• Title/Summary/Keyword: motion stage

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A Piezo-Driven Miniaturized XY Stage with Two Prismatic-Prismatic Joints Type Parallel Compliant Mechanism (2 개의 병진-병진 관절형 병렬 탄성 메커니즘을 갖는 압전구동 소형 XY 스테이지)

  • Choi, Kee-Bong;Lee, Jae Jong;Kim, Gee Hong;Lim, Hyung Jun
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.12
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    • pp.1281-1286
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    • 2013
  • In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of $30{\mu}m$, the resolution of 20 nm, and the bandwidth of 400 Hz in each axis were obtained in the experiments.

Fabrication of Piezo-Driven Micropositioning Stage using 3D printer (3D 프린터를 사용한 정밀 스테이지의 제작)

  • Jung, Ho Je;Kim, Jung Hyun
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.3
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    • pp.277-283
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    • 2014
  • This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A micro-position stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.

A Fine Motion Mechanism of Dual Servo Control for Ultraprecision Positioning (초정밀 위치 결정을 위한 이중 서보 제어용 미세 구동 메카니즘)

  • 오정석;이창우;이형석;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.10a
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    • pp.249-254
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    • 1993
  • In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travek range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days, This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xy .theta. motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results show that the translational and rotational motions of the stage can be controlled with resolutions of 5 nm and 0.1 arcsec, respectively.

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Behavioral Characteristics of Nano-Stages According to Hinge Structure (힌지 형태에 따른 나노 스테이지의 거동특성)

  • Oh, Hyun-Seong;Lee, Sung-Jun;Choi, Soo-Chang;Park, Jung-Woo;Lee, Deug-Woo
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.3
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    • pp.23-30
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    • 2007
  • Nano-stages are used in many ultra-precision systems, such as scanning probe microscope(SPM), optical fiber aligners, ultra-precision cutting, measuring systems, and optical systems. It is difficult to find the solutions because the performances and characteristics of nano-scale motion stage are determined by various factors. To understand effects of nano-scale motion stage, three types of hinge structures were designed and manufactured. Each hinge structures were designed following with the results of simulation. And from the result of experiments, hysteresis, displacement, and accuracy were compared with each hinge structures.

A hierachical control structure of a robot manipulator for conveyor tracking (컨베이어 추적을 위한 로보트 매니퓰레이터의 계층적 제어구조)

  • 박태형;이영대;이범희;고명삼
    • 제어로봇시스템학회:학술대회논문집
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    • 1991.10a
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    • pp.1046-1051
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    • 1991
  • For the conveyor tracking application of a robot manipulator, a new control scheme is presented. The presented scheme is divided into two stages : the upper one is the motion planning stage and the lower one is the motion control stage. In the upper stage, the nominal trajectory which tracks the part moving in a constant velocity, is planned considering the robot arm dynamics. On the other hand, in the lower level, the perturbed trajectory is generated to track the variation in the velocity of conveyor belt via sensory feedback and the perturbed arm dynamics. In both stages, the conveyor tracking problem is formulated as an optimal tracking problem, and the torque constraints of a robot manipulator are taken into account. Simulation results are then presented and discussed.

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Magnetically Suspended Contact-Free Linear Actuator for Precision Stage

  • Lee, Sang-Heon;Baek, Yoon-Su
    • Journal of Mechanical Science and Technology
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    • v.17 no.5
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    • pp.708-717
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    • 2003
  • With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.

Cardio-Angiographic Sequence Coding Using Neural Network Adaptive Vector Quantization (신격회로망 적응 VQ를 이용한 심장 조영상 부호화)

  • 주창희;최종수
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.40 no.4
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    • pp.374-381
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    • 1991
  • As a diagnostic image of hospitl, the utilization of digital image is steadily increasing. Image coding is indispensable for storing and compressing an enormous amount of diagnostic images economically and effectively. In this paper adaptive two stage vector quantization based on Kohonen's neural network for the compression of cardioangiography among typical angiography of radiographic image sequences is presented and the performance of the coding scheme is compare and gone over. In an attempt to exploit the known characteristics of changes in cardioangiography, relatively large blocks of image are quantized in the first stage and in the next stage the bloks subdivided by the threshold of quantization error are vector quantized employing the neural network of frequency sensitive competitive learning. The scheme is employed because the change produced in cardioangiography is due to such two types of motion as a heart itself and body motion, and a contrast dye material injected. Computer simulation shows that the good reproduction of images can be obtained at a bit rate of 0.78 bits/pixel.

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Combining Dynamic Time Warping and Single Hidden Layer Feedforward Neural Networks for Temporal Sign Language Recognition

  • Thi, Ngoc Anh Nguyen;Yang, Hyung-Jeong;Kim, Sun-Hee;Kim, Soo-Hyung
    • International Journal of Contents
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    • v.7 no.1
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    • pp.14-22
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    • 2011
  • Temporal Sign Language Recognition (TSLR) from hand motion is an active area of gesture recognition research in facilitating efficient communication with deaf people. TSLR systems consist of two stages: a motion sensing step which extracts useful features from signers' motion and a classification process which classifies these features as a performed sign. This work focuses on two of the research problems, namely unknown time varying signal of sign languages in feature extraction stage and computing complexity and time consumption in classification stage due to a very large sign sequences database. In this paper, we propose a combination of Dynamic Time Warping (DTW) and application of the Single hidden Layer Feedforward Neural networks (SLFNs) trained by Extreme Learning Machine (ELM) to cope the limitations. DTW has several advantages over other approaches in that it can align the length of the time series data to a same prior size, while ELM is a useful technique for classifying these warped features. Our experiment demonstrates the efficiency of the proposed method with the recognition accuracy up to 98.67%. The proposed approach can be generalized to more detailed measurements so as to recognize hand gestures, body motion and facial expression.