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http://dx.doi.org/10.3807/KJOP.2002.13.2.098

Systematic error calibration of 2-axis lateral shearing interferometer  

김승우 (한국과학기술원 기계공학과)
이혁교 (한국과학기술원 기계공학과)
Publication Information
Korean Journal of Optics and Photonics / v.13, no.2, 2002 , pp. 98-104 More about this Journal
Abstract
We present a new self-calibration method to remove the systematic error of a 2-axis lateral shearing interferometer that has been specially designed for optical testing of aspheric optics. The method takes multiple measurements by rotating the test optics and extracts the systematic error by fitting the measured wavefronts into the Zernike polynomials. The method works with arbitrary azimuthal angles for test optics rotation, which offers an advantage of correcting the error induced by the non-orthogonality of the two axes of wavefront shearing as well as the error caused by the optical components of the interferometer system itself.
Keywords
Self-calibration; Lateral shearing interferometer; Systematic errors; Zernike polynomials;
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