• Title/Summary/Keyword: metrology

Search Result 723, Processing Time 0.026 seconds

Establishment of a National Primary Inductance Standard Unit

  • Kim Han Jun;Lee Rae Duk;Semenov Yu. P.;Han Sang Ok
    • KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
    • /
    • v.5B no.3
    • /
    • pp.283-288
    • /
    • 2005
  • A portable primary inductance standard set that includes a Maxwell-Wien bridge and a 10 mH standard inductor installed in a thermostat has been developed at KRISS. Two auxiliary resistance capacitance networks (analogous to a 'Wagner ground') provide excellent stability of the bridge balance and impose less strict requirements on the components of these networks. Removable capacitance and ac-dc resistance standards used in the bridge arms made it possible to reproduce 10 mH and 100 mH inductance values in the frequency range of 500 Hz to 3 kHz. From investigations of this standard and preliminary comparison with VNIIM (D. I. Mendeleyev Institute for Metrology), the results have demonstrated that the bridge can be used as a part of the transportable inductance standard with a measurement uncertainty within (1-3) $\mu$H/H at frequencies of 1 kHz and 1.6 kHz. The application of the bridge as a constituent part of the transportable standard gives us an opportunity to eliminate the influence of the standard inductors.

An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method

  • Kang, Jeon-Hong;Ying, Gao;Cheng, Yuh-Chuan;Kim, Chang-Soo;Lee, Sang-Hwa;Yu, Kwang-Min
    • Journal of Electrical Engineering and Technology
    • /
    • v.10 no.1
    • /
    • pp.325-330
    • /
    • 2015
  • With approval from the Asia Pacific Metrology Program Working Group on Materials Metrology (APMP WGMM), an international comparison for sheet resistance standards for silicon wafers was firstly conducted among Korea Research Institute of Standards and Science (KRISS) in Korea, CMS/ITRI in Taiwan, and NIM in China, which are national metrology institutes (NMIs), from August 2011 to January 2012. The sheet resistance values of the standards are $10{\Omega}$, $100{\Omega}$, and $1000{\Omega}$; the measurement was conducted in sequence at KRISS, CMS/ITRI, NIM, and KRISS again using the four-point probe method with single and dual configuration techniques. The reference value for the measurement results of the three NMIs was obtained through averaging the values of the three results for each sheet resistance range. The differences between the reference value and the measured values is within 0.22% for $10{\Omega}$, 0.17% for $100{\Omega}$, and 0.12% for $1000{\Omega}$. Therefore, the international consistency for conducting sheet resistance measurements is confirmed within 0.22% through the APMP WGMM approved comparison.

Estimation of Measurement Uncertainty in Evaluation of Tensile Properties (인장 물성 측정 불확도 평가)

  • Huh, Y.H.;Lee, H.M.;Kim, D.J.;Park, J.S.
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.34 no.1
    • /
    • pp.73-78
    • /
    • 2010
  • Estimation of tensile properties measurement uncertainty of material was carried out. Sources of uncertainty affecting the measurement of tensile properties were classified and analyzed. The models for uncertainty evaluation of measurands to be determined from tensile test, such as elastic modulus, yield strength and tensile strength, were suggested and derived from the mathematical relations, corresponding to the respective measurands, and the measuring quantities by calculating each sensitivity coefficient of the quantities. Based on these models, the uncertainty of the tensile properties was evaluated from the experimental data of SUS316LN determined according to ISO 6892.

Statistical Analysis on the Temperature Dependence and Long-Term Change of Relative Humidity Sensors (상대습도계의 온도 의존성과 경년변화의 통계적 분석)

  • Kim, Jong Chul;Choi, Byung Il;Woo, Sangbong;Yang, Inseok
    • Journal of Sensor Science and Technology
    • /
    • v.21 no.6
    • /
    • pp.420-424
    • /
    • 2012
  • We have investigated temperature dependence and long-term change of humidity measurement from 32 relative humidity sensors. The readings of the humidity sensors depended not only the reference humidity, but also temperature of the chamber. Approximately, the temperature dependence of the humidity sensor in average was 0.05 %R.H./$^{\circ}C$ in the temperature range from $5^{\circ}C$ to $55^{\circ}C$. For humidity sensors that have an internal temperature compensation circuit, the resulting temperature dependence was weaker by 20%. It should be also noted that for the humidity sensors used in this work underwent ${\pm}3$ %R.H. change per year for level of confidence of 95%. The users of relative humidity sensors may refer this value as a minimum change when they set the calibration interval of the humidity sensors.

Estimating the Reliability of Virtual Metrology Predictions in Semiconductor Manufacturing : A Novelty Detection-based Approach (이상치 탐지 방법론을 활용한 반도체 가상 계측 결과의 신뢰도 추정)

  • Kang, Pil-Sung;Kim, Dong-Il;Lee, Seung-Kyung;Doh, Seung-Yong;Cho, Sung-Zoon
    • Journal of Korean Institute of Industrial Engineers
    • /
    • v.38 no.1
    • /
    • pp.46-56
    • /
    • 2012
  • The purpose of virtual metrology (VM) in semiconductor manufacturing is to predict every wafer's metrological values based on its process equipment data without an actual metrology. In this paper, we propose novelty detection-based reliability estimation models for VM in order to support flexible utilization of VM results. Because the proposed model can not only estimate the reliability of VM, but also identify suspicious process variables lowering the reliability, quality control actions can be taken selectively based on the reliance level and its causes. Based on the preliminary experimental results with actual semiconductor manufacturing process data, our models can successfully give a high reliance level to the wafers with small prediction errors and a low reliance level to the wafers with large prediction errors. In addition, our proposed model can give more detailed information by identifying the critical process variables and their relative impacts on the low reliability.

Development of Fiber Optic BOTDA Sensor for Intrusion Detection (침입탐지를 위한 광섬유 BOTDA 센서의 개발)

  • Kwon, Il-Bum;Kim, Chi-Yeop;Choi, Man-Yong;Yu, Jae-Wang
    • Journal of Sensor Science and Technology
    • /
    • v.10 no.3
    • /
    • pp.163-172
    • /
    • 2001
  • Fiber optic BOTDA (Brillouin Optical Time Domain Analysis) sensor was developed to be able to detect intrusion effect through several ten kilometer optical fiber. Fiber optic BOTDA sensor was constructed with 1 laser diode and 2 electro-optic modulators. The intrusion detection experiment was peformed by the strain inducing set-up installed on an optical table to simulating an intrusion effect. In the result of this experiment, the intrusion effect was well detected as the distance resolution of 3 m through the fiber length of about 4.81 km during 1.5 seconds.

  • PDF

Development of a 3.5 mm Coaxial Microcalorimeter for Microwave Power Standards (3.5 mm 동축형 미소열량계 개발과 전자파전력 측정표준 확립)

  • Kwon, Jae-Yong;Kim, Jeong-Hwan;Kang, Tae-Weon
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.20 no.9
    • /
    • pp.989-996
    • /
    • 2009
  • RF and microwave power is a basic quantity in electromagnetic metrology which linked directly to major electro-magnetic quantities such as attenuation, RF voltage, antenna characteristics and field strength. This paper deals with a power meter and power sensor with associated theory for RF and microwave power measurement. We study the theory and the key aspects in design of a 3.5 mm coaxial microcalorimeter which works from 50 MHz to 26.5 GHz as a primary microwave power standard.

Femtosecond laser induced shock generation and its application (펨토초 레이저 유발 shock 형성 및 그 응용)

  • Jeoung, Sae Chae;Lee, Heung Soon;Sidhu, M.S.;Moon, Heh-Young
    • Laser Solutions
    • /
    • v.17 no.4
    • /
    • pp.1-6
    • /
    • 2014
  • Femtosecond laser induced shock generation in water and vitreous humor of enucleated porcine eyeball was investigated. When focusing the femtosecond laser into the liquid mediums, the acoustic waves with a frequency of about 15.6kHz could be observed by using wide-band microphone. The amplitude of the acoustic signals from water has attained a maximum under a laser power of about 5mW. Further increment of the power results in a decrement of the acoustic signals due to nonlinear optical process including filamentation of laser beam. We have further investigated the effect of femtosecond laser induced acoustic waves by applying the laser pulse into enucleated porcine eyeball. The comparative studies on both healthy and diseased eyeballs led us propose that the femtosecond laser pulses could be utilized as a novel tools for treatment of partially detached retina layers from their choroid structures.

  • PDF

Evaluation of Daily Jump Compensation Methods for GPS Carrier Phase Data

  • Lee, Young Kyu;Yang, Sung-Hoon;Lee, Chang Bok;Lee, Jong Koo
    • Journal of Positioning, Navigation, and Timing
    • /
    • v.4 no.1
    • /
    • pp.25-31
    • /
    • 2015
  • In this paper, we described the timing-offset comparison results between various daily jump compensation methods for GPS carrier phase (CP) measurement data. For the performance comparison, we used about 70 days GPS measurement data obtained from two GPS geodetic receivers which share the reference 1 PPS and RF signals and closely located in each other within a few meters. From the experiment results, the followings were observed. First, daily jumps existed in CP measurements depend on not only the environment but also the receiver which will make a full compensation be very hard or impossible. Second, clock bias can be occurred in the case of using a simple compensation with accumulation of daily jumps but it could be used in a short-period frequency comparison campaign (less than about 7 days) despite of its drawback.