Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Motion Control of the Precise Stage using Piezoelectric Actuator

압전소자를 이용한 정밀 스테이지의 운동제어

  • 김인수 (금오공과대학교 기전공학과) ;
  • 김영식 (금오공과대학교 기전공학과) ;
  • 황윤식 (금오공과대학교 기전공학과)
  • Received : 2011.07.07
  • Accepted : 2011.08.08
  • Published : 2011.08.31
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Abstract

LQG/LTR control scheme is applied to the two axes stage using piezoelectric actuator for tracking reference input and suppressing hysteresis effect in this paper. The plant is combined with an integrator to improve the tracking ability. LQG/LTR controller is designed by making desirable target filter loop remove all poles except for an integrator included in new design plant model and loop transfer recovery. Decoupler in the shape of FIR filter is added to remove the coupling effect between the two axes motion and so feedback control loop is designed independently for the each axis motion.

Keywords

References

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