Journal of the Korean Institute of Telematics and Electronics (대한전자공학회논문지)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Development of a Micro pH-ISFET Probe for in vivo Measurements of the Ion Concentration in Blood

생체내의 혈중이온농도 예측을 위한 마이크로 pH-ISFET프로브의 개발

  • Sohn, Byung-Ki (Dept. of Elec. Eng., Kyungpook National Univ.) ;
  • Lee, Jong Hyun (Dept. of Elec. Eng., Kyungpook National Univ.) ;
  • Lee, Kwang Man (Dept. of Elec. Eng., Kyungpook National Univ.)
  • 손병기 (경북대학교 전자공학과) ;
  • 이종현 (경북대학교 전자공학과) ;
  • 이광만 (경북대학교 전자공학과)
  • Published : 1986.01.01
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Abstract

A micro pH-ISFET probe, which can be applied to the in vivo measurements of the hydrogen ion concentration in blood, has been developed, and a measuring system equiped with this probe also developed. The pH-ISFET has been fatricated by employing the techniques of integrated circuit fabrication. Two kinds of micro electrode formed around the sensing gate during the wafer process, and the other is a capillary type of Ag/AfCl/sat. KCI reduced in size. This capillary electrode has shown its good performance characteristics so far in the application with ISFET as well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and the capillary electrode were built together into a needle tip having 1 mm inner diameter. The chip size of a twin pH-ISFET is 0.8 mmx1.4 mm, the material of the sensing gate membrane is Si3N4, and the sensitivity of the developed probe is about 52mV/pH.

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