An Error Motion Analysis of Rotary Stage Driven By PZT
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Kim, Jin-Ho
(한양대학교 대학원 기계공학과)
Shin, Dong-Ik (한양대학교 대학원 기계공학과) Yun, Deok-Won (한양대학교 대학원 기계공학과) Han, Chang-Soo (한양대학교 기계공학과) Lee, Sang-Moo (한국생산기술연구원) Nam, Kyung-Tae (한국생산기술연구원) |
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