• JSTS:Journal of Semiconductor Technology and Science
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• 제14권6호
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• pp.733-740
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• 2014

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.1992-1994
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• 2005

In this study, Bragg reflector was formed as tungsten(W) and $SiO_2$ deposited by RF magnetron sputtering according to variable conditions of RF power and working pressure to apply to the SMR type FBAR device, one of the next generation mobile communication devices. The micro-structural properties such as a crystal orientation, roughness and micro- structure were measured by XRD, AFM and SEM and the best condition of Bragg reflector was elicited with analyzing that results of the thin films about each conditions. Finally, FBAR device was fabricated with applying the Bragg reflector was formed on the best condition and measured the resonance properties and compared other research and considered it.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.528-531
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• 2000

Deposition of PZT with UV laser ablatio was applied for realization of thin film sensors and actuators. Deposition rate of more than 20nm/min was attained by pulsed KrF excimer laser deposition, which is fairly better than those obtained by the other methods. Perovskite phase was obtained at room temperature deposition with Fast Atom Beam(FAB) treatment and annealing. Smart MEMS(Micro electro-mechanical system) is now a suject of interest in the field of micro optical devices, micro pumps, AFM cantilever devices etc. It can be fabricated by deposition of PZT thin films and micromachining. PZT films of more than 1 micron thickness is difficult to obtain by conventional methods. This is the reason why we applied excimer laser ablation for thin film deposition. The remanent polarization Pr of 700nm PZT thin film was measured, and the relative dielectric constant was determined to about 900 and the dielectric loss tangent was also measured to be about 0.04. XRD analysis shows that, after annealing at 650 degrees C in 1 hour, the perovskite structure would be formed with some amount of pyrochlore phase, as is the case of the annealing at 750 degrees C in 1 hour.

• 대한전자공학회논문지
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• 제14권6호
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• pp.6-9
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• 1977

범용의 컴퓨터언어틀 정의하고 이 언어의 수행에 적합한 컴퓨터 architecture를 계시하였다. 이 architecture는 마이크로프로그램기법을 이용하며 이의 특징은 마이크로모듈 swapping의 필요성을 줄이므로서 이에 소용되는 시간을 절약할 수 있는 점과, 원하는 마이코로모듈이 제어 기억장치에 부재시에도 프로그램 수행이 가능한 점이다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.648-650
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• 2008

We used micro-contact printing for source and drain electrodes of OTFTs. The proper solvent of Ag paste and baking temperature were extracted for PVP gate dielectric and pentacene semiconductor. The mobility was 0.025 cm2/V.sec and on/off ratio was $2{\times}10^5$.

• 대한전자공학회논문지
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• 제27권6호
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• pp.879-885
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• 1990

The geometrical algorithm for generating a 3-phase SPWM signal for VVVF (Variable Voltage, Variable Frequency) inverter drives is proposed. In this techniques, it is suitable for micro-processor based implementation since the pulsewiths are computable in real time from simple analytic expressions. System hardware consists of the inverter circuit and the 3-phase SPWM signal generating circuit. The inverter circuit is a 3-phase SPWM signal generating circuit is single board micro-processor consisting of Z-80A CPU, EPROMXI, CTC, PIO. The method of controlling VVVF at the inverter output is discussed here.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 추계학술대회 논문집 전기기기 및 에너지변환시스템부문
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• pp.27-29
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• 2002

In this paper, we deals with a torque measurement method of micro motors having very small torque values. The commercial motor torque dynamometers are examined, and the performance of a prototype microtorque measurement system is investigated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.119-120
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• 2011

• Journal of Power Electronics
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• 제15권5호
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• pp.1318-1328
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• 2015

The photovoltaic (PV) power conditioning system for small-scale applications has gained significant interest in the past few decades. However, the standalone mode of operation has been rarely approached. This paper presents a two-stage multi-level micro-inverter topology that considers the different operation modes. A multi-output flyback converter provides both the DC-Link voltage balancing for the multi-level inverter side and maximum power point tracking control in grid connection mode in the PV stage. A modified H-bridge multi-level inverter topology is included for the AC output stage. The multi-level inverter lowers the total harmonic distortion and overall ratings of the power semiconductor switches. The proposed micro-inverter topology can help to decrease the size and cost of the PV system. Transient analysis and controller design of this micro-inverter have been proposed for stand-alone and grid-connected modes. Finally, the system performance was verified using a 120 W hardware prototype.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.15-18
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• 2005

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra-precision aspheric surface lens increases higher. To enhance the precision and productivity of ultra precision aspheric surface micro lens, The development of ultra-precision grinding system and manufacturing properties for the aspheric surface micro lens are described. In the work reported in this paper, and ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the surface roughness and profiles accuracy. And this paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. It results was that a form accuracy of $3\;{\mu}m$ P-V and a surface roughness of $0.1\;{\mu}m\;R_{max}$.