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Motion Control of the Precise Stage using Piezoelectric Actuator  

Kim, In-Soo (금오공과대학교 기전공학과)
Kim, Yeung-Shik (금오공과대학교 기전공학과)
Hwang, Yun-Sik (금오공과대학교 기전공학과)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.10, no.4, 2011 , pp. 102-108 More about this Journal
Abstract
LQG/LTR control scheme is applied to the two axes stage using piezoelectric actuator for tracking reference input and suppressing hysteresis effect in this paper. The plant is combined with an integrator to improve the tracking ability. LQG/LTR controller is designed by making desirable target filter loop remove all poles except for an integrator included in new design plant model and loop transfer recovery. Decoupler in the shape of FIR filter is added to remove the coupling effect between the two axes motion and so feedback control loop is designed independently for the each axis motion.
Keywords
APrecise Stage; Piezoelectric Actuator; LQG/LTR; Coupling Effect;
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Times Cited By KSCI : 1  (Citation Analysis)
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