• Transactions of Materials Processing
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• v.15 no.9 s.90
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• pp.692-696
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• 2006

Micro fabrication of polymeric materials becomes increasingly important. And it is considered as a low-cost alternative to the silicon or glass-based Micro Electro-Mechanical System(MEMS) technologies. In the present study, micro channels were fabricated via LiGA(Lithographie, Galvanoformung, Abformung) process used for Capillary Electrophoresis(CE) chip. Taguchi method was applied to investigate the effects of process conditions in injection molding(melt temperature, injection speed, mold temperature and packing pressure) on the transcription characteristics of the micro channel. It was found that the skin layer disturbs a formation of micro channel. Furthermore, mold temperature and injection speed were two important factors to affect the replication characteristics of micro channel.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1450-1455
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• 2005

This paper describes a DR construction for land navigation and the sigma point based receding horizon Kalman FIR (SPRHKF) filter for DR/GPS hybrid navigation system. A simple DR construction is adopted to improve the performance both of the pure land DR navigation and the DR/GSP hybrid navigation system. In order to overcome the flaws of the EKF, the SPKF is merged with the receding horizon strategy. This filter has several advantages over the EKF, the SPKF, and the RHKF filter. The advantages include the robustness to the system model uncertainty, the initial estimation error, temporary unknown bias, and etc. The computational burden is reduced. Especially, the proposed filter works well even in the case of exiting the unmodeled random walk of the inertial sensors, which can be occurred in the MEMS inertial sensors by temperature variation. Therefore, the SPRHKF filter can provide the navigation information with good quality in the DR/GPS hybrid navigation system for land navigation seamlessly.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.12
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• pp.597-600
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

• Proceedings of the Korea Society for Simulation Conference
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• 2004.05a
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• pp.142-147
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• 2004

It is very difficult to acquire high-fidelity flight test data for small airplanes such as typical unmanned aerial vehicles because MEMS-type small sensors used in the tests do not present reliable data in general. Besides, it is not practical to conduct expensive flight tests for low-cost small airplanes in order to simulate their flight characteristics. A practical approach to obtain acceptable flight data, including stability and control derivatives and data of weight and balance, is proposed in this study. Aircraft design software such as Darcorp's AAA is used to generate aerodynamic data for small airplanes, and moments of inertia are calculated using CATIA, structural design software. These flight data from simulation software are evaluated subjectively and tailored using simulation flight by experienced pilots, based on the certified procedures in FAA AC 120-45A and 40B, which are used for manned airplane simulators.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.12
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• pp.994-1000
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• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.439-439
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• 2000

In this paper, the relationship among the vertical acceleration, measuring points and walking patterns is analyzed. To measure acceleration, the acceleration measurement unit and communication board is constructed. It uses MEMS accelerometer ADXL-202 that detects 2-axis acceleration simultaneously. It is shown by the experiment test that the walking pattern is recognized and walking step is detected at easy when acceleration measurement unit is mounted on leg.. This results can be directly utilized in designing the personal navigation system with low-cost inertial sensor.

• 한국방재학회:학술대회논문집
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• 2010.02a
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• pp.77.1-77.1
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• 2010

본 연구에서는 가속도기반 무선센서노드와 MEMS 가속도계 센서를 이용하여 철도교량의 구조건전성모니터링 기법들의 성능을 검토하였다. 이를 위해 다음과 같은 세 단계의 연구가 수행되었다. 첫째, 저가형 가속도기반 무선센서노드를 설계하였다. 둘째, 철도교량의 구조건전성모니터링을 위한 진동특성 및 건전성평가기법을 선정하였다. 마지막으로, 모형 강판형교에 대한 진동실험을 통해 개발된 가속도기반 무선센서노드의 성능을 평가하고 일련의 손상 시나리오를 대상으로 건전성평가 기법의 성능을 검토하였다. 시간영역 기법인 AR 모델과 주파수영역 기법인 파워스펙트럼 상관계수가 강판형교 구조손상 모니터링에 높은 정확도를 보였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.8
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• pp.378-383
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• 2005

We report the development of miniature fluorescence detection systems that employ miniature prism, mirrors and low coat CCD camera to detect the fluorescence emitted from 40 fluorescently-labeled protein patterns without scanner. This kind of miniature fluorescence detection system can be used in point of care. We introduce two systems, one uses prism+mirror block and the other uses prism and two mirrors. A large NA microscope eyepiece and low cost CCD camera are used. We fabricated protein chip containing multi-pattern BSA labeled with Cy5, using MEMS technology and modified the surface chemically to clean and to immobilize proteins. The measurements show that the combination of prism and mirrors can homogenize elliptical excitation light over the sample with higher optical efficiency, and increase the separation between excitation and fluorescence light at the CCD to give higher signal intensity and higher signal to noise ratio. The measurements also show that protein concentrations ranging from 10 ng/ml to 1000 ng/ml can be assayed with very small error. We believe that the proposed fluorescence detection system can be refined to build a commercially valuable hand-held or miniature detection device.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.5
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• pp.38-45
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• 2004

As optical communication is being substituted for telecommunication, the demand of a large variety of fiber optic components is increasing. V-groove substrates, one of the module components, are used to connect optical fibers to optical planar circuits and to arrange fibers. Their applications are multi-channel optical connectors and optical waveguide fiber coupling, etc. Because these substrates are a critical part of the splitter in a multiplexer and a multi fiber connector, precise and reliable fabrication process is required. For precisely aligning core pitch between fibers, machined core pitch tolerance should be within sub-microns. Therefore, these are generally produced by state-of-the-art micro-fabrication like MEMS. However, most of the process equipment is very expensive. It is also difficult to change the process line for custom designs to meet specific requirements using various materials. For various design specifications such as different values of the V angle and low-priced process, the fabrication method should be flexible and low cost. To achieve this goal, we have suggested a miniaturized machine tool with high accuracy positioning system. Through this study, it is shown that this cutting process can be applied to produce V-groove subtracts. We also show the possibility of using a miniaturized machining system for producing small parts.