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An Error Motion Analysis of Rotary Stage Driven By PZT  

Kim, Jin-Ho (한양대학교 대학원 기계공학과)
Shin, Dong-Ik (한양대학교 대학원 기계공학과)
Yun, Deok-Won (한양대학교 대학원 기계공학과)
Han, Chang-Soo (한양대학교 기계공학과)
Lee, Sang-Moo (한국생산기술연구원)
Nam, Kyung-Tae (한국생산기술연구원)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.17, no.1, 2008 , pp. 132-136 More about this Journal
Abstract
Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.
Keywords
PZT actuator; Axis of Rotation; Error Motion;
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  • Reference
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