. The infrared gas detector requires an optical cavity design to lengthen the ray path. However, the optical cavity with multiple reflecting surfaces has off-axis aberration due to the characteristics of the reflecting optical system. The rays were parallelized by using the off-axis parabolic mirror to easily increase the ray path and eliminate off-axis aberration so that the rays are admitted to the effective area of the infrared detector uniformly. A prototype of an infrared gas detector was produced with the designed optical cavity to confirm the performance.

• 한국진공학회지
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• 제20권2호
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• pp.106-113
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• 2011

본 논문은 마이크로히터표면의 실시간 온도분표측정을 위한 마하젠더 간섭계 기반의 off-axis 디지털홀로그래피기술에 대한 것이다. 제안된 방법은 재료표면의 온도분포에 직접적인 함수인 2차원 위상 분포를 측정하고, 이를 통해 실시간으로 재료표면의 온도 map을 측정할 수 있다. 본 논문에서는 섭씨 20도에서 60도 사이의 온도구간에서 마이크로히터 표면의 위상변화와 실제표면온도가 선형적인 관계가 있음을 실험적으로 보였다. 제안된 방법은 재료표면의 온도분포를 실시간으로 측정하고자 하는 다양한 응용분야에 적용될 수 있을 것으로 기대된다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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• pp.361-363
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• 1995

High quality $Y_1Ba_2Cu_3O_{7-x}$ thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual 'off-axis' target-substrate geometry. Various properties of superconducting $Y_1Ba_2Cu_3O_{7-x}$ thin films have been studied systematically as a function of oxygen pressure during the deposition, in both 'on-axis' and the unusual 'off-axis' target substrate geometry. In the 'off-axis' geometry, one can completely eliminate the so-called 'laser droplets' form the thin surface and thus obtain smooth high qualify films. It is found that films with optimum structural and electrical properties are obtained at a lower oxygen pressure range during the 'off-axis' deposition when compared with that required in the 'on-axis' deposition geometry.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1996년도 재료학회 춘계학술발표회
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• pp.62-62
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• 1996

• Radiation Oncology Journal
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• 제14권3호
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• pp.237-244
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• 1996

목적 : 의료용 선형가속기의 Independent Collimator는 현재 광범위하게 사용되고 있다. 그러나 방사선량의 계산과 MU(Monitor Unit)의 계산에 사용되는 모든 기본 자료는 대칭 조사면를 기준으로 작성되었기 때문에 independent collimator를 사용한 비대칭적인 조사면의 경우 현재 사용하고 있는 계산 방식을 그대로 적용함에 무리가 있을 것으로 생각된다. 따라서 이러한 의문에 대한 체계적이고 과학적인 검토가 필요할 것으로 사료되어 본 연구를 진행하였다. 대상 및 방법 :본 연구는 Dual Photon Beam(6MV와 15MV)을 산출(産出)하는 선형가속기(Linac 1800, Varian Co)에서 collimator 사용시 산란 방사선의 총채로 표현되어지는 field size factor, beam qualify에 영향을 미치는 HVL와 PDD를 조사하였다. 먼저 field size factor는 water phantom(WP 600C Wellhofer, Germany)내의 Dmax에서 field size $3{\times}3cm$에서 $35{\times}35cm$까지의 방사선량의 변화를 square field로 $1cm^2$씩 증가시켜 가며 0.6cc ion chamber(NE 2571)로 측정하였다. Beam quality는 100cm SSD(source-surface distance)에서 $5{\times}5$, $10{\times}10$, $15{\times}15$ 및 $20{\times}20cm$ field size로 0, 3 및 10cm off-axis distance와 dmax 4, 10, 15 및 20cm의 깊이에서 측정하였다. Dose distribution을 분석하기 위하여 film densitometer와 water phantom(IC 10 ion chamber)을 사용, $10{\times}10cm$ field size에서 5, 10 및 15cm의 off-axis distance까지의 방사선량의 분포를 관찰하고 대칭 방사선 조사면와 비교 분석하여 실제 isodose 분포에 미치는 영향을 관찰하였다. 결과: 1) Relative field size factor는 중심 축에서 off-axis lateral distance에 따라 다양하게 변화하였는데 6MV X-선의 경우 최대 $3.1\%$, 15MV X-선의 경우 최대 $5\%$까지의 변화를 보였다. 이때 off-axis factor를 구하여 교정을 하였을 경우 중심 축의 field size factor와 거의 유사한 값에 도달할 수 있었다. 2) Beam qualify의 변화를 관찰하기 위한 실험에서 HVL는 off-axis distance가 멀어질수록 감소하였고 PDD도 off-axis distance가 멀어지고 측정 깊이가 깊어질수록 감소되는 현상을 보였다. 통상적인 방사선 치료시에 이용되는 $5{\times}5cm$ 이상의 field size와 15cm 이내의 깊이에서는 3cm 와 l0cm의 off-axis에서 6MV X-선은 평균 $0.5\%$와 $2\%$, 15MV X선은 $0.4\%$와 $1.4\%$의 감소 현상을 보여 큰 편차를 관찰할 수 없었다. 3) Isodose distribution은 off-axis distance가 멀어질수록 depth dose의 증가치가 감소되었으며 특히 central axis의 가장자리 부위에서는 isodose curve의 위축이 확연하였다. 결론 : Independent collimator를 사용하여 비대칭 방사선 치료를 할 경우 MU의 계산은 off-axis factor와 PDD 보정이 필수적이며 임상적으로는 중심 축에서의 과소조사에 대한 정밀한 주의가 필요할 것으로 사료된다.

• 전자공학회논문지D
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• 제35D권2호
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• Current Optics and Photonics
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• 제5권4호
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• pp.402-408
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• 2021

An off-axis system refers to an optical system in which the optical axis and normal vector at the vertex of each surface do not match. The most important specification in an optical system is its focal length. Among the various methods for measuring the focal length, the most suitable method for the off-axis system is the method that adopts magnification. However, head-mounted display (HMD) optics must be measured while considering the virtual image distance, which is not infinity owing to product characteristics. For the virtual image distance, a camera with a focusing function was used. By measuring HMD optics via this magnification method, the error generated in this measurement was 0.68% of the HMD's focal length, which is within the 1%-3% range of the conventionally permitted design error for the focal length allowed at the optical design stage. Therefore, it can be verified that the measurement accuracy of the method proposed in this study is sufficiently feasible in practice.