• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Journal of the Korean Society for Heat Treatment
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• v.35 no.3
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• pp.150-158
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• 2022

The effects of scandium addition on the Al-6Si-2Cu Alloy were investigated. The Al-6Si-2Cu-Sc alloy was prepared by gravity die casting process. In this study, scandium was added at 0.2 wt%, 0.4 wt%, 0.8 wt%, and 1.0 wt%. The microstructure of Al-6Si-2Cu-Sc alloy was investigated using Optical Microscope, Field Emission Scanning Electron Microscope, Electron Back Scatter Diffraction, and Transmission Electron microscope. The microstructure of Al-6Si-2Cu alloy with scandium added changed from dendrite structure to equiaxed crystal structure in specimens of 0.4 wt% Sc or more, and coarse needle-shape eutectic Si and β-Al₅FeSi phases were segmented and refined. The nanosized Al₃Sc intermetallic compound was observed to be uniformly distributed in the modified Al matrix.

• Asian Pacific Journal of Cancer Prevention
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• v.15 no.2
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• pp.929-935
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• 2014

Two types of nanosized titanium dioxide, anatase ($anTiO_2$) and rutile ($rnTiO_2$), are widely used in industry, commercial products and biosystems. $TiO_2$ has been evaluated as a Group 2B carcinogen. Previous reports indicated that $anTiO_2$ is less toxic than $rnTiO_2$, however, under ultraviolet irradiation $anTiO_2$ is more toxic than $rnTiO_2$ in vitro because of differences in their crystal structures. In the present study, we compared the in vivo and in vitro toxic effects induced by $anTiO_2$ and $rnTiO_2$. Female SD rats were treated with $500{\mu}g/ml$ of $anTiO_2$ or $rnTiO_2$ suspensions by intra-pulmonary spraying 8 times over a two week period. In the lung, treatment with $anTiO_2$ or $rnTiO_2$ increased alveolar macrophage numbers and levels of 8-hydroxydeoxyguanosine (8-OHdG); these increases tended to be lower in the $anTiO_2$ treated group compared to the $rnTiO_2$ treated group. Expression of $MIP1{\alpha}$ mRNA and protein in lung tissues treated with $anTiO_2$ and $rnTiO_2$ was also significantly up-regulated, with $MIP1{\alpha}$ mRNA and protein expression significantly lower in the $anTiO_2$ group than in the $rnTiO_2$ group. In cell culture of primary alveolar macrophages (PAM) treated with $anTiO_2$ and $rnTiO_2$, expression of $MIP1{\alpha}$ mRNA in the PAM and protein in the culture media was significantly higher than in control cultures. Similarly to the in vivo results, $MIP1{\alpha}$ mRNA and protein expression was significantly lower in the $anTiO_2$ treated cultures compared to the $rnTiO_2$ treated cultures. Furthermore, conditioned cell culture media from PAM cultures treated with $anTiO_2$ had less effect on A549 cell proliferation compared to conditioned media from cultures treated with $rnTiO_2$. However, no significant difference was found in the toxicological effects on cell viability of ultra violet irradiated $anTiO_2$ and $rnTiO_2$. In conclusion, our results indicate that $anTiO_2$ is less potent in induction of alveolar macrophage infiltration, 8-OHdG and $MIP1{\alpha}$ expression in the lung, and growth stimulation of A549 cells in vitro than $rnTiO_2$.

• Journal of the Korean Vacuum Society
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• v.21 no.3
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• pp.178-184
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• 2012

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and $SF_6$ as an additive gas under thermal chemical vapor deposition system. The characteristics (formation density and morphology) of as-grown carbon coils were investigated as functions of additive gas flow rate and the cycling on/off modulation of $C_2H_2/SF_6$ flows. Even in the lowest $SF_6$ flow rate (5 sccm) in this work, the cycling on/off modulation injection of $SF_6$ flow for 2 minutes could give rise to the formation of nanosized carbon coils, whereas the continuous injection of $SF_6$ flow for 5 minutes could not give rise to the carbon coils formation. With increasing $SF_6$ flow rates from 5 to 30 sccm, the cycling on/off modulation injection of $SF_6$ flow confines the geometry for the carbon coils to the nanosized ones. Fluorine's role of $SF_6$ during the reaction was regarded as the main cause for the confinement of carbon coils geometries to the nano-sized ones.

• Korean Journal of Materials Research
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• v.22 no.1
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• pp.35-41
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• 2012

Presently, the most promising family of lead-free piezoelectric ceramics is based on $K_{0.5}Na_{0.5}NbO_3$(KNN). Lithium, silver and antimony co-doped KNN ceramics show high piezoelectric properties at room temperature, but often suffer from abnormal grain growth. In the present work, the $(Ba_{0.85}Ca_{0.15})(Ti_{0.88}Zr_{0.12})O_3$ component, which has relaxor ferroelectric characteristics, was doped to suppress the abnormal grain growth. To investigate this effect, Lead-Free $0.95(K_{0.5}Na_{0.5})_{0.95}Li_{0.05}NbO_3-(0.05-x)AgSbO_3-x(Ba_{0.85}Ca_{0.15})(Ti_{0.88}Zr_{0.12})O_3$[KNLN-AS-xBCTZ] piezoelectric ceramics were synthesized by ball mill and nanosized-milling processes in lead-Free $0.95(K_{0.5}Na_{0.5})_{0.95}Li_{0.05}NbO_3-(0.05-x)AgSbO_3$ in order to suppress the abnormal grain growth. The nanosized milling process of calcined powders enhanced the sintering density. The phase structure, microstructure, and ferroelectric and piezoelectric properties of the KNLN-AS ceramics were systematically investigated. XRD patterns for the doped and undoped samples showed perovskite phase while tetragonality was increased with increasing BCZT content, which increase was closely related to the decrease of TO-T. Dense and uniform microstructures were observed for all of the doped BCZT ceramics. After the addition of BCTZ, the tetragonal-cubic and orthorhombic-tetragonal phase transitions shifted to lower temperatures compared to those for the pure KNNL-AS. A coexistence of the orthorhombic and tetragonal phases was hence formed in the ceramics with x = 0.02 mol at room temperature, leading to a significant enhancement of the piezoelectric properties. For the composition with x = 0.02 mol, the piezoelectric properties showed optimum values of: $d_{33}$ = 185 pC/N, $k_P$ = 41%, $T_C=325^{\circ}C$, $T_{O-T}=-4^{\circ}C$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.6
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• pp.283-288
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• 2010

Nanosized NiO powder was prepared by mixing an acid nickel salt and a base nickel salt and their reduction behavior was studied. Ni formate was employed as an acid salt and nickel hydroxide and basic nickel carbonate as base salts. One equivalent acid salt was mixed with 9 equivalent base salt. The mixture of the formate and the carbonate produced ~100 run spherical NiO powder by heat treatment at $750^{\circ}C$/2 h, but the mixture of the formate and the hydroxide gave rise to ~100 nm pseudo spherical NiO powder by heat treatment at $600^{\circ}C$/2 h and grew fast to give pseudo cubic crystals of 100~600 run by heat treatment at $750^{\circ}C$/2 h. Reduction by hydrogen gas proceeded much faster for the one with the hydroxide than that with the carbonate to give porous body with well grown necks. Their behavior was studied by analysis of TG/DSC, XRD, and SEM.

• Bulletin of the Korean Chemical Society
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• v.33 no.8
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• pp.2546-2552
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• 2012

A novel biguanide-functionalized $Fe_3O_4/SiO_2$ magnetite nanoparticle with a core-shell structure was developed for utilization as a heterogeneous organosuperbase in chemical transformations. The structural, surface, and magnetic characteristics of the nanosized catalyst were investigated by various techniques such as transmission electron microscopy (TEM), powder X-ray diffraction (XRD), vibrating sample magnetometry (VSM), elemental analyzer (EA), thermogravimetric analysis (TGA), $N_2$ adsorption-desorption (BET and BJH) and FT-IR. The biguanide-functionalized $Fe_3O_4/SiO_2$ nanoparticles showed a superpara-magnetic property with a saturation magnetization value of 46.7 emu/g, indicating great potential for application in magnetically separation technologies. In application point of view, the prepared catalyst was found to act as an efficient recoverable nanocatalyst in nitroaldol and domino Knoevenagel condensation/Michael addition/cyclization reactions in aqueous media under mild condition. Additionally, the catalyst was reused six times without significant degradation in catalytic activity and performance.

• Journal of the Korean Ceramic Society
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• v.46 no.1
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• pp.69-73
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• 2009

We report the preparation of nanocrystalline cobalt ferrite, $CoFe_2O_4$ particles and their surface coating with silica layers using micro emulsion method. The cobalt ferrite nanoparticles with the size 7nm are firstly prepared by thermal decomposition method. Hydrophobic nanoparticles were coated with silica using micro-emulsion method with surfactant, $NH_4OH$, and tetraethylorthosilicate (TEOS). Monodispersed and spherical silica coated cobalt ferrite nanoparticles have average particle diameter of 38 nm and narrow sized distribution.

• Korean Journal of Materials Research
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• v.25 no.9
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• pp.455-461
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• 2015

SnS-$TiO_2$ nanocomposites are synthesized using simple, cheap, and less toxic $SnCl_2$ as the tin (II) precursor. The prepared nanoparticles are characterized using powder X-ray diffraction (XRD), transmission electron microscopy (TEM), and UV-Vis diffuse reflectance spectra (DRS). The XRD and TEM results indicate that the prepared product has SnS nanoparticles and a grain diameter of 30 nm. The DRS demonstrate that SnS-$TiO_2$ possesses the absorption profile across the entire visible light region. The generation of reactive oxygen species is detected through the oxidation reaction from 1,5-diphenyl carbazide (DPCI) to 1,5-diphenyl carbazone (DPCO). It is found that the photocurrent density and photocatalytic effect increase with the modified SnS. Excellent catalytic degradation of Texbrite BA-L (TBA) solution is observed using the SnS-$TiO_2$ composites under visible light irradiation. It is proposed that both the strong visible light absorption and the multiple exciton excitations contribute to the high visible light photocatalytic activity.

• Korean Journal of Materials Research
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• v.26 no.12
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• pp.741-750
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• 2016

Nanofibers(NFs), because of their high surface area and nanosized grains, have appropriate morphologies for use in chemiresistive-type sensors for gas detection applications. In this study, a highly sensitive and selective CO gas sensing material based on Au-decorated $SnO_2$ NFs was fabricated by electrospinning. $SnO_2$ NFs were synthesized by electrospinning and subsequently decorated with various amounts of Au nanoparticles(NPs) by sputtering; this was followed by thermal annealing. Different characterizations showed the successful formation of Au-decorated $SnO_2$ NFs. Gas sensing tests were performed on the fabricated sensors, which showed bell-shaped sensing behavior with respect to the amount of Au decoration. The best CO sensing performance, with a response of ~20 for 10 ppm CO, was obtained at an optimized amount of Au (2.6 at.%). The interplay between Au and $SnO_2$ in terms of the electronic and chemical sensitization by Au NPs is responsible for the great improvement in the CO sensing capability of pure $SnO_2$ NFs, suggesting that Au-decorated $SnO_2$ NFs can be a promising material for fabricating highly sensitive and selective chemiresistive-type CO gas sensors.