• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.8
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• pp.81-87
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• 2020

A stable rotational-to-linear motion transformation structure using a driving mechanism with 2 degrees of freedom was developed for an orthogonal mechanism to prevent the interference of each axis in 2D motion. In this mechanism, a step motor was used for precise position control. This structure was developed to maneuver workparts in micro particle blast machining experiments. To determine the real-time performance of micro particle blast machining, the control, input, and output were operated simultaneously and precise position control was implemented, using a timer interrupt with multiple execution codes. The two step motors obtained precise position control by removing backlash with a ball-screw mechanism. The device has menu-type control codes for user-friendliness, and real-time sequence control was simultaneously adopted for user control input.

• Transactions on Electrical and Electronic Materials
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• v.7 no.1
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• pp.30-35
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• 2006

We have studied the motion of charged micro-particles that are immersed in a nematic liquid crystal (LC) and controlled by in-plane field. The LC is an anisotropic liquid such that the viscosity of the LC depends on flow direction, phase of the LC, and temperature, which affects the motion of the charged particles under the influence of electric field. This study shows that the motion of charged particles mainly depends on the applied voltage and the LC phase, but does not show any significant influence from the initial alignment of LC, although one may expect directional difference in drag force due to interaction between LC and particle. The viscosity changes due to temperature variations in nematic phase also show no signification influence on particle velocity when compared to the effect from varying in-plane field strength.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.312.1-312
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure rates of turn about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. (omitted)

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.659-661
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• 1997

An in-plane motion measurement method using $moir{\acute{e}}$ patterns by linear-gratings and cross-gratings, which can be used as micro inertial sensors, micro actuators, and micromachined scanning microscopes is demonstrated. A simple digital image processing method that calculates and analyzes the motion of microstructure from $moir{\acute{e}}$ patterns was developed. And using several grating structures fabricated by surface micromachining, we formed $moir{\acute{e}}$ patterns and analyzed the motion of microstructure.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• 연구논문집
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• s.33
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• pp.53-65
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• 2003

Electrostatic micro-motors can be divided into three classes: (i) salient type side drive motor, (ii) radial gap type wobble motor, (iii) axial gap type wobble motor. The working mechanism, torque evaluation, fabrication, and operational characteristics of each micro motors are compared. It is proved that axial gap type wobble motor has the bigger generating torque than that of the other type. The gear ratio of wobble motors increases the driving torque at the cost of a decreasing angular speed and decreases the friction because of the rolling motion instead of sliding at the bearing. Techniques for characterizing micro-motors performance are presented.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1060-1065
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• 2003

This paper contributes to development of a new chip mounting head system for flip chip. Recently, the LDM(Linear DC Motor) has been widely used, because it has particular merits than the rotary type motors. In this paper, we proposed a macro/micro positioning system for force control of a chip mounting system. In the proposed macro/micro system, the macro actuator provide the system with a gross motion while the micro device yields fine tuned motion to reduce the harmful impact force that occurs between very small sized electronic parts and PCB surface. In order to prove the effectiveness of the proposed macro/micro chip mounting system, we compared the proposed chip mounting head with the conventional chip mounting head equipped with a macro actuator only. A series of experiments were executed under the mounting conditions of various access velocities and PCB stiffness. As a result of this study, a satisfactory voice coil actuator as the micro actuator has been developed, and its performance meet well the specifications desired for the design of the chip mounting head system and show good correspondence between theoretical analysis and experimental results.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.158-163
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• 2001

Operators suffer much difficulty in manipulating micro/nano-sized objects without the assistance of human interfaces, due to the scaling effects in micro/nano world. This paper presents a micro manipulation system based on the teleoperation techniques which enables the operators to manipulate the objects with ease by transferring both human motion and manipulation skill to a micromanipulator. An experimental setup consisting of a micromanipulator operated under stereo-microscope with the help of intelligent user interface provides a tool that can be used to visualize and manipulate micro-sized 3D objects in a controlled manner. The key features of a micro manipulation system and control strategies using teleoperation techniques for handling micro objects are presented. Experimental results demonstrate the feasibility of this system in precisely controlling trapping and manipulation of micro objects based on teleoperation techniques.

• Journal of Institute of Control, Robotics and Systems
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• v.21 no.1
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• pp.1-6
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• 2015

This paper investigates the longitudinal flight dynamics and stability of flapping-wing micro air vehicles. Periodic external forces and moments due to the flapping motion characterize the dynamics of this system as NLTP (Non Linear Time Periodic). However, the averaging theorem can be applied to an NLTP system to obtain an NLTI (Non Linear Time Invariant) system which allows us to use a standard eigen value analysis to assess the stability of the system with linearization around a reference point. In this paper, we investigate the dynamics and stability of a hawkmoth-scale flapping-wing air vehicle by establishing an LTI (Linear Time Invariant) system model around a hovering condition. Also, a direct time integration of full nonlinear equations of motion of the flapping-wing micro air vehicle is conducted to see how the longitudinal flight dynamics appear in the time domain beyond the reference point, i.e. hovering condition. In the study, the flapping-wing air vehicle exhibited three distinct dynamic modes of motion in the longitudinal plane of motion: two stable subsidence modes and one unstable oscillatory mode. The unstable oscillatory mode is found to be a combination of a pitching velocity state and a forward/backward velocity state.