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http://dx.doi.org/10.7736/KSPE.2014.31.3.199

Wavelength Scanning Lateral Shearing Interferometer for Freeform Surface Measurement  

Rhee, Hyug-Gyo (Center for Space Optics, Korea Research Institute of Standards and Science)
Ghim, Young-Sik (Center for Space Optics, Korea Research Institute of Standards and Science)
Lee, Joohyong (Center for Space Optics, Korea Research Institute of Standards and Science)
Yang, Ho-Soon (Center for Space Optics, Korea Research Institute of Standards and Science)
Lee, Yun Woo (Center for Space Optics, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.3, 2014 , pp. 199-205 More about this Journal
Abstract
We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.
Keywords
Freeform measurement; Lateral shearing interferometer; Wavelength scanning;
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