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http://dx.doi.org/10.5369/JSST.2011.20.3.187

Etching Characteristics of Micro Blaster for MEMS Applications  

Cho, Chan-Seob (School of Electrical Engineering, Kyungpook National University)
Bae, Ig-Soon (College of Engineering, Graduate School, Kyungpook National University)
Lee, Jong-Hyun (School of Electronics Engineering, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.20, no.3, 2011 , pp. 187-192 More about this Journal
Abstract
Abrasive blaster is similar to sand blaster, and effectively removes hard and brittle materials. Exiting abrasive blaster has applied to rough working such as deburring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro abrasive blaster was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro blaster in MEMS process of glass and succeed in domestically producing complete micro blaster. Diameter of hole and width of line in this etching is 100 ${\mu}m$ ~ 1000 ${\mu}m$. Experimental results showed good performance in micro channel and hole in glass wafer. Therefore, this micro blaster could be effectively applied to the micro machining of semiconductor, micro PCR chip.
Keywords
MEMS; Micro-blaster; DFR(Dry Film Resist); Micro PCR chip;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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1 S. Schlautmann, H. Wensink, R. Schasfoort, M. Elwenspoek, and A. van den Berg, "Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors", J. Micromech. Microeng., vol. 11, pp. 386-389, 2001.   DOI   ScienceOn
2 Jong Soon Choi, Keong Ho Park, and Dong Sam Park, "Micro grooving of glass using abrasive jet machining", Journal of the Korean Society of Precision Engineering, vol. 18, no. 10, pp.178-183, 2001   과학기술학회마을
3 Y. H. Lee, J. H. Jo, S. W. Kim, D. Y. Kong, C. T. Seo, C. S. Cho, and J. H. Lee, "A study on improving the surface morphology of recycled wafer for solar cells using micro_blaster", J. Kor. Sensors Soc., vol. 19, no. 4, pp. 291-296, 2010.
4 L.J. Kricka, "Microchips, microarrays, biochips and nanochips: personal laboratories for the 21st century", Clinica Chimica Acta, vol. 307, pp. 219-223, 2001.   DOI   ScienceOn
5 J.Y. Lee, J.J.Kim, and T.H. Park, "Miniaturization of polymerase chain reaction", Biotechnology and Bioprocess Engineering, vol. 8, pp. 213-220, 2003.   과학기술학회마을   DOI   ScienceOn
6 P. J. Slikkerveer. P. C. P. Bouten, and F. C. M. de Haas, "High quality mechanical etching of brittle materials by powder blasting", Sensors and Actuators, vol. 85, pp. 296-303, 2000.   DOI   ScienceOn
7 Henk Wensink, U. W. Berenshot, Henri V. Jan seu, and Miko C. Elwenspoek, "High resolution powder blast micromaching", Proceedings of the IEEE Micro electro Mechanical Sustenus(MEMS) 2000, pp. 769-774, 2000.   DOI
8 P. J. Slikkerveer, M. H. A. van Dongen, and F. J. Touwslager," Erosion of elastomeric protective coatings", Wear, vol. 236, pp. 189-198, 1999.   DOI   ScienceOn
9 F. H. in't veld and P. J. Slikkerveer," Towards prediction of flux effects in powder blasting nozzles", Wear, vol. 215, pp. 131-136, 1998.   DOI   ScienceOn
10 Henk Wensink and Miko C. Elwenspoek," A closer look at the ductile-brittle transition in solid particle erosion", Wear, vol. 253, pp. 1035-1043, 2002.   DOI   ScienceOn
11 P. J. Slikkerveer and F.H. in't Veld," Model for patterned erosion"Wear, vol. 233-235, pp. 377-386, 1999.   DOI   ScienceOn
12 G. G. P. van Gorkom, "Introduction to Zeus displays", Philips Journal of Research, vol. 50, Issues 3-4, pp. 269-280, 1996.   DOI   ScienceOn
13 Kruusing, Arvi, Leppavuori, Seppo, Uusimaki, Abtti, Uusimaki, and Matti, "Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining", Symposium on Design. Test, and Microfabrication of MEMS and MOEMS, vol. 3680, pp. 870, 1999.
14 H. J. Ligthart, P. J. Slikkerveer, F. H. In't Veld1, P. H. W. Swinkels and M. H. Zonneveld, "Glass and glass machining in Zeus panels", Philips Journal of Research, vol. 50, Issues 3-4, pp. 475-499, 1996.   DOI   ScienceOn