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Micromachining Modelling and Simulation for Microlens Using Excimer Laser  

최경현 (제주대학교 기계공학부)
배창현 (부산대학교 지능기계공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.13, no.1, 2004 , pp. 55-62 More about this Journal
Abstract
This paper addresses the method for figuring out the hole diameter on the mask containing the information about machining depth. With this mask e micro machining is carried out with a simple 2D movement of the mask. Based on e suggested method excimer laser ablation processes are modeled and determination of the optimal laser ablation conditions such as hole diameter, step size, mask movement velocity, etc. is completed. The excimer laser ablation simulation for creating 3D micro lens is carried out by employing determined ablation conditions to prove verification of the method. The results from simulation illustrated the average error of 140nm and e relative error of 2％.
Keywords
Micro Machining; MEMS; Excimer Laser;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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