• Current Optics and Photonics
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• v.7 no.4
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• pp.325-336
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• 2023

We review recent research related to shearing interferometry, reported over the last two decades. Shearing interferometry is categorized as azimuthal, radial, or lateral shearing interferometers by its fundamental principle to generate interference. In this review the research trends for each technique are provided, with a summary of experimental results containing theoretical background, the optical configuration, analysis, and perspective on its application fields.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.459-463
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• 1996

The lateral-shearing interferometer specially devised for production line inspection lenses is presented. The interferometer is composed with immersion oil and four prisms whose relative sliding motion provide lateral-shearing and phase-shifting. A special phase-measuring algorithm of a-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil Three different algorithm for determinating quantitative aberration of aspherical lenses are presented and compared with one another.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.79-80
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.208-211
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• 2005

The volumetric interferometer, which uses the interference of wavefronts emitted from two single mode fibers, measures the target position in 3-D. In this paper, we suggest a new calculation method which doesn't need a non-linear optimization and an initial guess. We find the relationship between the coefficients of the Zernike polynomials for a spherical wavefront and its center and reconstruct a spherical wavefront by using the Zernike polynomials from two interference fringes like a lateral shearing interferometer. The target position can be obtained from the coefficients of the Zernike polynomials of the reconstructed wavefront. We can get the target position in 3-D with $sub-{\mu}m$ errors in a simulation.

• Korean Journal of Optics and Photonics
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• v.13 no.2
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• pp.98-104
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• 2002

We present a new self-calibration method to remove the systematic error of a 2-axis lateral shearing interferometer that has been specially designed for optical testing of aspheric optics. The method takes multiple measurements by rotating the test optics and extracts the systematic error by fitting the measured wavefronts into the Zernike polynomials. The method works with arbitrary azimuthal angles for test optics rotation, which offers an advantage of correcting the error induced by the non-orthogonality of the two axes of wavefront shearing as well as the error caused by the optical components of the interferometer system itself.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.384-387
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• 1995

Two axes lateral-shearing interferometer(LSI) specially devised for production line inspection lenses is presented. The interferometer composed with four prisms and a dove prism can test the lens performance including asymmetric aspheric lens. The dove prism which rotates the input image with respect to optical axis makes it possible. The wavefront passing through the test lens is reconstsucted by the phase derivative obtained form the two axes LSI system. Zernike-polynomials fitting of this wavefront is presented for determinating quantitative aberration of aspherical lenses.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.199-205
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• 2014

We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

• Proceedings of the Optical Society of Korea Conference
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• 2001.08a
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• pp.54-55
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• 2001

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.224-229
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• 2006

There has been studied flow to minimize the spot size to increase data capacity. Optical data storage devices are being developed near practical limits with wavelength and NA of 405nm and 0.85. There has been studied many types of next generation storage devices such as blu-ray multilayer system, probe based data storage and holographic data storage. Among these data storage devices, solid immersion lens(SIL) based near field recording (NFR) has been widely studied. In this system, SIL is the key component that focuses the laser beam with a very small size which enables ultra high data capacity. Therefore, optical performance evaluation system is required for SIL assembly. In this dissertation, a simple and accurate SIL assembly measurement method is proposed with wedge plate lateral shearing interferometer(LSI). Wedge plate LSI is cheaper than commercialized interferometer, robust to the vibration and the moving distance for phase shifting is large that is order of micrometer. We designed the thickness, wedge angle, material, surface quality and wavelength of wedge plate as 1mm, 0.02degree, fused silica, lamda/10(10-5) and 405nm, respectively. Also, we confirmed simulation and experimental results with quantitative analysis. This simple wedge plate LSI can be applied to different types of SIL such as solid immersion mirror(SIM), hemispherical, super-hemispherical and elliptical SIL.

• Korean Journal of Optics and Photonics
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• v.8 no.3
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• pp.189-193
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• 1997

Aspheric pick-up lenses are increasingly used in consumer products such as computer and multimedia, as their mass production has become possible owing to the injection molding process. However still much work needs to be done for more effective manufacture of aspheric lenses, one area of which is the in-line inspection of produced lenses. In this paper, we present a lateral-shearing interferometer that has specially been designed to have a high immunity to external vibration and atmospheric disturbance. The interferometer comprises four prisms. They are directly attached to each other using an immersion oil so that relative sliding motions between the prisms are allowed. Their relative displacement can readily generate necessary lateral-shearing and phase-shifting to determine the wavefront of the beam collimated by the lens under inspection. A special phase-measuring algorithm of arbitrary-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil. Zernike polynomial fitting has done for determinating quantitative aberration of aspheric pick-up lenses. The interferometer built in this work is robust to external mechanical vibration and atmospheric disturbance so that experimental results show that it has a repeatability of less than λ/100.