• Proceedings of the KSME Conference
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• 2008.11a
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• pp.844-849
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• 2008

A nano-imprinting stage has been widely used in various fields of nano-technology. In this study, A 4-axis nano-imprinting stage is modeled with using the 3D-CAD Tool. Structural components such as an upper-plate, bearings and cross-roller-guides are modeled with finite elements to analyze flexibility effect during the precision stage motion. In addition, Dynamic analysis is executed to reproduce actual motion of 4-axis nano imprinting stage.

• Journal of the Korea Society of Computer and Information
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• v.10 no.4 s.36
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• pp.191-201
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• 2005

In this paper, we propose a method to calculate camera motion parameter, which is based on efficient invariant features irrelevant to the camera veiwpoint. As feature information in previous research is variant to camera viewpoint. information content is increased, therefore, extraction of accurate features is difficult. LM(Levenberg-Marquardt) method for camera extrinsic parameter converges on the goat value exactly, but it has also drawback to take long time because of minimization process by small step size. Therefore, in this paper, we propose the extracting method of invariant features to camera viewpoint and two-stage calculation method of camera motion parameter which enhances accuracy and convergent degree by using camera motion parameter by 2D homography to the initial value of LM method. The proposed method are composed of features extraction stage, matching stage and calculation stage of motion parameter. In the experiments, we compare and analyse the proposed method with existing methods by using various indoor images to demonstrate the superiority of the proposed algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.10
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• pp.929-934
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• 2014

Reaction force compensation (RFC) mechanism can relieve the vibration of base system caused by acceleration and deceleration of mover. In this paper, we propose a new passive RFC mechanism with a movable additional mass to reduce vibration of the system base as well as displacement of the magnet track. First, equation of motion for the new passive RFC mechanism is derived and simulated to tune design parameters such as masses and spring coefficients. Simulation results show that the vibration of the system base of the stage with the new RFC mechanism.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.4
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• pp.102-108
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• 2011

LQG/LTR control scheme is applied to the two axes stage using piezoelectric actuator for tracking reference input and suppressing hysteresis effect in this paper. The plant is combined with an integrator to improve the tracking ability. LQG/LTR controller is designed by making desirable target filter loop remove all poles except for an integrator included in new design plant model and loop transfer recovery. Decoupler in the shape of FIR filter is added to remove the coupling effect between the two axes motion and so feedback control loop is designed independently for the each axis motion.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.1
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• pp.132-136
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• 2008

Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.121-124
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• 2004

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force fer suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system. the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used fer solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage table's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

• International Journal of Control, Automation, and Systems
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• v.1 no.1
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• pp.1-10
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• 2003

This paper presents a high-precision magnetically levitated (maglev) stage to meet demanding motion specifications in the next-generation precision manufacturing and nanotechnology. Characterization of dynamic behaviors of such a motion stage is a crucial task. In this paper, we address the issues related to the stochastic modeling of the stage including transfer function identification, and noise/disturbance analysis and prediction. Provided are test results on precision dynamics, such as fine settling, effect of optical table oscillation, and position ripple. To deal with the dynamic coupling in the platen, we designed and implemented a multivariable linear quadratic regulator, and performed time-optimal control. We demonstrated how the performance of the current maglev stage can be improved with these analyses and experimental results. The maglev stage operates with positioning noise of 5 nm rms in $\chi$ and y, acceleration capabilities in excess of 2g(20 $m/s^2$), and closed-loop crossover frequency of 100 Hz.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1273-1276
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• 2005

A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

• International Journal of Control, Automation, and Systems
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• v.4 no.1
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• pp.1-9
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• 2006

This paper presents the modeling and multivariable feedback control of a novel high-precision multi-dimensional positioning stage. This integrated 6-degree-of-freedom. (DOF) motion stage is levitated by three aerostatic bearings and actuated by 3 three-phase synchronous permanent-magnet planar motors (SPMPMs). It can generate all 6-DOF motions with only a single moving part. With the DQ decomposition theory, this positioning stage is modeled as a multi-input multi-output (MIMO) electromechanical system with six inputs (currents) and six outputs (displacements). To achieve high-precision positioning capability, discrete-time integrator-augmented linear-quadratic-regulator (LQR) and reduced-order linearquadratic-Gaussian (LQG) control methodologies are applied. Digital multivariable controllers are designed and implemented on the positioning system, and experimental results are also presented in this paper to demonstrate the stage's dynamic performance.