• 제목/요약/키워드: laser doping

검색결과 112건 처리시간 0.03초

펨토초 레이저를 이용한 폴리머 박막 재료 초미세 공정에 관한 연구 (Investigation on Femtosecond Laser Processing of Polymeric Thin Films)

  • 정세채
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2006년도 춘계학술대회 논문집
    • /
    • pp.669-670
    • /
    • 2006
  • Two-photon absorption coefficient of a series of dyes in polymer thin films was determined by measuring the femtosecond laser ablation threshold. The threshold value of polymeric thin films decreased gradually when the dopant increased. The two-photon absorption coefficient of the dye molecules dispersed in the polymer film was estimated by using the theoretical relationship between the ablation threshold of the blended polymeric thin films and the dye concentration. The relative values of two-photon absorption cross-section are in good agreement with those measured in solution. On the other hand, the absolute values are smaller than the latter.

  • PDF

Dopant activation by using CW laser for LTPS processing

  • Kim, Ki-Hyung;Kim, Eun-Hyun;Ku, Yu-Mi;Park, Seong-Jin;Uchiike, Heiju;Kim, Chae-Ok;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
    • /
    • pp.310-313
    • /
    • 2005
  • CW laser dopant activation (CLDA) is suggested as an alternative to conventional thermal annealing. The sheet resistance of the ion doped poly-Si after CLDA is sufficiently low compared to the value measured after thermal annealing. The surface damage due to ion doping on the poly-Si can be recovered while CW laser scan for dopant activation. Therefore, the CLDA can be applied to LTPS processing.

  • PDF

산화아연-탄소나노튜브 복합체의 일산화질소 가스 감지 특성에 미치는 코발트 첨가 효과 (Effects of Co Doping on NO Gas Sensing Characteristics of ZnO-Carbon Nanotube Composites)

  • 정훈철;안은성;웬래훙;오동훈;김효진;김도진
    • 한국재료학회지
    • /
    • 제19권11호
    • /
    • pp.607-612
    • /
    • 2009
  • We investigated the effects of Co doping on the NO gas sensing characteristics of ZnO-carbon nanotube (ZnO-CNT) layered composites fabricated by coaxial coating of single-walled CNTs with ZnO using pulsed laser deposition. Structural examinations clearly confirmed a distinct nanostructure of the CNTs coated with ZnO nanoparticles of an average diameter as small as 10 nm and showed little influence of doping 1 at.% Co into ZnO on the morphology of the ZnO-CNT composites. It was found from the gas sensing measurements that 1 at.% Co doping into ZnO gave rise to a significant improvement in the response of the ZnO-CNT composite sensor to NO gas exposure. In particular, the Co-doped ZnO-CNT composite sensor shows a highly sensitive and fast response to NO gas at relatively low temperatures and even at low NO concentrations. The observed significant improvement of the NO gas sensing properties is attributed to an increase in the specific surface area and the role as a catalyst of the doped Co elements. These results suggest that Co-doped ZnOCNT composites are suitable for use as practical high-performance NO gas sensors.

A study of Physically Implanted Surface Islands by direct Nd:YAG Laser Beam Irradiation

  • Oh, Chang-Heon;Cheon, Suyoung;Lim, Changjin;Lee, Jeongjun;Jeon, Jihyun;Kim, Kyoung-Kook;Chung, Chan-Moon;Cho, Soohaeng
    • Applied Science and Convergence Technology
    • /
    • 제26권4호
    • /
    • pp.66-69
    • /
    • 2017
  • Physically implanted surface islands of Nano Carbon Tube (NCT) and ${\alpha}-F_2O_3$ particles have been produced on Al-doped ZnO (AZO)/glass surfaces by simple and direct ND:YAG laser beam irradiation. Sheet resistance of the reconstructed surface increased by about 3.6% of over AZO. Minimal surface damage can be repaired by ND:YAG laser beam irradiation in conjunction with proper impurities. Implanted islands of NCT, which are considered to be a good conductive impurity, on AZO increased the sheet resistance by about 1.8%, while implanted islands of ${\alpha}-F_2O_3$, an insulating impurity, on AZO increased sheet resistance by about 129% compared with a laser beam treated AZO. This study provides insight regarding surface implantations of nanowires and micro-circuits, doping effects for semiconductors and optical devices, surface area and impurity effects for catalysis.

PLD를 이용한 hetero-epitaxial As-doped ZnO 박막 증착 조건의 최적화 (Optimization of the deposition condition on hetero-epitaxial As-doped ZnO thin films by pulsed laser deposition)

  • 이홍찬;정연식;최원국;박훈;심광보;오영제
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
    • /
    • pp.207-210
    • /
    • 2005
  • In order to investigate the influence of the homo buffer layer on the microstructure of the ZnO thin film, undoped ZnO buffer layer were deposited on sapphire (0001) substrates by ultra high vaccum pulsed laser deposition (UHV-PLD) and molecular beam eiptaxy (MBE). After high temperature annealing at $600^{\circ}C$ for 30min, undoped ZnO buffer layer was deposited with various oxygen pressure (35~350mtorr). On the grown layer of undoped ZnO, Arsenic-doped(l, 3wt%) ZnO layers were deposited by UHV-PLD. The optical property of the ZnO was analyzed by the photoluminescence (PL) measurement. From $\Theta-2\Theta$ XRD analysis, all the films showed strong (0002) diffraction peak, and this indicates that the grains grew uniformly with the c-axis perpendicular to the substrate surface. Field emission scanning electron microscope (FE-SEM) revealed that microstructures of the ZnO were varied with oxygen pressure, arsenic doping level, and the deposition method of undoped ZnO buffer layers. The films became denser and smoother in the cases of introducing MBE-buffer layer and lower oxygen pressure during As-doped ZnO deposition. Higher As-doping concentration enhanced the columnar-character of the films.

  • PDF

Controllability of Structural, Optical and Electrical Properties of Ga doped ZnO Nanowires Synthesized by Physical Vapor Deposition

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
    • /
    • 제14권3호
    • /
    • pp.148-151
    • /
    • 2013
  • The control of Ga doping in ZnO nanowires (NWs) by physical vapor deposition has been implemented and characterized. Various Ga-doped ZnO NWs were grown using the vapor-liquid-solid (VLS) method, with Au catalyst on c-plane sapphire substrate by hot-walled pulsed laser deposition (HW-PLD), one of the physical vapor deposition methods. The structural, optical and electrical properties of Ga-doped ZnO NWs have been systematically analyzed, by changing Ga concentration in ZnO NWs. We observed stacking faults and different crystalline directions caused by increasing Ga concentration in ZnO NWs, using SEM and HR-TEM. A $D^0X$ peak in the PL spectra of Ga doped ZnO NWs that is sharper than that of pure ZnO NWs has been clearly observed, which indicated the substitution of Ga for Zn. The electrical properties of controlled Ga-doped ZnO NWs have been measured, and show that the conductance of ZnO NWs increased up to 3 wt% Ga doping. However, the conductance of 5 wt% Ga doped ZnO NWs decreased, because the mean free path was decreased, according to the increase of carrier concentration. This control of the structural, optical and electrical properties of ZnO NWs by doping, could provide the possibility of the fabrication of various nanowire based electronic devices, such as nano-FETs, nano-inverters, nano-logic circuits and customized nano-sensors.

분할디스크형 글라스레이저 증폭기의 온도분포특성에 관한 연구 (Study on the properties of temperature distribution at the split-disk geometry glass laser amplifier)

  • 김병태
    • 한국광학회지
    • /
    • 제3권4호
    • /
    • pp.227-233
    • /
    • 1992
  • 분할디스크형 글라스레이저 증폭기를 개발하기 위하여 이를 해석 설계할 수 있는 시뮬레이션 코드를 작성했다. 레이저매질에서의 열부하를 감소시키고, 플래시램프의 방사스펙트럼과 레이저글라스의 흡수 스펙트럼 간의 결합효율을 높이기 위해서는 전류밀도를 2000-4000A/$\textrm{cm}^{2}$로 유지하여 단파장에서의 방사에너지를 줄여야 한다. 디스크 증폭기에서 같은 부피를 갖는 매질을 3등분하여 냉각표면적을 3배로 늘렸을 때 온도상승치는 30% 정도로 떨어졌다. 단면펌핑 분할 디스크형 증폭기의 설계에서는 각 글라스 간의 $Nd^{3+}$ 도핑율에 차등을 주어야 하고 플래시램프 앞에 있는 매질의 흡수계수 $\alpha$ 와 두께 d의 곱인 $\alpha$d가 0.26 전후가 적절하다는 것을 알았다.

  • PDF

Sensing Properties of Ga-doped ZnO Nanowire Gas Sensor

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
    • /
    • 제16권2호
    • /
    • pp.78-81
    • /
    • 2015
  • Pure ZnO and ZnO nanowires doped with 3 wt.% Ga (‘3GZO’) were grown by pulsed laser deposition in a furnace system. The doping of Ga in ZnO nanowires was analyzed by observing the optical and chemical properties of the doped nanowires. The diameter and length of nanowires were under 200 nm and several ${\mu}m$, respectively. Changes of significant resistance were observed and the sensitivities of ZnO and 3GZO nanowires were compared. The sensitivities of ZnO and 3GZO nanowire sensors measured at 300℃ for 1 ppm of ethanol gas were 97% and 48%, respectively.

The effect of annealing method on dopant-activation and damage-recovery in ion-shower-doped Poly-Si using $PH_3/H_2$

  • Kim, Dong-Min;Kim, Dae-Sup;Ro, Jae-Sang;Choi, Kyu-Hwan;Lee, Ki-Yong
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
    • /
    • pp.1072-1075
    • /
    • 2004
  • Ion shower doping using a source gas of $PH_3/H_2$ was conducted on excimer-laser-annealed (ELA) Poly-Si. As-implanted damage is accumulated more and more with the increase of an acceleration voltage and a doping time. In this study we found that dopant-activation is relatively a rapid kinetic-process while damage-recovery is not.

  • PDF

Sb-doped Ag/Ge-Se-Te 박막의 상변화 특성 연구 (A Study of Phase-change Properties of Sb-doped Ag/Ge-Se-Te thin films)

  • 남기현;정원국;박주현;정홍배
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.347-347
    • /
    • 2010
  • In other to progress better crystallization transition and long phase-transformation data of phase-change memory (PRAM), we investigated about the effect of Sb doping and Ag ions percolating into Ge-Se-Te phase-change material. Doped Sb concentrations was determined each of 10 wt%, 20 wt% and 30 wt%. As the Sb-doping concentration was increased, the resistivity decreased and the crystallization temperature increased. Ionization of Ag was progressed by DPSS laser (532 nm) for 1 hour. The resistivity was more decreased and the crystallization temperature was more increased in case of adding Ag layer under Sb-(Ge-Se-Te) thin film. At the every condition of thin films included Ag layer more stable states were indicated compare with just Sb-doped Ge-Se-Te thin films.

  • PDF