• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.711-714
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• 2004

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. However, it still has various problems to the CMP equipment, in particular, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the interaction between the various parameters such as turntable and head speed, down force and back pressure during CMP. Using statistical analysis techniques, a better understanding of the interaction behavior between the various parameters and the effect on removal rate, no-uniformity and ETC (edge to center) is achieved.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.4
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• pp.287-292
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• 2010

Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.8
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• pp.740-743
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• 2003

A multi-layer ceramic (MLC) chip type band-pass filter (BPF) is presented. The MLC chip BPF has the benefits of low cost and small size. The BPF consists of coulped stripline resonators and coupling capacitors. The BPF is designed to have an attenuation pole at below the passband for a receiver band of IMT-2000 handset. The computer-aided design technology is applied for analysis of the BPF frequency characteristics. The passband and attenuation pole depend on the coupling between resonators and coupling capacitance. The frequency characterics of the passband and attenuation pole are analyzed with the variation of the coupling between resonators and coupling capacitance. An equivanlent circuit and structure of MLC chip BPF are proposed. The frequency characteristics of the BPF is well acceptable for IMT-2000 application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.5
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• pp.407-412
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• 1998

In this paper, we design PHASAR(Phased Array) WDM(Wavelength Dvision Division Multi- and Demultiplexing) filters and evaluate their performance. The PHASAR WDM filter is designed to have flat-passband characteristics by inserting the multimode waveguides between input waveguides and a first star coupler. BPM simulation results show that the excess loss is smaller than 6.5 dB, the crosstalk is less than -22 dB and the 1 dB passband is about 50 GHz. The effect of the path difference error is also investigated.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.1
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• pp.56-60
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• 2002

A low-temperature cofired-ceramic (LTCC) multi-layer ceramic (MLC) band-pass filter (BPF) is presented, which has the benefits of low cost and small size. The BPF is designed for an IMT-2000 handset. The computer-aided design technology is also presented. The BPF with an attenuation pole at below the passband has been discussed and realized. The equivalent circuit of the BPF was established by transmission lines and lumped capacitors. The frequency characteristics of the LTCC-MLC BPF is well acceptable for IMT-2000 application.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.731-739
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• 2002

recently out door stadiums have been built as multi purpose stadium for athletic sports It hold but also various events and huge concerts. in the past, out-door stadium usually was built, but recently the out-door stadium which of the 50 ％ of roof covered by doom have been built increasingly. as the result, the sound obstacle is becoming very important. but a design of sound has become unplaned except some of the stadium, also rarely been built by sound-absorption material. as the result, the purpose of this study is investigating, analyzing the theory for plan of electric acoustic sound, a drawing of acoustic design and measurement a result value, comparison, evaluating a main sound factor with criteria of the Seoul City design. and reservation time, clearness, sound pressure level suitable for using purpose, so the necessary quantities will be added to financial budget of building acoustic design. and For verification, this contains acoustic analyser measurement and computer simulation and this study will find the solution of helping method.

• Structural Engineering and Mechanics
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• v.47 no.2
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• pp.265-286
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• 2013

A study on economic performances of consecutive multi-span suspension bridges is carried out. In this part of the study, material amount and structural cost estimation formulas of the bridges is derived based on the structural ultimate carrying capacity. The bridge cost includes the part of superstructure and the part of substructure. Three types of bridge foundations, bored piles, concrete caissons and floating foundations, are considered in substructure. These formulas are to be used for the parametric study of the bridge cost in order to define its more economical layout under different conditions in the part two of the study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.139-142
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• 2005

The Digital Meister is an advisory system to help the designer using the knowledge obtained from design and analysis data. In this paper, Taguchi method was applied to analyze the design parameters of automotive engine pulley. As a finite element method (FEM), ALGOR Multi-physics was used for analyzing the static analysis. As a result, two bending positions and material thickness were highly related to the maximum stress. These correlations between design parameters and analysis result will be used for supporting the design process of Digital Meister.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.15 no.4
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• pp.591-598
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• 2002

In the ship structural design, the material cost of hull weight and the overall cost of construction processes should be minimized considering safety and reliability. In the past, minimum weight design has been mainly focused on reducing material cost and increasing dead weight reflect the interests of a ship's owner. But, in the past experience, the minimum weight design has been inevitably lead to increasing the construction cost. Therefore, it is necessary that the designer of ship structure should consider both structural weight and construction cost. In this point of view, multi-objective optimization technique is proposed to design the ship structure in this study. According to the proposed algorithm, the results of optimization were compared to the structural design of actual VLCC(Very Large Crude Oil Carrier). Objective functions were weight cost and construction cost of VLCC, and ES(Evolution Strategies), one of the stochastic search methods, was used as an optimization solver. For the scantlings of members and the estimations of objectives, classification rule was adopted for the longitudinal members, and the direct calculation method, GSDM(Generalized Slope Deflection Method), lot the transverse members. To choose the most economical design point among the results of Pareto optimal set, RFR(Required Freight Rate) was evaluated for each Pareto point, and compared to actual ship.

• ETRI Journal
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• v.39 no.3
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• pp.390-397
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• 2017

In this paper, we propose a scheme for designing a tunable pixel layer based on a $Ge_2Sb_2Te_5$ (GST) alloy thin film. We show that the phase change of GST can significantly affect the reflection characteristic when the GST film is embedded into a dielectric encapsulation layer. We investigate the appropriate positions of the GST film within the dielectric layer for high diffraction efficiency, and we prove that they are antinodes of Fabry-Perot resonance inside the dielectric layer. Using the proposed scheme, we can increase the diffraction efficiency by about ten times compared to a bare GST film pixel, and 80 times for the first-to-zeroth-order diffraction power ratio. We show that the proposed scheme can be designed alternatively for a broadband or wavelength-selective type by tuning the dielectric thickness, and we discuss a multi-phase example with a double-stack structure.