• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.88-89
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• 2009

In this paper, we investigated about wet cleaning effect as deep trench formation methods for Power chip devices. Deep trench structure was classified by two methods, PSU (Poly Stick Up) and Non-PSU structure. In this paper, we could remove residue defect during wet. cleaning after deep trench etch process for non-PSU structure device as to change wet cleaning process condition. V-SEM result showed void image at the trench bottom site due to residue defect and residue component was oxide by EDS analysis. In order to find the reason of happening residue defect, we experimented about various process conditions. So, defect source was that oxide film was re-deposited at trench bottom by changed to hydrophobic property at substrate during hard mask removal process. Therefore, in order to removal residue defect, we added in-situ SCI during hard mask removal process, and defect was removed perfectly. And WLR (Wafer Level Reliability) test result was no difference between normal and optimized process condition.

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2008.04a
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• pp.181-183
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• 2008

Four different subtilisins of protease were investigated to see their effects on the cleaning activity. The cleaning solution was formulated with various non-ionic surfactants and other additives such as propylene glycol, triethanolamine, pH balancer etc. to evaluate their effect on enzyme activity as well. Evaluation of formulated cleaning solution was carried under K0120 using pre-soiled textiles from EMPA. The results showed that the cleaning activity on soil removal was not severly influenced by surfactant but the enzyme mostly. In addition, the activity of enzymes was not much affected by the type of surfactants as long as the surfactants were non-ionic. Liquinase among the four enzymes used in this study showed the best performance on soil removal, especially blood stain.

• Clean Technology
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• v.17 no.4
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• pp.306-313
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• 2011

Flux or solder is used in soldering process for manufacturing electronic parts such as printed circuit boards (PCB). After soldering process, residual flux and solder paste on the parts should be removed since their residuals could cause performance degradation or failure of parts due to their corrosion and electric leakage. Ozone depletion substances such as 1,1,1- trichloroethane (TCE) and HCFC-141b have widely been using for removal of residual flux and solder paste after soldering process In manufacturing of electronic parts until now. In this study, non-aqueous cleaning agents without flash point were developed and applied to industrial field for replacement of cleaning agents with ozone depletion. In order to develop non-aqueous cleaning agents without ethers, esters, fluoride- type solvents. And their physical properties and cleaning abilities were evaluated, and they were applied to industrial fields for cleaning of flux and solder on the PCB. And vacuum distillation apparatus were operated to determine their operating conditions and recycling yields for recycling of used cleaning agents formulated in this study. As a result of physical properties measurement of our formulated cleaning agents, they were expected to have good wetting and penetrating power since their surface tensions were relatively low as 18.0~20.4 dyne/$cm^2$ and their wetting indices are relatively large. And some cleaning agents holding fluoride-type solvents as their components did not have any flash point and they seemed to be safe in their handling and storage. The cleaning experimental results showed that some cleaning agents were better in their cleaning of flux and solder paste than 1,1,1-TCE and HCFC-141b. And industrial application results of the formulated cleaning agents for cleaning PCB indicated that they can be applicable to industry due to their good cleaning capability in comparison with HCFC-141b. The recycling experiments of the used formulated cleaning agents through a vacuum distillation apparatus also showed that their 91.9~97.5% could be recycled with its proper operating conditions.

• Agribusiness and Information Management
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• v.9 no.1
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• pp.18-22
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• 2017

It takes lots of time and labor if a worker have to measure the water quality at a certain but designated time every day in an un-automated aqua farm. In addition, if the equipment is soaked in the sea water consistently, it will be contaminated by diverse floating matters and barnacles, and it often becomes mal-functional within 2~3 months. Therefore, we need to develop a system with which the sensed data could be checked in real time and operated automatically, while preventing the contamination of the sensor, a crucial component for water quality measuring equipment, as much as possible, and increasing the replacement cycle. We have developed a non-cleaning water quality measuring equipment and its software which are used in the fishery household of offshore aqua farms. By providing the workers with a mobile application which has a function of monitoring the water quality in real time, they can check the situation directly without going to the fishery household.

• Textile Coloration and Finishing
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• v.21 no.6
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• pp.12-21
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• 2009

The dyeing property of direct-spinning type and seaisland type 0.2D micro polyester nonwoven fabrics was characterized by three disperse dyes (Dorosperse Red KFFB, Blue KGBR, Yellow KRL) at $120^{\circ}C$ and $130^{\circ}C$. Before and after reduction cleaning, dyeing fastness was evaluated and the thermomigaration after heat setting at $180^{\circ}C$ for 60 min were also evaluated. Direct-spinning type fabric showed better dyeing property, wash fastness, and light fastness, but worse rub fastness than seaisland type fabric. The dyeing property and fastness of direct-spinning type fabric increased at higher dyeing temperature, whereas seaisland type fabric exhibited lower dyeing fastness and the increase of thermomigration at higher dyeing temperature. Non-fixed dye in fiber surface was removed by reduction cleaning process, then dyeing fastness was improved and thermomigration decreased. The higher dye uptake of direct-spinning type non-woven fabric caused the increase of dye molecule migration from fiber internal to fiber surface, so this fabric showed larger thermomigration than seaisland type non-woven fabric.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Journal of the Korean Society of Clothing and Textiles
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• v.38 no.6
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• pp.942-952
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• 2014

Winter outerwear includes various clothes such as classical jackets/coats, padded jackets/coats, wind breakers, leather and fur jackets/coats. This research surveyed care-label instructions attached to 100 jackets/coats dropped off at five drycleaners in the Gyungin area. University students' perception and attitudes towards care labels and management of winter outerwear were examined using a questionnaire. Data collected from 230 respondents were analyzed by frequency analyses, t-tests, ANOVAs and Duncan tests with PASW 20.0. Half of the padding jackets/coats were labelled to be dry cleaned and dry cleaning was more excessively labelled than necessary. University students confirmed more care symbols than fiber compositions such as more at time of cleaning than at purchasing. Clothing-related major students understood care label symbols better than non-clothing major students. Consumers laundered some winter outerwear at home, even though they thought dry cleaning was a proper cleaning method. The appropriate cleaning method for padded jackets/coats is laundering; however, consumers who answered dry cleaning as an appropriate method were three times as those who answered washing, and those performed dry cleaning were two times as those who performed washing. Winter outerwear manufacturers should provide adequate and more specified care-information to consumers in order to maintain initial appearance and performance over longer periods.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.656-661
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• 1997

Ultrasonic cleaning at high frequency near 1MHz, called megasonic cleaning, is commonly used to remove particles less than 1.mu.m by generating accelerations on them. Ultrasonic waves generated from piezoelectric transducers are transmitted through a non-metallic inner container which is used to isolate a cleaning object from metallic ions. The transmission characteristics of a double-structured megasonic cleaner on the variations of parameters such as the thickness and oblique angle of a inner container, chemical ratio of a cleaning agent and temperature and transmittivity are investigated. The results are used to determine an optimum cleaning condition.

• Journal of Korean Society of Water and Wastewater
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• v.34 no.4
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• pp.267-276
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• 2020

In this study, air scouring cleaning was selected and applied among 5 small blocks (S1~S5) in domestic S cities to analyze the cleaning effect of particles causing discoloration. In order to identify the cleaning effect, 10 locations were selected as water quality investigation point, such as the stagnant or water mains ends. Removal of solids, variation of particle components, weight and concentration were analyzed. And the level of the cleanness of the surface inside water mains using endoscope was investigated. As a result of analysis, the solids discharged after cleaning were mainly sand and gravel, pieces related to pipe materials, and corrosion products. As a result of analyzing the concentrated particles of the filter before and after cleaning, it was found that the change in discoloration on the filter was large. In addition, as a result of comparing the weight and the concentration of the particles, it was found that the particles causing discoloration were significantly removed after cleaning. From the results of the endoscopy, it was confirmed that most of the precipitated and accumulated dark yellow discoloration matters inside water mains were removed through cleaning. Therefore, it seems that the particles causing discoloration in water decreased after cleaning. Therefore, it is expected that, if properly cleaning was applied, matters that cause discoloration can be removed from the water mains, and customer's complaints can also be reduced through water quality improvement.

• Clean Technology
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• v.18 no.3
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• pp.287-294
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• 2012

In this study, performances of two cleaning methods were analyzed and a cleaning system was designed to develop a cleaning process of electronic components to remanufacture old laser copy machine. First, plasma cleaning as a dry cleaning method was executed to test cleaning ability. In cleaning of printed circuit board (PCB) by plasma, some damages were found near the metal parts, and considering the productivity, this method was not adequate for the cleaning of electronic components. With 4 different cleaning agents, ultrasonic cleaning tests were executed to select an optimal cleaning agent, aqueous agents showed superior cleaning performance compared to semi-aqueous and non-aqueous agents. Cleaning with aqueous cleaning agent A and 28 kHz ultrasonic frequency can be completed in 30 sec to 1 min. Finally, an ultrasonic cleaning system was constructed based on the pre-test results. Optimal cleaning conditions of 40 kHz and $50^{\circ}C$ were found in the field test. The productivity and economic efficiency in remanufacturing of laser copy machine are expected to increase by adapting developed ultrasonic cleaning system.