• Journal of the Korean Vacuum Society
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• v.9 no.4
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• pp.428-435
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• 2000

Negative ion generation in an inductively coupled oxygen plasma was investigated by using a Langmuir probe. It was observed that the probe current ratio of the positive ion saturation current and the negative current which is consisted of the electron current and the negative ion current, and also the potential difference between the floating potential and plasma potential vary with the RF input power and more sensitively with the operating pressure, respectively. Results show that the operating condition to achieve the maximum probe current ratio and the minimum potential difference shift from the low pressure region to the high pressure regions with increasing the input power. It implies that the generation of the negative oxygen ions increases and the recombination of the positive and negative ions are enhanced in the plasma.

• Journal of the Korean Institute of Telematics and Electronics
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• v.23 no.1
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• pp.83-90
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• 1986

A micro pH-ISFET probe, which can be applied to the in vivo measurements of the hydrogen ion concentration in blood, has been developed, and a measuring system equiped with this probe also developed. The pH-ISFET has been fatricated by employing the techniques of integrated circuit fabrication. Two kinds of micro electrode formed around the sensing gate during the wafer process, and the other is a capillary type of Ag/AfCl/sat. KCI reduced in size. This capillary electrode has shown its good performance characteristics so far in the application with ISFET as well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and the capillary electrode were built together into a needle tip having 1 mm inner diameter. The chip size of a twin pH-ISFET is 0.8 mmx1.4 mm, the material of the sensing gate membrane is Si3N4, and the sensitivity of the developed probe is about 52mV/pH.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 2003.11a
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• pp.103-108
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• 2003

A method to determine chromium(III) ion in aqueous solution by chemiluminescence method using a lucigenin entrapped silica sol-gel film has been studied. An optical probe for chromium(III) ion has been prepared by entrapping lucigenin into silica sol-gel film coated on a glass support by dip coating. The chromium(III) optical sensor is based on the catalytic effect of chromium(IIII) ion on the reaction between lucigenin and hydrogen peroxide in basic solutions. The effects of Nafion, DMF and Triton X-100 were investigated to find the optimum condition to minimize cracking and leaching from the probe. The effects of pH and concentrations of lucigenin and hydrogen peroxide on the chemiluminescence intensity were investigated. The chemiluminescence intensity was increased linearly with increasing chromium(III) concentration from $2.5{\times}10^{-4}$M to $8.0{\times}10^{-7}$M and the detection limit was $4.0{\times}10^{-7}$M.

• Bulletin of the Korean Chemical Society
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• v.34 no.11
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• pp.3253-3256
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• 2013

Lithium is a highly attractive material for high-energy-concentration batteries, since it has low weight and high potential. Rechargeable lithium-ion batteries (LIBs), which have the extremely high gravimetric and volumetric energy densities, are currently the most preferable power sources for future electric vehicles and various portable electronic devices. In order to improve the efficiency and lifetime, new electrode compounds for lithium intercalation or insertion have been investigated for rechargeable batteries. Solid-state nuclear magnetic resonance (NMR) is a very useful tool to investigate the structural changes in electrode materials in actual working lithium-ion batteries. To detect the in-situ microstructural changes of electrode and electrolyte materials, $^7Li-^{19}F$ double-resonance solid-state NMR probe with a static solenoidal coil for a 600-MHz narrow-bore magnet was designed, constructed, and tested successfully.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.12 s.189
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• pp.122-127
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• 2006

This paper reports on the development of carbon nanotube tip modified with focused ion beam(FIB). We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a metal-coated canning Probe Microscope (SPM) tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip was aligned toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for SPM.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.149-154
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• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• Proceedings of the Korean Vacuum Society Conference
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• 1994.02a
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• pp.24-24
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• 1994

• Transactions of the Korean Society of Automotive Engineers
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• v.11 no.1
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• pp.42-48
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• 2003

LPG has been a broad concern of pro-environmental alternative fuel for vehicles. Recently, the new Liquid Phase LPG Injection(LPLI) system extends the limit of power of LPG engine and gives a chance to substitute LPG engine for diesel engine of heavy duty vehicles that are the main resources of air pollution in urban area. Large bore size of heavy duty LPG engine derives a serious knock problem. To find an optimal MBT conditions, it is necessary to know how the flame develops in the combustion chamber and find where the knock positions are. In this study. the ion-probe head gasket was used to estimate the knock position. Inverse operation of the ion-probe signal provides the flame developing characteristics. The further the position is from the spark plug, the later the flame arrives and the more times knock occurs. The main factor that effects knock position is inferred a flor situation of mixed gas in the combustion chamber.

• Journal of Soil and Groundwater Environment
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• v.14 no.6
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• pp.29-34
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• 2009

In this study, a chloride ion probe as a direct measurement for perchlorate reduction was used to determine whether biological perchlorate reduction was inhibited by other electron acceptors ($O_2$ and ${NO_3}^-$) and to investigate competition of electron acceptors for using electron donors. Profiles of chloride production (= perchlorate reduction) in flasks containing perchlorate reducing populations were monitored by a chloride ion probe. Biological reduction of 2 mM perchlorate was inhibited by 2 mM nitrate that chloride production rate was decreased by 30% compared to perchlorate used as the only electron acceptor and chloride production rate was decreased by 70% when acetate was limited. Reduction of 2mM perchlorate was completely inhibited by oxygen at 7~8 mg/L, regardless of acetate excess / limitation.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.33 no.4
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• pp.439-446
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• 2023

Objectives: The aims of this study are to investigate how X-rays are emitted to surrounding parts during the ion implantation process, to analyze these emissions in relation to the properties of the ion implanter equipment, and to estimate the resulting exposure dose. Eight ion implanters equipped with high-voltage electrical systems were selected for this study. Methods: We monitored X-ray emissions at three locations outside of the ion implanters: the accelerator equipped with a high-voltage energy generator, the impurity ion source, and the beam line. We used a Personal Portable Dose Rate and Survey Meter to monitor real-time X-ray levels. The SX-2R probe, an X-ray Features probe designed for use with the Radiagem^TM meter, was also utilized to monitor lower ranges of X-ray emissions. The counts per second (CPS) measured by the meter were estimated and then converted to a radiation dose (𝜇Sv/hr) based on a validated calibration graph between CPS and μGy/hr. Results: X-rays from seven ion implanters were consistently detected in high-voltage accelerator gaps, regardless of their proximity. X-rays specifically emanated from three ion implanters situated in the ion box gap and were also found in the beam lines of two ion implanters. The intensity of these X-rays did not show a clear pattern relative to the devices' age and electric properties, and notably, it decreased as the distance from the device increased. Conclusions: In conclusion, every gap, in which three components of the ion implanter devices were divided, was found to be insufficiently shielded against X-ray emissions, even though the exposure levels were not estimated to be higher than the threshold.