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Magnetically Suspended Contact-Free Linear Actuator for Precision Stage  

Lee, Sang-Heon (Department of Mechanical Engineering, Yonsei University)
Baek, Yoon-Su (School of Mechanical Engineering, Yonsei University)
Publication Information
Journal of Mechanical Science and Technology / v.17, no.5, 2003 , pp. 708-717 More about this Journal
Abstract
With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.
Keywords
Magnetic Suspension; Contact-free Linear Actuator; Precision Stage; Magnetic Circuit;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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