• Journal of Sensor Science and Technology
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• v.20 no.3
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• pp.187-192
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• 2011

Abrasive blaster is similar to sand blaster, and effectively removes hard and brittle materials. Exiting abrasive blaster has applied to rough working such as deburring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro abrasive blaster was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro blaster in MEMS process of glass and succeed in domestically producing complete micro blaster. Diameter of hole and width of line in this etching is 100 ${\mu}m$ ~ 1000 ${\mu}m$. Experimental results showed good performance in micro channel and hole in glass wafer. Therefore, this micro blaster could be effectively applied to the micro machining of semiconductor, micro PCR chip.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1997.10a
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• pp.37-42
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• 1997

This paper describes result of experiment of parameters affecting the micro hole drilling time, kind of assisting gas and it's pressure. The result reveals that parameter value of 0.08J, 20Hz, dwell time of 300 microseconds can be a good machining condition to make micro hole diameter range of 50-70${\mu}{\textrm}{m}$, Assistant gas such air, O2, Ar, N2 was adapted. Assistant gas of air makes heat affected zone enlarge due to burning of material, also it makes hole irregular and damage because of refusion stick to caused by chemical reaction with Al2O3 ceramic material. O2(99.9%) has good characteristic to get good drilling and smooth surface on pressure of 0.2kgf/$\textrm{cm}^2$, but it is expensive. Ar, N2 makes material burn and crack severely and proved to be an appropriate but, Ar was better than N2.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.560-563
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• 2004

Invar is a compound metal of Fe-Ni system and contain 36％ Ni. The most distinction characteristic of Invar is the coefficient of thermal expansion is 1.0 10$^{-6}$ /$^{\circ}C$. That is a tenth of general steel material. This low thermal expansion characteristic of Invar is applied to the missile, aircraft, monitor CRT and frontier display's shadow mask such as FED and OLED. The usage of the Invar shadow mask for display is increasing due to the requirement of larger size and flatness monitor. The Invar shadow mask is machined by two ways electro-forming and laser now. However the electro-forming takes a too long time and the laser machining is accompanied with Burr. In this study, PEMM(pulse electrochemical micro machining) is conducted to machine the micro hole to the Invar and 80${\mu}{\textrm}{m}$ hole was machined.

• Journal of Advanced Marine Engineering and Technology
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• v.18 no.4
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• pp.62-68
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• 1994

Recently, the trends toward reduction in size and weight of industrial products increased the application of micro hole for manufacturing gadgets of high precision and gave rise to a great deal of interest for micro hole drilling M/C. Quite a few research work is performed on micro drilling on domestic basis compared with the tendency of analyzing cutting mechanism, adaptive control, monitoring of generally available drills of diameter greater than 1mm. This study adresses the design, manufacturing and controlling a micro hole drilling M/C with the overload detection instrument and the step feed mechanism. Controlling and monitoring of the drilling process are acomplished on PC basis for more user interfaces and effectiveness. The test machine of the results of this research shows a good foundation for extending further micro hole machining technique.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.285-288
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• 2007

Numerical study of the influence of the boundary layer of micro-supersonic jet impinging on a flat plate with a hole was performed, to investigate the role of gas jet to eject melted materials from the cut zone in the laser machining. The detailed shock structures and the information of the mass flow rate through the hole were compared to the results of the previous study, in which the effects of boundary layer inside nozzle was not accounted. It was found that the boundary layer inside the micro- nozzle introduced stronger Mach disc over the machining zone, and thus that the mass flow rate through the hole decreased.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.2
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• pp.93-100
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• 2009

Characteristics of micro-sonic/supersonic axi-symmetric jet impinging on a flat plate with a pre-drilled hole were both experimentally and numerically studied, to observe the role of assist-gas jet to eject melted materials from the cut zone in the laser machining. For various Mach numbers of the nozzle and the total pressures of the assist gas, detailed impinging jet flow structures over the plate and the variations of mass flux through the pre-drilled hole were observed. It was found that the present experimental and numerical results show a good agreement, which proves the accountability of the present work. From the present study, it was also observed that the mass flow rate through the hole was closely related with the total pressure loss caused by the Mach disc on the work piece, and that supersonic nozzle could perform more efficient roles as blowing the assist-gas jet in the laser machining, as compared to sonic nozzles.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.2
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• pp.75-80
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• 2013

Cathode is an essential component used in plasma etching process which is to make micro pattern on the silicon wafer. The currently used cathodes produce particles at the high temperature plasma etching process. To overcome this problem, a 'Silicon Only Cathode' was developed. This 'Silicon Only Cathode' requires manufacturing process changes due to the change of shapes, material features, and machining characteristics of work materials. This research investigates the small hole drilling process. The conclusion is that PCD drills with twist angles of $20^{\circ}$ and $25^{\circ}$ were tested for small hole drilling and the experimental results indicate that the drill with $25^{\circ}$ twist angle drill causes less thrust force.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.873-877
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• 2005

The burr of micro drilling and micro cutting on thin metal film is a major obstacle to mass production for micro PCB boards in micro technologies of personal computing and telecom explosion. As the burr affects on the assembling process, it is necessary to study continuously on control or elimination of the burr. In order to get higher valued products, it is also needed to competitive techniques with the high resolution. In this paper, we studied experimentally the burr generation that when it is processed on the copper foil by laser in micro-hole machining. Unlike mechanical machining the burr produced on substrate is a resultants of melt and re-solidification of a melten metal which was heated and treated by laser. And higher laser energy increases the size of burr. Therefor in micro-drilling with laser, it is difficult to reduce the effects of burr for very thin metal sheets. We investigated the stale of the burr and analyzed the laser ablation Cu micro machining with respect to laser intensity and processing time.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2001.05a
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• pp.213-216
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• 2001

A micro hole punching system was developed and micro holes of 100m in diameter were successfully made on brass sheets of loom in thickness. A micro punch made of tungsten carbide was designed to withstand the punch load, considering the buckling and the bending moment due to possible misalignment error. The punch was fabricated by the grinding process with diamond wheel. The die was designed considering the punch load and fabricated by micro electrodischarge machining process. In this system the stripper is designed to guide punch tip to minimize the possible misalignment. The punch was installed on a vertical stepper and the die was mounted on an X-Y translation unit. The precision motion controller controlled all motions of the micro hole punching system. In this study technical difficulties and solutions in the micro hole punching process were also discussed.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.1
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• pp.55-62
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• 2004

This paper addresses the method for figuring out the hole diameter on the mask containing the information about machining depth. With this mask e micro machining is carried out with a simple 2D movement of the mask. Based on e suggested method excimer laser ablation processes are modeled and determination of the optimal laser ablation conditions such as hole diameter, step size, mask movement velocity, etc. is completed. The excimer laser ablation simulation for creating 3D micro lens is carried out by employing determined ablation conditions to prove verification of the method. The results from simulation illustrated the average error of 140nm and e relative error of 2％.