• Title/Summary/Keyword: lines of the structure

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KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.15-21
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    • 1993
  • This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

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A Study on New Broadband Phase Shifter using λ/8 Parallel Stubs (λ/8 병렬 스터브들을 이용한 새로운 광대역 위상 천이기에 대한 연구)

  • 엄순영;정영배;전순익;육종관;박한규
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.13 no.7
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    • pp.657-666
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    • 2002
  • In this paper, a new broadband phase shifter to adjust the slope of dispersive phase characteristic for frequency of transmission network was proposed. The new fundamental network consists of a fixed main line with a length of λ/2 at the center frequency and two double stubs, each with a length of λ/8 at the center frequency, which are open and shorted, respectively, and which are shunted at the edge points of the main line. Characteristic impedances of the main line and two parallel double stubs are adjusted to produce a minimum phase error and to obtain an input and output match at the desired phase shift. Especially, the proposed structure is especially suitable for a broadband phase shifter with large phase shifts more than 90$^{\circ}$, and it is operated in the octave bandwidth. To verify the usefulness of a new broadband phase shifter, each 45$^{\circ}$-, 90$^{\circ}$-, 180$^{\circ}$-bit phase shifter and 3-bit phase shifter(45$^{\circ}$-phase step), which is cascaded in series, operated at the center frequency 3 GHz were designed, fabricated and experimented. The measured results were in very close agreement with the corresponding simulation results over the bandwidth of I/O impedance match and phase error for each phase shift.

Prefetch R-tree: A Disk and Cache Optimized Multidimensional Index Structure (Prefetch R-tree: 디스크와 CPU 캐시에 최적화된 다차원 색인 구조)

  • Park Myung-Sun
    • The KIPS Transactions:PartD
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    • v.13D no.4 s.107
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    • pp.463-476
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    • 2006
  • R-trees have been traditionally optimized for the I/O performance with the disk page as the tree node. Recently, researchers have proposed cache-conscious variations of R-trees optimized for the CPU cache performance in main memory environments, where the node size is several cache lines wide and more entries are packed in a node by compressing MBR keys. However, because there is a big difference between the node sizes of two types of R-trees, disk-optimized R-trees show poor cache performance while cache-optimized R-trees exhibit poor disk performance. In this paper, we propose a cache and disk optimized R-tree, called the PR-tree (Prefetching R-tree). For the cache performance, the node size of the PR-tree is wider than a cache line, and the prefetch instruction is used to reduce the number of cache misses. For the I/O performance, the nodes of the PR-tree are fitted into one disk page. We represent the detailed analysis of cache misses for range queries, and enumerate all the reasonable in-page leaf and nonleaf node sizes, and heights of in-page trees to figure out tree parameters for best cache and I/O performance. The PR-tree that we propose achieves better cache performance than the disk-optimized R-tree: a factor of 3.5-15.1 improvement for one-by-one insertions, 6.5-15.1 improvement for deletions, 1.3-1.9 improvement for range queries, and 2.7-9.7 improvement for k-nearest neighbor queries. All experimental results do not show notable declines of the I/O performance.

Electrical resistivity and seismic reflection mapping for the southeastern part of the Yongdong basin (Cretaceous), Korea (영동분지(백악기) 남동부의 전기비저항 및 탄성파탐사자료 해석)

  • Kim, Ji-Su;Han, Su-Hyeong;Lee, Cheol-U;Kim, Bok-Cheol;Yang, U-Heon;Son, Ho-Ung;Son, Yeong-Gwan
    • Journal of the Korean Geophysical Society
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    • v.3 no.2
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    • pp.77-90
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    • 2000
  • Five electrical resistivity dipole-dipole and two seismic reflection surveys were performed in the southeastern margin of the Yongdong basin to delineate the shallow basin architecture. To investigate the intra-basin structure, twenty four resistivity sounding points and three dipole-dipole lines were selected especially in the vicinity of volcanic masses. The basin-fault boundaries are identified in electrical dipole-dipole resistivity section as high resistivity-contrast of approximately $1,500\;{\Omega}{\cdot}m$, characterized as a band of high standard-deviation. They are also effectively clarified in the seismic reflection data: amplitude and continuity contrasts in the common shot gather, first-arrival profiles, complex attribute plots. The intra-basin resistivity structures are constructed by interpolating vertical electrical sounding data and dipole-dipole profiles. The high-resistivity anomalies most likely originate from the northsouth-trending and northeast-dipping volcanic masses, which are to be further quantitatively investigated with geomagnetic and magnetotelluric surveys.

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A Knowledge-based Wrapper Learning Agent for Semi-Structured Information Sources (준구조화된 정보소스에 대한 지식기반의 Wrapper 학습 에이전트)

  • Seo, Hee-Kyoung;Yang, Jae-Young;Choi, Joong-Min
    • Journal of KIISE:Software and Applications
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    • v.29 no.1_2
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    • pp.42-52
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    • 2002
  • Information extraction(IE) is a process of recognizing and fetching particular information fragments from a document. In previous work, most IE systems generate the extraction rules called the wrappers manually, and although this manual wrapper generation may achieve more correct extraction, it reveals some problems in flexibility, extensibility, and efficiency. Some other researches that employ automatic ways of generating wrappers are also experiencing difficulties in acquiring and representing useful domain knowledge and in coping with the structural heterogeneity among different information sources, and as a result, the real-world information sources with complex document structures could not be correctly analyzed. In order to resolve these problems, this paper presents an agent-based information extraction system named XTROS that exploits the domain knowledge to learn from documents in a semi-structured information source. This system generates a wrapper for each information source automatically and performs information extraction and information integration by applying this wrapper to the corresponding source. In XTROS, both the domain knowledge and the wrapper are represented as XML-type documents. The wrapper generation algorithm first recognizes the meaning of each logical line of a sample document by using the domain knowledge, and then finds the most frequent pattern from the sequence of semantic representations of the logical lines. Eventually, the location and the structure of this pattern represented by an XML document becomes the wrapper. By testing XTROS on several real-estate information sites, we claim that it creates the correct wrappers for most Web sources and consequently facilitates effective information extraction and integration for heterogeneous and complex information sources.

Student Understanding of Scale: From Additive to Multiplicative Reasoning in the Constriction of Scale Representation by Ordering Objects in a Number Line (척도개념의 이해: 수학적 구조 조사로 과학교과에 나오는 물질의 크기를 표현하는 학생들의 이해도 분석)

  • Park, Eun-Jung
    • Journal of The Korean Association For Science Education
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    • v.34 no.4
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    • pp.335-347
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    • 2014
  • Size/scale is a central idea in the science curriculum, providing explanations for various phenomena. However, few studies have been conducted to explore student understanding of this concept and to suggest instructional approaches in scientific contexts. In contrast, there have been more studies in mathematics, regarding the use of number lines to relate the nature of numbers to operation and representation of magnitude. In order to better understand variations in student conceptions of size/scale in scientific contexts and explain learning difficulties including alternative conceptions, this study suggests an approach that links mathematics with the analysis of student conceptions of size/scale, i.e. the analysis of mathematical structure and reasoning for a number line. In addition, data ranging from high school to college students facilitate the interpretation of conceptual complexity in terms of mathematical development of a number line. In this sense, findings from this study better explain the following by mathematical reasoning: (1) varied student conceptions, (2) key aspects of each conception, and (3) potential cognitive dimensions interpreting the size/scale concepts. Results of this study help us to understand the troublesomeness of learning size/scale and provide a direction for developing curriculum and instruction for better understanding.

Case Study on the Type of Subsidence using Seismic Refraction Survey (탄성파 굴절법을 사용한 지반침하 형태분석 적용사례)

  • Yun Sang-Ho;Ji Jun;Lee Doo Sung
    • 한국지구물리탐사학회:학술대회논문집
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    • 2000.09a
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    • pp.132-146
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    • 2000
  • Seismic refraction survey was performed for 10 lines along NE-SW and NW-SE directions above Nampoong gallery at Makyo-ri, Dogye, Samcheok, Kangwon-do. 48 geophones were laid in line with the interval of 1m, and a 5Kg hammer was used as a source at 5 points for each line. Data processing was done using reciprocal time method, GRM, and traveltime tomography which utilizes wavefront expansion method for forward process and STRT for inversion. The result shows that the first layer has its lower boundary between 3.49m and 8.88m. The P-wave velocity of the first and the second layer were estimated as 270${\~}$360m/s and 1550${\~}$1940m/s respectively. When the boundary of the first and second layer is smooth enough and the velocity difference is large enough, GRM has little advantage over reciprocal time method. The result of reciprocal method and traveltime tomography shows consistency. The northeast part of the boundary has syncline structure, which is similar to the topography above. This implies that the collapse of the cavities of Nampoong gallery result in the subsidence of the ground surface. The subsidence is in progress across the Youngdong railroad, therefore a proper reinforcement work is required.

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A Study of Gold Deposits and Genesis by Using Color-corescanner (컬러코어스캐너 기법에 의한 금광상 배태 현황 및 성인연구)

  • Hyun, Hye-Ja;Hwang, Duk-Hwan
    • Economic and Environmental Geology
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    • v.39 no.6 s.181
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    • pp.663-674
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    • 2006
  • It is very important that analysis of textures in rock, the moving of hydrothermal solution along the structures, epithermal vein textures, mineralization and composition minerals to confirm the hydrothermal ore deposits and ore genesis. The purpose of this study is to confirm the gold mineralization and ore genesis through the moving of hydrothermal solution along the structure lines and epithermal vein textures by using Color-corescanner techniques. The three drilling hole cores of Sunshin Gold Mine in Haenam area in Jeonnam Province were into a digital image data. Digital image data of gold bearing epithermal vein textures were analyzed detaily by Color-corescanner. There are several epithermal vein textures, namely Comb texture, Cavity texture, Bladed texture, Zonal texture, Brecciated texture and Combined texture. Gold mineralization is dominated in vein type textures, but high grade gold are enbedded in brecciated texture. Ore genesis is epithermal gold deposit. This Color-corescanner techniques can cover the missing part of the examine with the naked eye, and can examine closely the situation of ore deposit development and genesis by detail checking the textures in rock, mineralization and so on.

A Design of the New Three-Line Balun (새로운 3-라인 발룬 설계)

  • 이병화;박동석;박상수
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.14 no.7
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    • pp.750-755
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    • 2003
  • This paper proposes a new three-line balun. The equivalent circuit of the proposed three-line balun is presented, and impedance matrix[Z]of the equivalent circuit is derived from the relationship between the current and voltage at each port. The design equation for a given set of balun impedance at input and output ports is presented using[S]parameters, which is transferred fom impedance matrix,[Z]. To demonstrate the feasibility and validity of design equation, multi-layer ceramic(MLC) chip balun operated in the 2.4 GHz ISM band frequency is designed and fabricated by the use of the low temperature co-fired ceramic(LTCC) technology. By employing both the proposed new three-line balun equivalent circuit and multi-layer configuration provided by LTCC technology, the 2012 size MLC balun is realized. Measured results of the multi-layer LTCC three-line balun match well with the full-wave electromagnetic simulation results, and measured in band-phase and amplitude balances over a wide bandwidth are excellent. This proposed balun is very easily applicable to multi-layer structure using LTCC as shown in the paper, and also can be realized with microstrip lines on PCB. This distinctive performance is very favorable for wireless communication systems such as wireless LAN(Local Area Network) and Bluetooth applications.

Analysis of Plants Social Network for Vegetation Conservation on Cheongwansan Provincial Park in Jeollanam-do (천관산도립공원 식생보전을 위한 식물사회네트워크 분석)

  • Ji-Woo Kang;Sang-Cheol Lee;Hyun-Mi Kang
    • Korean Journal of Environment and Ecology
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    • v.37 no.5
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    • pp.392-402
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    • 2023
  • This study was conducted to understand the characteristics of the plant society in Cheongwansan Provincial Park, which lacks research on plants, and to establish basic data necessary for sustainable vegetation management and provincial park research. This study set up 126 quadrats were installed in Cheongwansan Provincial Park to investigate the species that emerged, and interspecies association analysis was conducted focusing on species excluding rare species. The results were written in a sociogram using the Gephi 0.10 program, modular analysis was conducted to distribute groups between adjacent nodes, and network centrality and structure analysis were conducted. As a result of the analysis, the Smilax china showed the highest frequency of appearance in the survey area. Next, it was found to be high in the order of Quercus serrata, Eurya japonica, Styrax japonicus, and Sasa borealis. Interspecies association analysis was conducted on 69 species excluding rare species, and plant social networks were visualized based on benign binding. The Plant Social Network consists of 69 nodes and 396 connecting lines, and one species formed interspecies bonds with an average of about 17.9 species, connecting each other in 2.3 steps. 69 species were divided into three groups through modular analysis, and the first group consisted mainly of evergreen broad-leaved and trees that appeared in warm-temperate region, and the second group consisted mainly of deciduous broad-leaved. The three groups were mainly divided into trees that grow well in sunny and dry sunlight.