• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.19-24
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• 2021

As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important. The cryogenic etching process enables high aspect ratio etching by suppressing the chemical reaction of reactive ions on the sidewall while maintaining the process temperature of -100℃. ESC is an important part for temperature control in cryogenic etching equipment. Through the cooling path inside the ESC, liquid nitrogen is used as cooling water to create a cryogenic environment. And since the ESC directly contacts the wafer, it affects the temperature uniformity of the wafer. The temperature uniformity of the wafer is closely related to the yield. In this study, the cooling path was designed and analyzed so that the wafer could have a uniform temperature distribution. The optimal cooling path conditions were obtained through the analysis of the shape of the cooling path and the change in the speed of the coolant. Through this study, by designing ESC with optimal temperature uniformity, it can be expected to maximize wafer yield in mass production and further contribute to miniaturization and high performance of semiconductor devices.

• Bulletin of the Korean Chemical Society
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• v.35 no.6
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• pp.1703-1705
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• 2014

Bubble column reactors are considered the reactor of choice for numerous applications including oxidation, hydrogenation, waste water treatment, and Fischer-Tropsch (FT) synthesis. They are widely used in a variety of industrial applications for carrying out gas-liquid and gas-liquid-solid reactions. In this paper, the computational fluid dynamics (CFD) model is used for predicting the gas holdup and its distribution along radial and axial direction are presented. Gas holdup increases linearly with increase in gas velocity. Gas bubbles tends to concentrate more towards the center of the column and follows a wavy path.

• Atmosphere
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• v.28 no.2
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• pp.211-222
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• 2018

Cloud droplet activation process is well described by $K{\ddot{o}}hler$ theory and several parameterizations based on $K{\ddot{o}}hler$ theory are used in a wide range of models to represent this process. Here, we test the two different method of calculating the solute effect in the $K{\ddot{o}}hler$ equation, i.e., osmotic coefficient method (OSM) and ${\kappa}-K{\ddot{o}}hler$ method (KK). To do that, each method is implemented in the cloud droplet activation parameterization module of WRF-CHEM (Weather Research and Forecasting model coupled with Chemistry) model. It is assumed that aerosols are composed of five major components (i.e., sulfate, organic matter, black carbon, mineral dust, and sea salt). Both methods calculate similar representative hygroscopicity parameter values of 0.2~0.3 over the land, and 0.6~0.7 over the ocean, which are close to estimated values in previous studies. Simulated precipitation, and meteorological variables (i.e., specific heat and temperature) show good agreement with reanalysis. Spatial patterns of precipitation and liquid water path from model results and satellite data show similarity in general, but on regional scale spatial patterns and intensity show some discrepancy. However, meteorological variables, precipitation, and liquid water path do not show significant differences between OSM and KK simulations. So we suggest that the relatively simple KK method can be a good alternative to the OSM method that requires various information of density, molecular weight and dissociation number of each individual species in calculating the solute effect.

• Atmosphere
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• v.29 no.5
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• pp.609-614
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• 2019

Cloud seeding experiment has been proposed as a way to alleviate severe air pollution problem because, if successful, artificially produced precipitation through cloud seeding could scavenge out some portion of air pollutants. As a first step to verify the practicality of such experiment, seedability of the clouds observed in Seoul is assessed by examining statistical characteristics of some relevant meteorological variables. Analyses of 9 years of Korea Meteorological Agency Seoul station data indicate that as PM₁₀ mass concentration increases, cloud amount, liquid water path, and ice water path decrease, but the difference between temperature and dew point temperature tends to increase. Such finding suggests that cloud seeding becomes less feasible as air pollution becomes more severe in the Seoul metropolitan area, at least in a statistical sense. For some individual severe air pollution events, however, seedable clouds may exist and indeed cloud seeding experiments can be successful. Therefore, detailed investigation on cloud seedability for individual severe air pollution events are highly required to make a concrete assessment of cloud seeding as a way to alleviate severe air pollution problem.

• Journal of ILASS-Korea
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• v.28 no.2
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• pp.97-104
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• 2023

A sprinkler is a fire suppression system that extinguishes combustible materials in the early stages of a fire, creating a spray. However, spray formation method of the sprinkler can result in an uneven distribution of water spray on the surface of combustible materials. It is necessary to ensure a consistent water flux density regardless of the spray direction and angle. In this study, the water flux distribution was analyzed for the various types of sprinkler head: circular, flush, pendent, and upright types. All sprinkler heads have a K-factor of 80 LPM/(0.1MPa)^0.5. In this study, water collection cubes were used to examine the water flux distribution. The upright type sprinkler head showed a low standard deviation in total sprayed area, indicating a high level of uniformity. The upright type head showed the lowest standard deviation in the radial direction, and also showed the lowest standard deviation in the azimuthal direction. Upright sprinkler head has no obstructing structure along the path of droplets after they are generated. For this reason, upright sprinkler head showed the most uniform water flux distribution on the floor.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.1021-1025
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• 2017

Numerical heat/flow analysis was performed on a liquid rocket engine head with the cooling water manifold to ensure the durability of a ground test facility for heat exchanger. Through these studies, the shapes of the injector and the flow path were determined and applied to the head of the engine under development. Firing tests were conducted to verify the designed coolant manifold and no thermal damage was found on the engine-head-face. Comparing the combustion test results with the numerical analysis, the outlet temperature of coolant showed a difference of about $15^{\circ}C$. This trend is reasonable considering existence of LOX manifold, thermal barrier coating, and the actual location of flame.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.645-650
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• 2006

The heat transfer performance and energy transport ability are relatively high due to higher specific heat. Therefore, it can be used in fields such as heating, ventilating, air-conditioning, refrigeration and heat exchangers. In this study, liquid-cooling heat exchangers were designed and tested by varying geometry and operating conditions. In addition, liquid-cooling heat exchangers were tested to provide performance data for MPCM slurry. The liquid-cooling heat exchangers had twelve rectangular channels with flow paths of 1, 2, 4 and 12. Silicon rubber heaters were used to control the heat load to the heat exchanger. Heat input ranged from 293 to 800 W, and inlet temperatures of working fluid varied from 15S to $27^{\circ}C$. The standard deviation of surface temperature was strongly affected by the coolant of MPCM Slurry, All MPCM-cooling heat exchangers showed higher cooling performance than the water-cooling heat exchanger except one path channel heat exchanger.

• Transactions of the Korean Society of Mechanical Engineers
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• v.1 no.1
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• pp.17-25
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• 1977

The purpose of this paper is to clarify the effect of wall proximity on the terminal velocity of single air bubbles in vertical tubes. As an initial step, experiments were conducted to determine the terminal velocity, shape, and path of single air bubbles rising freely in water. The terminal velocity of air bubbles rising through water was measured in cylindrical tubes, rectangular tubes, and parallel plates respectively. The results of effect wall of cylindrical tubes were shown as a dimensionless plot, and may also be used to arrive at a decision regarding the minimum size of tube.

• Applied Chemistry for Engineering
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• v.10 no.4
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• pp.531-536
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• 1999

Experiments on micro-leak of water were carried out with the water injecting simulator in liquid sodium atmosphere. The leak path was plugged by the sodium-water reaction products in the 2.25Cr-1Mo steel specimen. However, leak paths re-opened in most cases. The self-wastage patterns were not affected by the sodium temperature in the re-opened specimen. The diameter of the defected area, including the re-opened part, was about 5 min. It took 143, 40.7 and 34.7 minutes to re-open the leak path at 450, 475, and $510^{\circ}C$, respectively. It was concluded that the reopening time decreased with the increasing temperature.

• The KSFM Journal of Fluid Machinery
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• v.10 no.6
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• pp.17-23
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• 2007

In the present work, flow analysis has been performed in the steam turbine bypass control valve (single-path type) for two different cases i.e., case with steam only and case with both steam and water. The numerical analysis is performed by solving three-dimensional Reynolds-averaged Navier-Stokes (RANS) equations. The shear stress transport (SST) model and $k-{\varepsilon}$ model are used to each different case as turbulence closure. Symmetry condition is applied at the mid plane of the valve while adiabatic condition is used at the outer wall of the cage. Grid independency test is performed to find the optimal number of grid points. The pressure and temperature distributions on the outer wall of the cage are analyzed. The mass flow rate at maximum plug opening condition is compared with the designed mass flow rate. The numerical analysis of multiphase mixing flow(liquid and vapor) is also performed to inspect liquid-vapor volume fraction of bypass valve. The result of volume fraction is useful to estimate both the safety and confidence of valve design.