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http://dx.doi.org/10.5695/JKISE.2012.45.3.111

Characteristics of Al Films Prepared by Oblique Angle Deposition  

Park, Hye-Sun (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology)
Yang, Ji-Hoon (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology)
Jung, Jae-Hun (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology)
Song, Min-A (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology)
Jeong, Jae-In (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology)
Publication Information
Journal of the Korean institute of surface engineering / v.45, no.3, 2012 , pp. 111-116 More about this Journal
Abstract
Oblique angle deposition (OAD) is a physical vapor deposition method which utilizes non-normal angles between the substrate and the vaporizing source. It has been known that tilting the substrate changes the properties of the film deposited on it, which was thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer Al films by magnetron sputtering. The magnetron sputtering source of 4 inch diameter was used to deposit the films. Al films have been deposited on Si wafers and cold-rolled steel sheets. The multilayer films were prepared by changing the tilting angle upside down at each layer interval, which means that when the first layer was deposited at an angle of $+45^{\circ}$, the second layer was deposited at an angle of $-45^{\circ}$, and vice versa. The microstructure, surface roughness and reflectance of the films were investigated using a scanning electron microscope, a surface profiler and a spectrophotometer, respectively. The corrosion resistance was measured and compared using the salt spray test. The single layer film prepared at an oblique angle of $60^{\circ}$ prepared at other angles. However, for the multilayer films, the film prepared at an oblique angle of $45^{\circ}$ showed the most compact and featureless structure. The multilayer films were found to exhibit higher corrosion resistance than the single layer films.
Keywords
Magnetron sputtering; Oblique angle deposition; Al coating; Corrosion resistance;
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1 P. Fellener, M. C. Paucivova, K. Mataisovsky, Surf. Technol., 14 (1981) 101.   DOI   ScienceOn
2 C. C. Yang, Mater. Chem. Phys., 37 (1994) 355.   DOI   ScienceOn
3 J.-I. Jeong, J.-H. Yang, J. Kor. Inst. Surf. Eng., 42 (2009) 86.   DOI   ScienceOn
4 G. S. Frankel, J. Electrochem. Soc., 145 (1998) 2186.   DOI   ScienceOn
5 E. Lugscheider, C. Barimani, C. Wolff, S. Guerreiro, G. Doepper, Surf. Coat. Technol., 86-87 (1996) 177.   DOI   ScienceOn
6 J. M. Nieuwenhuizen, H. B. Haanstra, Philips Tech. Rev., 27 (1966) 87.
7 John J. Steele, Michael J. Brett, J. Mater. Sci.: Mater. Electron., 18 (2007) 368.
8 K. Robbie, M. J. Brett, J. Vac. Sci. Technol., A15 (1997) 1460.
9 B. Dick, M. J. Brett, in Encyclopedia of Nonoscience and Nanotechnology, 6 (2004) 703.
10 J. J. Sreele, J. P. Gospodyn, J. C. Sit, M. J. Brett, IEEE Sensor. J., 6 (2006) 24.   DOI   ScienceOn