• Advances in materials Research
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• v.12 no.2
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• pp.133-159
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• 2023

In this paper, a size-dependent dynamic investigation of a porous metal foams microbeamsis presented. The novelty of this study is to use a metal foam microbeam that contain porosities based on the refined high order shear deformation beam model, with sinusoidal shear strain function, and the modified strain gradient theory (MSGT) for the first time. The Lagrange's principle combined with differential quadrature hierarchicalfinite element method (DQHFEM) are used to obtain the porous microbeam governing equations. The solutions are presented for the natural frequencies of the porous and homogeneoustype microbeam. The obtained results are validated with the analytical methods found in the literature, in order to confirm the accuracy of the presented resolution method. The influences of the shape of porosity distribution, slenderness ratio, microbeam thickness, and porosity coefficient on the free vibration of the porous microbeams are explored in detail. The results of this paper can be used in various design formetallic foammicro-structuresin engineering.

• Smart Structures and Systems
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• v.22 no.1
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• pp.27-40
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• 2018

The governing equations of motion are derived for analysis of a sandwich microbeam in this paper. The sandwich microbeam is including an elastic micro-core and two piezoelectric micro-face-sheets. The microbeam is subjected to transverse loads and two-dimensional electric potential. Higher-order sinusoidal shear deformation beam theory is used for description of displacement field. To account size dependency in governing equations of motion, strain gradient theory is used to mention higher-order stress and strains. An analytical approach for simply-supported sandwich microbeam with short-circuited electric potential is proposed. The numerical results indicate that various types of parameters such as foundation and material length scales have significant effects on the free vibration responses and dynamic results. Investigation on the influence of material length scales indicates that increase of both dimensionless material length scale parameters leads to significant changes of vibration and dynamic responses of microbeam.

• Analytical Science and Technology
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• v.19 no.5
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• pp.407-414
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• 2006

An X-ray diffractometer for spatially resolved X-ray diffraction measurements was developed to identify phase in the narrow (micron-scaled) region of high burn-up fuels and some nuclear materials. The micro-XRD was composed of an X-ray microbeam alignment system and a sample micro translation system instead of a normal slit and a fixed sample stage in a commercial XRD. The X-ray microbeam alignment system was fabricated with a microbeam concentrator having two Ni deposited mirrors, a vertical positioner, and a tilt table for the generation of a concentrated microbeam. The sample micro translation system was made with a sample holder and a horizontal translator, allowing movement of a specimen at $5{\mu}m$ steps. The angular intensity profile of the microbeam generated through a concentrator was symmetric and not distorted. The size of the microbeam was $4,000{\times}20{\mu}m$ and the spatial resolution of the beam was $47{\mu}m$ at the sample position. When the diffraction peaks were measured for a $UO_2$ pellet specimen by this system, the reproducibility ($2{\Theta}={\pm}0.01^{\circ}$) of the peaks was as good as a conventional X-ray diffractometer. For the cross section of oxidized titanium metal, not only $TiO_2$ in an outer layer but also TiO near an oxide-metal interface was observed.

• Smart Structures and Systems
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• v.16 no.5
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• pp.891-918
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• 2015

In many of microdevices a part of a microbeam is covered by a piezoelectric layer. Depend on the application a DC or AC voltage is applied between upper and lower side of the piezoelectric layer. A common method in many of previous works for evaluating the response of these structures is discretizing by Galerkin method. In these works often single mode shape of a uniform microbeam i.e. the microbeam without piezoelectric layer has been used as comparison function, and so the convergence of the solution has not been verified. In this paper the Galerkin method is used for discretization, and a comprehensive analysis on the convergence of solution of equation that is discretized using this comparison function is studied for both clamped-clamped and clamped-free microbeams. The static and dynamic solution resulted from Galerkin method is compared to the modal expansion solution. In addition the static solution is compared to an exact solution. It is denoted that the required numbers of uniform microbeam mode shapes for convergence of static solution due to DC voltage depends on the position and thickness of deposited piezoelectric layer. It is shown that when the clamped-clamped microbeam is coated symmetrically by piezoelectric layer, then the convergence for static solution may be obtained using only first mode. This result is valid for clamped-free case when it is covered by piezoelectric layer from left clamped side to the right. It is shown that when voltage is AC then the number of required uniform microbeam shape mode for convergence is much more than the number of required mode in modal expansion due to the dynamic effect of piezoelectric layer. This difference increases by increasing the piezoelectric thickness, the closeness of the excitation frequency to natural frequency and decreasing the damping coefficient. This condition is often indefeasible in microresonator system. It is concluded that discreitizing the equation of motion using one mode shape of uniform microbeam as comparison function in many of previous works causes considerable errors.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.1
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• pp.17-21
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• 2018

The natural frequency of a laminated cantilever microbeam was studied in the present investigation. The microbeam was made of quartz on a silicon chip, and its top and bottom surfaces were coated with thin(~30nm) gold films. An ultrasonic testing platform was employed to resonate the microbeam, and its time domain signal was optically measured. The natural frequency was quantified through the fast Fourier transform of the waveform, and the result showed good agreement with a theoretical estimation from the classical beam theory. This study is expected to provide a dynamic evaluation technique for micro/nanoscale materials and micromechanical structures.

• Structural Engineering and Mechanics
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• v.73 no.6
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• pp.685-698
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• 2020

The dynamic stability of a functionally graded polymer microbeam reinforced by graphene oxides subjected to a periodic axial force is investigated. The microbeam is assumed to rest on an elastic substrate and is subjected to various immovable boundary restraints. The weight fraction of graphene oxides nanofillers is graded across the beam thickness. The effective Young's modulus of the functionally graded graphene oxides reinforced composite (FG-GORC) was determined using modified Halpin-Tsai model, with the mixture rule used to evaluate the effective Poisson's ratio and the mass density. An improved third order shear deformation theory (TSDT) is used in conjunction with the Chebyshev polynomial-based Ritz method to derive the Mathieu-Hill equations for dynamic stability of the FG-GORC microbeam, in which the scale effect is taken into account based on modified couple stress theory. Then, the Mathieu-Hill equation was solved using Bolotin's method to predict the principle unstable regions of the FG-GORC microbeams. The numerical results show the effects of the small scale, the graphene oxides nanofillers as well as the elastic substrate on the dynamic stability behaviors of the FG-GORC microbeams.

• Structural Engineering and Mechanics
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• v.42 no.5
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• pp.677-699
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• 2012

This article studies the secondary resonances of a clamped-clamped microresonator under combined electrostatic and piezoelectric actuations. The electrostatic actuation is induced by applying the AC-DC voltage between the microbeam and the electrode plate that lies at the opposite side of the microbeam. The piezoelectric actuation is induced by applying the DC voltage between upper and lower sides of piezoelectric layer. It is assumed that the neutral axis of bending is stretched when the microbeam is deflected. The drift effect of piezoelectric layer (the phenomenon where there is a slow increase of the free strain after the application of a DC field) is neglected. The equations of motion are solved by using the multiple scale perturbation method. The system possesses a subharmonic resonance of order one-half and a superharmonic resonance of order two. It is shown that using the DC piezoelectric actuation, the sensitivity of AC-DC electrostatically actuated microresonator under subharmonic and superharmonic resonances may be tuned. In addition, it is shown that the tuning domain of the microbeam under combined electrostatic and piezoelectric actuations at subharmonic and superharmonic conditions is larger than the tuning domain of microbeam under only the electrostatic actuation.

• Structural Engineering and Mechanics
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• v.52 no.5
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• pp.937-956
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• 2014

The MEMS structures usually are made from silicon; consideration of the viscoelastic effect in microbeams duo to the phenomena of silicon creep is necessary. Application of the fractional model of microbeams made from viscoelastic materials is studied in this paper. Quasi-static and dynamical responses of an electrically actuated viscoelastic microbeam are investigated. For this purpose, a nonlinear finite element formulation of viscoelastic beams in combination with the fractional derivative constitutive equations is elucidated. The four-parameter fractional derivative model is used to describe the constitutive equations. The electric force acting on the microbeam is introduced and numerical methods for solving the nonlinear algebraic equation of quasi-static response and nonlinear equation of motion of dynamical response are described. The deflected configurations of a microbeam for different purely DC voltages and the tip displacement of the microbeam under a combined DC and AC voltages are presented. The validity of the present analysis is confirmed by comparing the results with those of the corresponding cases available in the literature.

• Structural Engineering and Mechanics
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• v.35 no.4
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• pp.387-407
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• 2010

In this paper, using perturbation and Galerkin method, the response of a resonant viscoelastic microbeam to an electric actuation is obtained. The microbeam is under axial load and electrical load. It is assumed that midplane is stretched, when the beam is deflected. The equation of motion is derived using the Newton's second law. The viscoelastic model is taken to be the Kelvin-Voigt model. In the first section, the static deflection is obtained using the Galerkin method. Exact linear symmetric mode shape of a straight beam and its deflection function under constant transverse load are used as admissible functions. So, an analytical expression that describes the static deflection at all points is obtained. Comparing the result with previous research show that using deflection function as admissible function decreases the computation errors and previous calculations volume. In the second section, the response of a microbeam resonator system under primary and secondary resonance excitation has been obtained by analytical multiple scale perturbation method combined with the Galerkin method. It is shown, that a small amount of viscoelastic damping has an important effect and causes to decrease the maximum amplitude of response, and to shift the resonance frequency. Also, it shown, that an increase of the DC voltage, ratio of the air gap to the microbeam thickness, tensile axial load, would increase the effect of viscoelastic damping, and an increase of the compressive axial load would decrease the effect of viscoelastic damping.

• Steel and Composite Structures
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• v.32 no.6
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• pp.753-767
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• 2019

Vibration control in mechanical equipments is an important problem where unwanted vibrations are vanish or at least diminished. In this paper, free vibration active control of the porous sandwich piezoelectric polymeric nanocomposite microbeam with microsensor and microactuater layers are investigated. The aim of this research is to reduce amplitude of vibration in micro beam based on linear quadratic regulator (LQR). Modified couple stress theory (MCST) according to sinusoidal shear deformation theory is presented. The porous sandwich microbeam is rested on elastic foundation. The core and face sheet are made of porous and three-phase carbon nanotubes/resin/fiber nanocomposite materials. The equations of motion are extracted by Hamilton's principle and then Navier's type solution are employed for solving them. The governing equations of motion are written in space state form and linear quadratic regulator (LQR) is used for active control approach. The various parameters are conducted to investigate on the frequency response function (FRF) of the sandwich microbeam for vibration active control. The results indicate that the higher length scale to the thickness, the face sheet thickness to total thickness and the considering microsensor and microactutor significantly affect LQR and uncontrolled FRF. Also, the porosity coefficient increasing, Skempton coefficient and Winkler spring constant shift the frequency response to higher frequencies. The obtained results can be useful for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.