• Title/Summary/Keyword: multilayer substrate

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Analysis of Reflectivity for Interfacial Roughness of Depth-Graded W/Si Multilayer Mirror (두께 변화 W/Si 다층박막거울의 계면 거칠기에 대한 반사율 분석)

  • Chon, Kwon Su
    • Journal of the Korean Society of Radiology
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    • v.12 no.1
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    • pp.101-106
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    • 2018
  • Multilayer mirrors have widely been used for monochromatization of X-ray with high reflection efficiency. The reflected X-ray energy or wavelength is determined by the d-spacing of a multilayer mirror and the incidence angle. The reflectivity critically depends on the number of bilayers and surface roughness on each interface. The multilayer mirror has a structure of alternative deposition of high and low Z-elements on the substrate. Each interface should be considered in the calculation of reflectivity. In this paper, we examine the degradation of reflectivity by the inter-diffusion combined with surface roughness on each interface for a W/Si multilayer mirror. In the depth-graded W/Si multilayer mirror, the FWHMs for angle and energy were larger than them of the uniform multilayer mirror. Inter-diffusion considerable gave rise to the degradation of reflectivity. To obtain measured reflectivity closed to the expected reflectivity, the inter-diffusion on W-Si and Si-W interfaces should be considered.

Characteristics of Al Films Prepared by Oblique Angle Deposition (빗각 증착으로 제조한 Al 박막의 특성)

  • Park, Hye-Sun;Yang, Ji-Hoon;Jung, Jae-Hun;Song, Min-A;Jeong, Jae-In
    • Journal of the Korean institute of surface engineering
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    • v.45 no.3
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    • pp.111-116
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    • 2012
  • Oblique angle deposition (OAD) is a physical vapor deposition method which utilizes non-normal angles between the substrate and the vaporizing source. It has been known that tilting the substrate changes the properties of the film deposited on it, which was thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer Al films by magnetron sputtering. The magnetron sputtering source of 4 inch diameter was used to deposit the films. Al films have been deposited on Si wafers and cold-rolled steel sheets. The multilayer films were prepared by changing the tilting angle upside down at each layer interval, which means that when the first layer was deposited at an angle of $+45^{\circ}$, the second layer was deposited at an angle of $-45^{\circ}$, and vice versa. The microstructure, surface roughness and reflectance of the films were investigated using a scanning electron microscope, a surface profiler and a spectrophotometer, respectively. The corrosion resistance was measured and compared using the salt spray test. The single layer film prepared at an oblique angle of $60^{\circ}$ prepared at other angles. However, for the multilayer films, the film prepared at an oblique angle of $45^{\circ}$ showed the most compact and featureless structure. The multilayer films were found to exhibit higher corrosion resistance than the single layer films.

Tribological Behavior of Mono- and Multilayer Coverings on Silicon Surface

  • Zhavnerko, G.K.;Ahn, Hyo-Sok;Ondarcuhu, T.;Chizhik, S.A.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.43-44
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    • 2002
  • Langmuir-Blodgett mono- and multilayer films from 2,4-heneicosanedione have been examined as lubrication coatings In the process of wear. Tribological properties of the films have been studied by atomic force microscopy and microtribometer. It has been observed that the wear resistance of silicon surface coated with OTS/LB multilayer system increased by several orders of magnitude compared to uncoated surfaces at low normal load. The results obtained suggest that the system constructed on silicon surface reduces surface energy, friction coefficient and increases life of substrate due to a possibility of LB film self-repairing during frictional contact.

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Dark-field Transmission Electron Microscopy Imaging Technique to Visualize the Local Structure of Two-dimensional Material; Graphene

  • Na, Min Young;Lee, Seung-Mo;Kim, Do Hyang;Chang, Hye Jung
    • Applied Microscopy
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    • v.45 no.1
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    • pp.23-31
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    • 2015
  • Dark field (DF) transmission electron microscopy image has become a popular characterization method for two-dimensional material, graphene, since it can visualize grain structure and multilayer islands, and further provide structural information such as crystal orientation relations, defects, etc. unlike other imaging tools. Here we present microstructure of graphene, particularly, using DF imaging. High-angle grain boundary formation wass observed in heat-treated chemical vapor deposition-grown graphene on the Si substrate using patch-quilted DF imaging processing, which is supposed to occur by strain around multilayer islands. Upon the crystal orientation between layers the multilayer islands were categorized into the oriented one and the twisted one, and their local structure were compared. In addition information from each diffraction spot in selected area diffraction pattern was summarized.

Highly flexible, transparent and low resistance IZO-Ag-IZO multilayer electrode for flexible OLEDs

  • Cho, Sung-Woo;Choi, Kwang-Hyuk;Jeong, Jin-A;Lee, Se-Hyung;Kim, Jang-Joo;Kim, Han-Ki
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.609-612
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    • 2008
  • Characteristics of indium-zinc-oxide (IZO)-Ag-IZO multilayer grown on a PET substrate were investigated for flexible organic emitting diodes. By inserting very thin Ag layer between amorphous IZO, IZO-Ag-IZO (IAI) multilayer anode exhibited remarkably reduced sheet resistance and high transmittance due to the surface plasmon resonance effect and Ag layer.

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Surface Plasmon Resonance Effect of Ag Layer Inserted in a Highly Flexible Transparent IZTO/Ag/IZTO Multilayer Electrode for Flexible Organic Light Emitting Diodes

  • Park, Ho-Kyun;Jun, Nam-Ho;Choi, Kwang-Hyuk;Kim, Han-Ki
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.601-604
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    • 2008
  • We report on the Ag thickness effect on the electrical and optical properties of indium zinc tin oxide (IZTO)-Ag-IZTO multilayer electrode grown on a PET substrate and the surface plasmon effect of Ag layer on the optical properties of IZTO-Ag-IZTO electrode. Using an IZTO-Ag-IZTO multilayer with a total thickness below ~80 nm, we can obtain high-quality flexible electrode with very low sheet resistance, high transmittance, high work function and superior flexibility.

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STUDY OF MULTILAYER STRUCTURE USING X-RAY DOUBLE CRYSTAL DIFFRACTION

  • Wu, Yunzhong;Xu, Xueming;Wang, Weiyuan
    • Journal of the Korean Vacuum Society
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    • v.4 no.S2
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    • pp.30-33
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    • 1995
  • By using X-ray double crystal diffraction technique the multilayer structure composed of glass membrane, platinum film and $\alpha Al_2O_3$ substrate has been studied. It is found the stress is produced in the film by thermal mismatch within multilayer materials. The measuring results of thin film platinum resistors show that the stress were induce resistance change of device and different stress status will produce add resistance in different direction. Selecting proper glass material can make opposite stress in Pt film and opposite add resistance due to thermal mismatch. The reliability of Pt resistor has been improved with method of this stress compensation.

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Preparation and Characteristics of Organic Electroluminescence Devices using Multilayer Structure with Carrier Transport Materials (다층막 구조를 이용한 유기 EL소자의 제작과 특성에 관한 연구)

  • Lee, Sang-Youn;Kim, Young-Kwan;Kim, Jung-Soo
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1563-1565
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    • 1997
  • Electroluminescence(EL)devices based on organic thin layers have attracted lot of interests because of their possible application as large-area light-emitting display. One of the problems of such devices is lifetime of the cell, where the degradation of the cell is partially due to the crystalliyzation of organic layers. In large part, this problem can be solved by using a multilayer device structure prepared by vapor deposition technique. In this study, blue lightemitting multilayer organic electroluminescence devices were fabricated using Poly (9-vinyl-carbazole) (PVK) and 2-(4'-tert-butylpheny])-5-(4"-bis-phenyl)1,3,4-oxadiazole (PBD) as hole trasport and electron transport material, respectively, where tris(8-hydroxyquinolinate) aluminum (Alq3) was used as a luminescenct material. A cell structure of glass substrate/indume-tin-oxide(ITO)/PVK/$Alq_3$/PBD/Mg:In was employed.

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Sintering of LTCC Tape on Alumina Substrates for Multilayered Structure

  • Kim, Hyo-Tae;Nam, Myung-Hwa;Chun, Byung-Joon;Kim, Jong-Hee
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.908-909
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    • 2006
  • The HTCC based multilayer structure plasma head unit have some difficulties in fabrication due to complicated post-processes, such as heat treatment at reduced atmosphere, re-bonding of each layer, and silver metallization. On the other hand, LTCC based technology provides relatively simple process for multilayer plasma unit except weak mechanical properties. To overcome this problem a combined scheme using both LTCC and HTCC technology has been developed in our group, recently. In this work, we report the structural design, materials selection, joining of LTCC with HTCC substrate, and co-firing process for the fabrication of multilayered atmospheric plasma head unit.

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Deposition Transfer and Response Properties of p-PDA/AA Mixed Films (p-PDA/AA 혼합막의 누적전이와 응답특성)

  • 송진원;이경섭
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.511-514
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    • 2000
  • Photoreactive multilayer films were prepared using long-chin alkyl diesters of p-phenylenediacrylic acid(p-PDA). In spite of the absence of hydrophilic groups in these molecules, they formed stable monolayers on the water surface when mixed with arachidic acid. Surface showed the presence of a condecsed phase and these monolayer could be transferred onto a substrate with Y-type deposition. The UV spectra of mixed multilayer films showed of absorption peak compared with that in solution. The linear relationship between absorbanoe and the number of layers supports the successful formation of multilayer films.

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