• Title/Summary/Keyword: mechanical abrasion

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Effects of Temperature on Removal Rate in Cu CMP (Cu CMP에서 온도가 재료 제거율에 미치는 영향)

  • Park, In-Ho;Lee, Da-Sol;Jeong, Seon-ho;Jeong, Hae-do
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.17 no.6
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    • pp.91-97
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    • 2018
  • Chemical mechanical polishing(CMP) realizes a surface planarity through combined mechanical and chemical means. In CMP process, Preston equation is known as one of the most general approximation of the removal rate. Effects of pressure and relative speed on the mechanical property of Cu CMP has been investigated. On the other hand, The amount of abrasion also increased with changes in pressure and speed, resulting in a proportional increase of temperature during CMP. Especially this temperature is an important factor to change chemical reaction in a Cu CMP. However, when the slurry temperature became higher than $70^{\circ}C$, the removal rate went lower due to abrasives aggregation and scratching occurred on the Cu film. Therefore, it was found that the slurry temperature should not exceed $70^{\circ}C$ during Cu CMP. Finally, authors could increase the pressure, speed and slurry temperature up to a ceratin level to improve the removal rate without surface defects.

Durability Evaluation of Stainless Steel Conductive Yarn under Various Sewing Method by Repeated Strain and Abrasion Test (반복신장 및 마모강도시험을 통한 봉제방법에 따른 스테인리스 스틸 전도사의 내구성 평가)

  • Jung, Imjoo;Lee, Sunhee
    • Journal of the Korean Society of Clothing and Textiles
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    • v.42 no.3
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    • pp.474-485
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    • 2018
  • Smart sensors and connected devices have changed the concept of garments along with IT technology convergent garments that transform the performance of basic functions. Various types of products have been researched and developed due to the increased interest in smart clothing; in addition, studies based on physical and mechanical properties have also been actively studied to improve accuracy and reliability. This study represents a basic study for the development of smart textiles based on motion recognition for the surfing practice of beginners interested in IT convergence type. A physical durability evaluation of conductive yarn according to sewing method was later carried out. This study is a conditional specimen sewn with cotton lower thread and 100mm pattern length based on the results of previous studies. The durability of the conductive yarn according to the sewing method was evaluated according to the sewing method. Durability was evaluated by two kinds of repeated strain and abrasion tests. The specimen with applied cotton in a lower thread zigzag pattern 2mm stitch size 100mm stitch length was shown to have the most suitable durability for smart textile.

Effect of fly ash and plastic waste on mechanical and durability properties of concrete

  • Paliwal, Gopal;Maru, Savita
    • Advances in concrete construction
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    • v.5 no.6
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    • pp.575-586
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    • 2017
  • The disposal of polythene waste and fly ash is causing serious threat to the environment. Aim of this study is to decrease environmental pollution by using polythene waste and fly ash in concrete. In this study, cement was partially replaced with 0%, 5%, 10%, 15% and 20% fly ash (by weight) and plastic waste was added in shredded form at 0.6% by weight of concrete. The specimens were prepared for the concrete mix of M25 grade and water to cementitious material ratio (w/c) was maintained as 0.45. Fresh concrete property like workability was examined during casting the specimens. Hardened properties were found out by carrying out the experimental work on cubes, cylinders and beams which were cast in laboratory and their behavior under test were observed at 7 & 28 days for compressive strength and at 28 days for density, flexural strength, dynamic modulus of elasticity, abrasion resistance, water permeability and impact resistance. Overall results of this study show that addition of 0.6% (by weight of the concrete) plastic waste with 10% (by weight of cement) replacement of cement by fly ash result an improvement in properties of the concrete than conventional mix.

Discrete Element Method for Defining the Dynamic Behavior and Abrasion of Gravel in Mixer Trucks during Mixing and Discharging (이산 요소법을 이용한 골재 입자의 혼합 및 배출 시 골재 거동 및 강판 마모에 관한 연구)

  • Ryu, Seung-Hun;Woo, Ho-Kil
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.12
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    • pp.34-41
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    • 2020
  • Ready-mixed concrete is unconsolidated concrete typically transported to construction sites by using mixer trucks. A proper rotation of concrete is necessary to prevent its solidification in mixer trucks during transport: in accordance with the manufacturing method and quality inspection prescribed in KSF4009, this movement is maintained after the manufacturing of concrete in professional production plants and the addition of water, solid materials, and admixtures. Unfortunately, mixer truck parts wear out over long periods of time. In order to improve the wear resistance of the main part of mixer trucks, we used a steel plate with good wear resistance or partially added a reinforcement plate. In this study, we first tested the properties of concrete (as required for the DEM), and then carried out mixing and discharge simulations to define the actual operating conditions of mixer trucks. For each condition, we calculated the amount and location of wear. The reliability of our results was finally verified by comparing them with the measurement values. Overall, this study provided basic data for an optimal design of mixer trucks: one that would reduce the vehicles' weight and production costs.

Effect of Citric Acid in Cu Chemical Mechanical Planarization Slurry on Frictional Characteristics and Step Height Reduction of Cu Pattern

  • Lee, Hyunseop
    • Tribology and Lubricants
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    • v.34 no.6
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    • pp.226-234
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    • 2018
  • Copper chemical mechanical planarization (CMP) has become a key process in integrated circuit (IC) technology. The results of copper CMP depend not only on the mechanical abrasion, but also on the slurry chemistry. The slurry used for Cu CMP is known to have greater chemical reactivity than mechanical material removal. The Cu CMP slurry is composed of abrasive particles, an oxidizing agent, a complexing agent, and a corrosion inhibitor. Citric acid can be used as the complexing agent in Cu CMP slurries, and is widely used for post-CMP cleaning. Although many studies have investigated the effect of citric acid on Cu CMP, no studies have yet been conducted on the interfacial friction characteristics and step height reduction in CMP patterns. In this study, the effect of citric acid on the friction characteristics and step height reduction in a copper wafer with varying pattern densities during CMP are investigated. The prepared slurry consists of citric acid ($C_6H_8O_7$), hydrogen peroxide ($H_2O_2$), and colloidal silica. The friction force is found to depend on the concentration of citric acid in the copper CMP slurry. The step heights of the patterns decrease rapidly with decreasing citric acid concentration in the copper CMP slurry. The step height of the copper pattern decreases more slowly in high-density regions than in low-density regions.

A experimental study about plasma ion treatment to improve hardness of electro-polished surface (전해연마면의 표면경도 향상을 위한 플라즈마 이온질화 처리법에 관한 실험적 연구)

  • Kim, Jin-Beom;Hong, Pil-Gi;Seo, Tae-Il;Son, Chang-Woo
    • Design & Manufacturing
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    • v.13 no.1
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    • pp.13-18
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    • 2019
  • The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.

Study On Effect of Fe Density on Electrolyte Exfoliation of Chromium Plating Layer (전해액의 Fe 농도에 의한 크롬도금 탈락 연구)

  • Park, Jin-Saeng
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.39 no.12
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    • pp.1297-1303
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    • 2015
  • The internal chromium plating of a long-axis tube is widely used in military and industrial application, with the thick hard plating formed using a mixed solution of Chromium acid and catalytic $H_2SO_4$. A large-caliber gun can endure a high explosive force as a result of the increased stiffness and wear resistance provided by this internal hard chromium surface. The internal chromium layer of a tube is prone to exfoliation caused by the high kinetic energy of the projectile and high pressure of the explosion. Therefore, we reviewed the plating process. Chromium plating comprises many steps, including the removal of Grease, water cleaning, electrolytic abrasion, etching, plating, water cleaning, and hydrogen brittleness removal. The exfoliated chromium plating layer is affected by the adhesion property of the plating. In particular, the Fe concentration of the electrolyte affects the adhesion property. The optimum Fe concentration for effectively suppressing the exfoliation of the plating layer was established by using a scanning electron microscope to determine the surface roughness, and the effectiveness was proved in an adhesion test, etc.

A Study on Friction-induced Surface Fracture Behaviors of Carboxylic Acid Modified Styrenic Thermoplastic Elastomer as Additives (첨가제에 따른 변성 스티렌계 열가소성 엘라스토머의 마찰에 의한 표면 파괴 거동 연구)

  • Jeon, Jun-Ha;Park, Sang-Min;Lee, Jin- Hyok;Um, Gi-Yong
    • Journal of Adhesion and Interface
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    • v.16 no.3
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    • pp.95-100
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    • 2015
  • In this work, we observed the effect of silica, zinc oxide, zinc ion coated silica on carboxylic acid modified styrenic thermoplastic elastomer (m-TPS) film for friction-induced surface fracture. m-TPS film added general silica showed poor mechanical properties, anti-abrasion and friction-induced surface fracture, caused by strong filler-filler interaction of silica. In case of m-TPS films added zinc oxide or zinc ion coated silica, mechanical properties, anti-abrasion and friction-induced surface fracture were improved due to forming ionic cluster between carboxylic acid group of m-TPS and zinc ion. Ionic cluster were confirmed by FT-IR analysis that observed zinc carboxylated group stretch peak at $1550{\sim}1650cm^{-1}$.

Shear bond strength of composite resin to high performance polymer PEKK according to surface treatments and bonding materials

  • Lee, Ki-Sun;Shin, Myoung-Sik;Lee, Jeong-Yol;Ryu, Jae-Jun;Shin, Sang-Wan
    • The Journal of Advanced Prosthodontics
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    • v.9 no.5
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    • pp.350-357
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    • 2017
  • PURPOSE. The object of the present study was to evaluate the shear bonding strength of composite to PEKK by applying several methods of surface treatment associated with various bonding materials. MATERIALS AND METHODS. One hundred and fifty PEKK specimens were assigned randomly to fifteen groups (n = 10) with the combination of three different surface treatments (95% sulfuric acid etching, airborne abrasion with $50{\mu}m$ alumina, and airborne abrasion with $110{\mu}m$ silica-coating alumina) and five different bonding materials (Luxatemp Glaze & Bond, Visio.link, All-Bond Universal, Single Bond Universal, and Monobond Plus with Heliobond). After surface treatment, surface roughness and contact angles were examined. Topography modifications after surface treatment were assessed with scanning electron microscopy. Resin composite was mounted on each specimen and then subjected to shear bond strength (SBS) test. SBS data were analyzed statistically using two-way ANOVA, and post-hoc Tukey's test (P<.05). RESULTS. Regardless of bonding materials, mechanical surface treatment groups yielded significantly higher shear bonding strength values than chemical surface treatment groups. Unlike other adhesives, MDP and silane containing self-etching universal adhesive (Single Bond Universal) showed an effective shear bonding strength regardless of surface treatment method. CONCLUSION. Mechanical surface treatment behaves better in terms of PEKK bonding. In addition, self-etching universal adhesive (Single Bond Universal) can be an alternative bonding material to PEKK irrespective of surface treatment method.

Performance Tests of Epoxy-coated Reinforcing Bars : Mechanical Properties (에폭시 도막 철근의 기계적 성능에 관한 실험적 연구)

  • 최완철;김채훈;신영수;홍기섭
    • Magazine of the Korea Concrete Institute
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    • v.6 no.3
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    • pp.173-179
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    • 1994
  • Test results to evaluate the rr~echanical properties of epoxy-coated reinforcing bars are described. Tests include adhesion, impact, bend, and abrasion test of epoxy coating to reinforcing steel, specified in relevant KS and ASTM standards. Three nomnal thicknesses of epoxy coating, $120{\mu}m$, $220{\mu}m$, $300{\mu}m$ are used. The results show good adhesion and abrasion resistance satisfying the requirements. The results also show faily good bendability. However, the thicker the coating, the weaker the adhesion is. Impact resistance is in the tolerable range, but it is recorrmerided that careful treatments are required during handling of epoxy-coated bars. From the results, epoxy-coated bars, with a coating thickness ranging from $150{\mu}m$ to $300{\mu}m$, should well perform for fabrication in field construction.