• 대한기계학회논문집
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• 제8권2호
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• pp.141-144
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• 1984

본 연구에서는 완전 역 피로응력(completely reversed fatgue stress)를 받는 타원 노치에서 균열 발생과 전파에 대한 이론 임계 피로 한도를 응력 세기 계수 개념 을 도입하여 임의의 재질과 임으의 타원 노치 형상에 대해서 적용할 수 있도록 유도하 며 그 결과는 기존 이론보다 Frost의 실험치에 더 잘 일치함을 보이고자 한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• 대한기계학회논문집A
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• 제21권5호
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• pp.842-849
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• 1997

The aim of this study is an investigation of the interaction of two micro hole defects affecting fatigue crack initation life and propagation behavior. The locatio of two micro hole defects was considered as an angle of alignment and the distance between the centers of two micro hole defects. The fatigue cracking behavior is experimented under bending. When micro defects are located close to each other, the fatigue crack initiation lives are varied with their relative locations. In the experiments, the area of local plastic strain strongly played a role in the fatigue crack initiation lives. Therefore we introduce a parameter which contains the plastic deformation area at stress concentrations and propose a fatigue crack initiation life prediction curve. In addition, the directions and propagation rates of fatigue cracks initiated at two micro hole defects are studied experimentally.

• 한국기계가공학회지
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• 제13권2호
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• pp.64-72
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• 2014

In the past, prism patterns have been linear triangular shapeswith a $90^{\circ}$ angle; however, new micro prism patterns having acute angles or obtuse angles have recently been the subject of demandin the display, lighting and photovoltaic industries. Micro-cutting experiments for micro-prism patterns having $60^{\circ}$, $90^{\circ}$, and $120^{\circ}$ angles on an electroplated Ni mold were performed and it was found in this study that the specific cutting resistance increased with a decrease in the tool angles (prism pattern angles). The cause of this variation had been thought to be the increase of the ploughing force due to tip rounding and the friction force due to the edge effect. However, the depth of the cut was large enough that it was possible to neglect these effects. Therefore, this study introduced the concept of representative stress of indentation. The measured stress was varied according to the indentation depth eventhoughthetestedspecimenswereidentical ; the varied stress was termed the representative stress. According to indentation theory, the strain that the Ni mold experienced increased with a decrease in the tool angle. Based on the stress-strain relationship, higher strain means higher stress and higher specific cutting resistance. Therefore, the specific cutting resistance was higher at smaller tool angles that had higher strain and stress.

• 분석과학
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• 제5권4호
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• pp.359-366
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• 1992

본 논문은 마이크로 Raman 분광분석법을 이용하여 국부적 열산화 후 실리콘 표면에 유입되는 스트레스를 평가한 것이다. 국부적 열산화 후 실리콘 표면에 유입되는 스트레스는 실리콘 산화막과 active 영역의 경계 부분에서 최대치를 나타내었다. Active 영역의 크기가 작아질수록 스트레스량은 증가하며, 이는 스트레스가 active 영역의 크기에 의존함을 보여 주는 것이다. 또한, active 영역이 $0.45{\mu}m$인 세 가지 소자 분리 공정, A, B, moB를 평가한 결과 moB 공정의 스트레스 값이 가장 작았으며, 새부리 효과도 가장 작았다.

• 전기전자학회논문지
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• 제1권1호
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• pp.1-10
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• 1997

It is well-known that rectangular bulk-Si sensors prepared by etch or epi etch-stop micromachining technology are already in practical use today, but the conventional bulk-Si sensor shows some drawbacks such as large chip size and limited applications as silicon sensor device is to be miniaturized. We consider a circular-shape SOI(Silicon-On-Insulator) micro-cavity technology to facilitate multiple sensors on very small chip, to make device easier to package than conventional sensor like pressure sensor and to provide very high over-pressure capability. This paper demonstrates the cross-functional results for stress analyses(targeting $5{\mu}m$ deflection and 100MPa stress as maximum at various applicable pressure ranges), for finding permissible diaphragm dimension by output sensitivity, and piezoresistive sensor theory from two-type SOI structures where the double SOI structure shows the most feasible deflection and small stress at various ambient pressures. Those results can be compared with the ones of circular-shape bulk-Si based sensor$^{[17]}. The SOI micro-cavity formed the sensors is promising to integrate with calibration, gain stage and controller unit plus high current/high voltage CMOS drivers onto monolithic chip.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.612-614
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• 1997

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.

• Structural Engineering and Mechanics
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• 제64권4호
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• pp.403-411
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• 2017

In this article, analytical solution for free vibration of micro composite laminated beam on elastic medium based on modified couple stress are presented. The surrounding elastic medium is modeled as the Winkler elastic foundation. The governing equations and boundary conditions are obtained by using the principle of minimum potential energy for EulerBernoulli beam. For investigating the effect of different parameters including material length scale, beam thickness, some numerical results on different cross ply laminated beams such as (90,0,90), (0,90,0), (90,90,90) and (0,0,0) are presented on elastic medium. Free vibration analysis of a simply supported beam is considered utilizing the Fourier series. Also, the fundamental frequency is obtained using the principle of Hamilton for four types of cross ply laminations with hinged-hinged boundary conditions and different beam theories. The fundamental frequency for different thin beam theories are investigated by increasing the slenderness ratio and various foundation coefficients. The results prove that the modified couple stress theory increases the natural frequency under the various foundation for free vibration of composite laminated micro beams.

• The Korean Journal of Ceramics
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• 제3권1호
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• pp.1-4
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• 1997

Diamond film (24$\mu\textrm{m}$) were prepared by Microwave Plasma Chemical Vapor Deposition method from a reactive CO/H$_2$ mixtures. Micro-Raman spectroscopy and micro-cathodoluminescence study were carried out along the crosssection and correlated to SEM observation. CL image of cross-section was also investigated. Peak position, FWHM of Raman spectrum were determined using Lorentzing fit. The stress in this sample is 0.4~0.7 GPa compressive stress, and along the distance the compressive stress reduced. The Raman peak broadening is dominated by phonon life time reduction at grain boundaries and defect sites. Defects and impurities were mainly present inside the film, not at Silicon/Diamond interface.

• 한국철도학회논문집
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• 제5권2호
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• pp.118-124
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• 2002

The failure probability of wheel beyond 10$\^$7/ cycles is achieved by the strengths-stress interference model for the evaluation of fatigue strength and reliability in the wheel, From plane bending fatigue test results, the fatigue life (N$\_$f/) for the smooth and 200㎛ holed specimens can be represented as $\sigma$$\_$a/ = 1326N$\_$f/$\^$-0.10/ and $\sigma$$\_$a/ = 2894N$\_$f/$\^$-0.18/. Respectively, fatigue strength of the wheel at beyond 10$\^$7/cycles was about 332 MPa. And, the fatigue strength for the specimen with a micro hole (d=200㎛) which simulated an inclusion on the wheel surface was about 235 MPa. Thus, a micro hole (d=200㎛) caused about 30% reduction of fatigue strength of the specimen. The failure probabilities for the smooth and micro-holed specimens, derived from the strength-stress interference model, are 0.0148% and 13.05%, respectively. The current finding suggests that at least 200 ㎛ sized inclusion, which might be produced during manufacturing process, will cause a critical effect on integrity of the railway vehicle.