Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Wavelength Scanning Lateral Shearing Interferometer for Freeform Surface Measurement

고경사 자유곡면 측정을 위한 파장변조 층밀리기 간섭계

  • Rhee, Hyug-Gyo (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Ghim, Young-Sik (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Lee, Joohyong (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Yang, Ho-Soon (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Lee, Yun Woo (Center for Space Optics, Korea Research Institute of Standards and Science)
  • 이혁교 (한국표준과학연구원 우주광학센터) ;
  • 김영식 (한국표준과학연구원 우주광학센터) ;
  • 이주형 (한국표준과학연구원 우주광학센터) ;
  • 양호순 (한국표준과학연구원 우주광학센터) ;
  • 이윤우 (한국표준과학연구원 우주광학센터)
  • Received : 2014.02.05
  • Accepted : 2014.02.20
  • Published : 2014.03.01
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Abstract

We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

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References

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