• KSTLE International Journal
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• 제7권1호
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• pp.22-26
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• 2006

A simple finite element analysis is performed to simulate the thermal characteristics of a micro sensor package with thin film heater embedded in the glass wall of a micro-channel. In this paper, Electric characteristics of ITO sputtered heater were presented in this study, which can be used as a map of heater design in the range of available system temperature. The effects of thermo-physical properties of materials, geometrical structure and boundary condition on the thermal performance are also investigated. Finally, the design of micro-flow induced thermal sensor that is capable of measuring fluid flow with a lower flow detection limit of approximately 24pL/s is presented.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.45-48
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• 2007

기존에 사용되는 피에조 타입의 센서는 추력의 측정 범위가 제한되어 있으므로 이를 개선하고자 레이져 변위측정기와 cantilever를 이용하여 변위 측정 장치를 개선하였고, 스테인레스 캐필러리를 이용하여 추력 모델을 만든 후 추력을 측정하였다. 이와 더불어 extrude shape의 노즐을 갖는 마이크로 추력 장치를 PMMA(Polymethyl methacrylate)를 이용하여 공정하였으며, 매니스커스의 형상 변화를 관찰하였다.

• 센서학회지
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• 제18권3호
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• 센서학회지
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• 제32권5호
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• pp.280-284
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• 2023

In this study, a prototype micro-scale photomask and microfluidic channel mold were fabricated using the thermal shrinkage of the polymer. A polystyrene (PS) sheet was used as the heat-shrink polymer, and the patterns of the photomask and microchannel are interdigitated electrodes. Patterns were formed on the PS sheets using a commercial laser printer. The contraction ratio of the PS sheet was approximately 60% at a temperature of 150 ℃, and the transmittance was reduced by approximately 0% at a wavelength of 365 nm. The microfluidic channel had a round shape. The proposed technique is simple, facile, and inexpensive for fabricating a micro-scale photomask and microfluidic channel mold and does not involve the use of any harmful materials. Thus, this technique is well-suited for fabricating diverse micro-scale patterns and channels for prototype devices, including sensors.

• 센서학회지
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• 제26권1호
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• pp.60-65
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• 2017

This paper describes the low noise and low power IC using the opamp sharing technique for the capacitive micro-sensor sensing platform. The proposed IC reduces noise using correlated double sampling (CDS) and reduces power consumption using the opamp sharing technique. The IC is designed to be fully programmable, and can be digitally controlled by serial peripheral interface (SPI). The power consumption and the integrated input referred noise are 1.02 mW from a 3.3 V supply voltage and $0.164aF_{RMS}$ with a bandwidth of 400 Hz. The capacitive sensitivity, the input-output linearity and the figure of merits (FoM) are 2.5 mV/fF, 2.46 %FSO, and 8.4, respectively.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권9호
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• pp.418-423
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• 2003

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• 센서학회지
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• 제3권3호
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• pp.22-27
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• 1994

마이크로 산소분압센서의 특성에 맞는, CMOS op-amp로 구성된 potentiostat 및 I-V converter용 op-amp를 설계하였다. 시뮬레이션 결과, 설계된 potentiostat는 $l.1k{\Omega}$의 낮은 출력저항을 나타냈으며, 산소분압센서의 등가회로와 연결한 경우 $-3{\sim}2.5V$범위의 전압을 선형적으로 인가할 수 있었고 안정한 주파수 특성을 보였다. 또한 I-V converter의 입력 저항은 약 $30{\Omega}$으로 작았으며 좋은 직선성을 나타내었다.

• 감성과학
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• 제25권4호
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• pp.45-52
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• 2022

최근 신체활동에 대해 인식하는 센서와 그 제품군에 대한 관심 및 수요가 증가하고 있다. 특히 유연하고 연신이 가능하며 사용자의 생체신호를 감지할 수 있는 웨어러블 소재에 대한 개발이 주목받고 있다. 본 연구에서는 소수성 소재에 Micro Needle을 통해 미세 구멍을 형성한 후 SWCNT 분산용액에 대한 함침 효율을 향상시키는 실험을 수행하였다. 본 연구에서는 구멍을 뚫지 않은 소재를 대조(control) 군으로 함침을 진행, 비교 분석하였다. 센서의 전기전도도를 평가하기 위해 Strain UTM (Universal Testing Machine, UTM, Dacell)과 저항을 측정하는 멀티미터(Keysight)를 이용해 센서를 인장했을 때의 센서의 전기전도도를 측정하였다. 또한 센서의 내구성을 평가하기 위해 시료별로 500회 인장을 진행한 후에 센서의 전기전도도를 평가하였다. 그 결과 Needling을 한 센서의 전기전도성이 Needling을 하지 않은 센서에 비해 최소 16배 이상 뛰어남을 알 수 있었다. 또한 센서의 초기 저항에 비해 게이지 팩터도 우수해 센서로서 좋은 성능을 확인할 수 있었다. 이를 통해 친수성 소재에 비해 물성이 뛰어나지만, 높은 표면장력 때문에 함침 효율이 좋지 않았던 소수성 소재의 함침 효율을 높여 신체의 움직임을 더 효과적으로 감지하고 내구성과 활용 가능성이 뛰어난 센서를 제작했다.

• 한국항공우주학회지
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• 제33권10호
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• pp.93-97
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• 2005

본 논문은 과학기술위성2호 핵심우주기술시험용 탑재체인 고 정밀 디지털 태양센서의 개발에 관한 것이다. 고 정밀 디지털 태양센서는 국내 최초의 디지털 태양센서로서 CMOS image sensor를 이용한다. FDSS는 광학부, FPGA(Field Programable Gate Array)부 및 MCU(Micro controller unit)부로 구성되어있다. 본 논문에서는 구경(Aperture)의 설계와 관련된 광학부의 광학특성 분석에 중점을 두어 기술하고자 한다. 또한 CMOS image sensor(CIS) 화소 면에 투사되는 태양광의 광학적 특성도 분석한다.